超精密圓柱度誤差測(cè)量方法研究
[Abstract]:Cylindrical parts are the basic parts of all kinds of machines and equipments, and they are also the necessary components to form various rotary motion pairs. The surface shape errors of cylindrical parts have a great influence on the matching accuracy and properties, and control the vibration of the rotary motion process. Noise and lubrication between rotary motion pairs, sealing effect has important significance. Cylindricity error is a comprehensive evaluation index for the shape accuracy of cylindrical parts, which reflects the variation of the measured cylinder surface relative to the ideal cylindrical surface. Simple, practical, economical, high precision and high efficiency cylindrical error measurement method has been a hot spot of domestic and foreign scholars. The author consulted a lot of literature and analyzed the current measurement methods of Cylindricity error at home and abroad. According to the evaluation standard of Cylindricity error and the basic theory of capacitive sensor, the method of measuring Cylindricity error by capacitive shape surface sensor was put forward. In this method, the cylindrical parts are measured by sampling surface, and all the information of the measured plane can be obtained by one sampling, so that the cylindrical error can be measured quickly, with high accuracy and without contact. It makes up for the shortcoming of sampling point sampling. This paper first studies and deduces the solution process and properties of partial capacitance of multi-conductor system, and uses ANSYS software to extract part capacitance of multi-conductor system based on three-dimensional solid model. The accuracy of the measurement principle of capacitive shape surface sensing method is verified, and the feasibility of the capacitance shape surface sensing method is also explained. Finally, the capacitive measuring head is designed according to the measuring principle of capacitive sensor. The simulation experiment of the designed capacitance measuring head is carried out, and the results of the experiment and the distribution of electric field are analyzed. The results show that the designed capacitive measuring head can greatly reduce the influence of edge effect and external interference on the measurement results, and optimize the dimension parameters of the capacitance measuring head structure. The primary and secondary relationships and the optimal horizontal combination of the influence of each dimension parameter on the measurement results are found. In view of the requirement that the cylinder error of parts produced by a company can not be greater than that of 0.002mm, based on the basic theory of capacitive shape surface sensing method, the mechanical structure of measuring device is designed as a whole.
【學(xué)位授予單位】:長春工業(yè)大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2015
【分類號(hào)】:TG835
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