【摘要】：利用磁控濺射法制備得到二氧化鈦薄膜,將薄膜在高溫管式爐中分別進(jìn)行退火,利用XRD、AFM和紫外-可見光譜儀研究了不同溫度下退火前后薄膜的晶相結(jié)構(gòu)、光學(xué)性能和光催化性能。結(jié)果表明,隨著退火溫度的升高二氧化鈦的晶相由銳鈦礦向金紅石轉(zhuǎn)變,600℃時為兩相共存,表面顆粒大小也會有相應(yīng)變化,銳鈦礦相表現(xiàn)出了更好的光催化性能。
[Abstract]:Titanium dioxide thin films were prepared by magnetron sputtering. The films were annealed in a high temperature tube furnace respectively. The crystal phase structure of the films before and after annealing at different temperatures was studied by XRD,AFM and UV-Vis spectrometer. Optical properties and photocatalytic properties. The results show that the crystalline phase of TIO _ 2 changes from anatase to rutile with the increase of annealing temperature, the two phases coexist at 600 鈩，

本文編號：2299471