【摘要】：提出了一種按需有機(jī)氣相噴印沉積成膜技術(shù),以惰性氣體為載氣,攜帶高溫有機(jī)蒸汽經(jīng)由圖形化噴嘴噴射,在基板上冷卻沉積成形.以AlQ3為有機(jī)原料,使用單孔硅噴嘴研究了噴嘴直徑、蒸發(fā)腔溫度、基板溫度、載氣驅(qū)動(dòng)壓力、基板與噴嘴間距、電磁閥開啟時(shí)間和基板掃描速度等控制參數(shù)對噴印圖形尺寸的影響,同時(shí)進(jìn)行了單孔噴嘴圖形陣列沉積和陣列噴嘴的直接并行沉積實(shí)驗(yàn).實(shí)驗(yàn)結(jié)果表明:該按需有機(jī)氣相噴印沉積成膜系統(tǒng)可實(shí)現(xiàn)有機(jī)材料的精密圖形化沉積.
[Abstract]:A film forming technique based on on-demand organic vapor spray deposition is proposed, which takes inert gas as carrier gas, carries high temperature organic vapor through graphical nozzle jet, and cools deposition on substrate. Using AlQ3 as organic raw material, the diameter of nozzle, the temperature of evaporation chamber, the temperature of substrate, the driving pressure of carrier gas, the distance between substrate and nozzle were studied by using single hole silicon nozzle. The effect of the control parameters such as the opening time of solenoid valve and the scanning speed of substrate on the size of the spray printing pattern was studied. The experiments of single hole nozzle pattern array deposition and direct parallel deposition of array nozzle were carried out at the same time. The experimental results show that the film forming system can realize the precise graphical deposition of organic materials.
【作者單位】： 華中科技大學(xué)機(jī)械科學(xué)與工程學(xué)院;
【基金】：國家自然科學(xué)基金資助項(xiàng)目(61108043,51175204) 高等學(xué)校博士學(xué)科點(diǎn)專項(xiàng)科研基金資助項(xiàng)目(20120142130011)
【分類號(hào)】：TG173

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