發(fā)布時(shí)間：2018-10-11 12:26

【摘要】：過渡金屬氮化物涂層具有優(yōu)異的力學(xué)性能和摩擦磨損表現(xiàn),在工業(yè)上獲得廣泛的應(yīng)用。本文在V-Al-N涂層體系中引入過渡金屬大原子Ta,利用反應(yīng)磁控濺射的方法制備出不同Ta含量的(V,Al)1-xTaxN涂層。通過XANES、XRD、AFM、SEM、 TEM等分析手段對涂層結(jié)構(gòu)和表面形貌進(jìn)行分析,研究了Ta含量變化對涂層結(jié)構(gòu)的影響并通過TRIM軟件計(jì)算分析了長膜過程中各種粒子的能量分布情況；利用納米壓痕儀、維氏壓痕儀、劃痕儀對涂層力學(xué)性能和變形行為進(jìn)行測試,研究了Ta含量對涂層力學(xué)性能的影響；在700℃條件下真空退火,初步研究了涂層的熱穩(wěn)定性；利用UMT-3型多功能摩擦磨損試驗(yàn)機(jī)對涂層摩擦磨損性能進(jìn)行測試,通過對磨損率、摩擦系數(shù)和磨痕形貌的觀察分析研究涂層的磨損性能。研究表明：1)所有涂層均為立方NaCl結(jié)構(gòu),Ta元素的含量對晶粒的取向有明顯影響。Ta含量較低時(shí)涂層呈現(xiàn)(111)結(jié)構(gòu),當(dāng)Ta含量較高時(shí)(x≥0.57)涂層(111)衍射峰完全消失,變?yōu)橥耆?200)結(jié)構(gòu)。同時(shí)Ta含量也影響柱狀晶的生長結(jié)構(gòu),所有涂層均呈明顯的柱狀晶生長,Ta含量增加,涂層逐步變得更加致密,TRIM計(jì)算結(jié)果表明高能反彈粒子對膜表面的轟擊作用可能增加了膜層表面原子的遷移率,使長膜時(shí)表面擴(kuò)散增加,從而導(dǎo)致涂層生長結(jié)構(gòu)的致密化。2)隨著Ta含量的增加,涂層的力學(xué)性能有顯著的提高。Ta含量x=0.03的涂層硬度只有13.8 GPa,而x=0.57的涂層硬度翻了一倍達(dá)到了29.8 GPa,涂層生長結(jié)構(gòu)的致密化可能是硬度大幅提高的重要原因之一。加入一定量的Ta有利于提高涂層的韌性。壓痕測試和劃痕測試表明呈(200)結(jié)構(gòu)的涂層(高Ta)抗裂紋能力更好,其不但有較高的硬度,韌性也較好,說明一定量Ta的加入對涂層的力學(xué)性能提高有較大影響。3)退火實(shí)驗(yàn)顯示少量Ta的涂層(x≤0.18)退火后硬度有所提升,中等Ta含量的涂層(x=0.31、x=0.57)退火后硬度沒有太大變化,處于相對較高水平,而過量Ta涂層(x=0.68)退火后硬度則下降明顯。4)摩擦實(shí)驗(yàn)表明Ta含量的增加一定程度上可以降低涂層的初始摩擦系數(shù),但同時(shí)也會導(dǎo)致涂層的磨損率增加。
[Abstract]:Transition metal nitride coatings have been widely used in industry due to their excellent mechanical properties and friction and wear properties. In this paper, transition metal large atom Ta, was introduced into V-Al-N coating system to prepare (VN Al) 1-xTaxN coatings with different Ta content by reactive magnetron sputtering. The structure and surface morphology of the coating were analyzed by means of XANES,XRD,AFM,SEM, TEM, the effect of Ta content on the coating structure was studied, and the energy distribution of various particles in the long film was calculated by TRIM software. The mechanical properties and deformation behavior of the coatings were tested by Vickers indentation instrument, the effect of Ta content on the mechanical properties of the coatings was studied, and the thermal stability of the coatings was preliminarily studied by vacuum annealing at 700 鈩，

本文編號：2264188