【摘要】：精密角度定位技術(shù)是整合了機械、電子、光學(xué)及智能控制于一體的復(fù)合控制技術(shù),廣泛應(yīng)用于精密角位移測量與控制場合,如集成電路中硅片平面度的檢測、精密導(dǎo)軌的直線度檢測等。本文主要研究利用激光莫爾信號實現(xiàn)精密角位移測量與控制的方法及關(guān)鍵技術(shù),主要包含了以下幾個方面：研究了兩級光柵衍射所產(chǎn)生的莫爾信號的角位移特性,建立了莫爾信號光強與角位移測量的數(shù)學(xué)模型。通過計算機仿真對建立的數(shù)學(xué)模型進(jìn)行了研究。仿真結(jié)果表明,兩級光柵衍射后的莫爾信號強度會隨著光柵間距變化呈周期性變化,當(dāng)光柵間距為P2/λ的整數(shù)倍時,莫爾信號幅度變化最大,同時莫爾信號強度也隨兩片光柵的相對角位移呈周期性變化。在建立了莫爾信號角位移測量模型的基礎(chǔ)上,設(shè)計了宏微復(fù)合式驅(qū)動定位系統(tǒng)。宏位移機構(gòu)以步進(jìn)電機為核心,以精密絲杠為傳動機構(gòu),根據(jù)光柵檢測到的位移信號及工控機發(fā)出的脈沖指令,完成精度為±5μrad的初始定位；微位移機構(gòu)以壓電陶瓷為核心,以柔性鉸鏈為傳動機構(gòu),根據(jù)角位移檢測信號的大小,發(fā)出相應(yīng)驅(qū)動電壓,驅(qū)動壓電致動器發(fā)生形變,從而帶動傳動機構(gòu)完成微小角度的調(diào)整,最終實現(xiàn)高精度、大行程的精密角位移測量和控制,角位移精度可達(dá)±100nrad。在精密角度定位過程中,由于壓電陶瓷存在著非線性缺陷,為了提高精密角度定位的精度和穩(wěn)定性,本文對壓電陶瓷的輸入輸出特性進(jìn)行了實驗分析,并應(yīng)用神經(jīng)網(wǎng)絡(luò)技術(shù)模擬壓電陶瓷的輸入輸出,減小壓電陶瓷非線性對精密角位移測量與控制的影響,有效的提高了角位移測量的精度和速度。
[Abstract]:Precision angle positioning technology is a composite control technology which integrates mechanical, electronic, optical and intelligent control. It is widely used in precision angular displacement measurement and control applications, such as silicon wafer flatness detection in integrated circuits. Precision guideway straightness test, etc. This paper mainly studies the method and key technology of realizing precise angular displacement measurement and control by using laser moire signal. It mainly includes the following aspects: the angular displacement characteristic of moire signal produced by two-stage grating diffraction is studied. The mathematical model of moire signal intensity and angular displacement measurement is established. The mathematical model is studied by computer simulation. The simulation results show that the moire signal intensity after diffraction of the two-stage grating varies periodically with the grating spacing, and when the grating spacing is an integer multiple of P _ 2 / 位, the magnitude of the moire signal is the largest. At the same time, the moire signal intensity also changes periodically with the relative angular displacement of the two gratings. Based on the moire signal angular displacement measurement model, a macro-micro composite drive positioning system is designed. The macro displacement mechanism takes the stepping motor as the core and the precision screw as the transmission mechanism. According to the displacement signal detected by the grating and the pulse instruction from the industrial control computer, the initial positioning accuracy of 鹵5 渭 rad is completed. The micro-displacement mechanism takes piezoelectric ceramic as the core and flexure hinge as the transmission mechanism. According to the magnitude of the angular displacement signal, the micro-displacement mechanism sends out the corresponding driving voltage and drives the piezoelectric actuator to deform, thus driving the drive mechanism to complete the adjustment of the micro-angle. Finally, the precision angular displacement measurement and control of high precision and large stroke can be achieved, and the angular displacement precision can reach 鹵100 nrad. In order to improve precision angle positioning accuracy and stability, the input and output characteristics of piezoelectric ceramics are analyzed experimentally in order to improve the precision and stability of piezoelectric ceramics due to the nonlinear defects of piezoelectric ceramics in the process of precision angle positioning. The neural network technology is used to simulate the input and output of piezoelectric ceramics to reduce the influence of nonlinearity of piezoelectric ceramics on precision angular displacement measurement and control. The precision and speed of angular displacement measurement are improved effectively.
【學(xué)位授予單位】：南京師范大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TG82

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