本文選題：磁控濺射 + Ti��； 參考：《表面技術(shù)》2015年09期

【摘要】：目的研究劃痕法測試參數(shù)對臨界失效載荷的影響,以便更準確地測定硬質(zhì)薄膜的結(jié)合強度。方法采用磁控濺射技術(shù)在304不銹鋼和Si片上制備氮化鈦(Ti N)薄膜。采用掃描電鏡觀察薄膜的截面形貌和厚度,采用納米壓入法測試薄膜的硬度,采用劃痕法測試薄膜的結(jié)合強度,研究不同劃痕長度、劃動速率和加載速率對臨界載荷的影響。結(jié)果所制備Ti N薄膜致密,厚度約2μm,納米壓入硬度約2300HV,Ti N/304不銹鋼體系為硬膜軟基體。相同加載載荷(10 N)和劃動行程(3 mm)條件下,增加劃動速率(1~3 mm/min),導致首次聲發(fā)射信號延遲;相同加載載荷(10 N)和劃動速率(3 mm/min)條件下,隨著劃動行程的增加(3~9 mm),第三、四類失效模式逐漸減弱。結(jié)論采用劃痕法測定結(jié)合強度時,應該以劃痕形貌同時出現(xiàn)第一到第四模式時判斷失效,并且對應典型聲發(fā)射信號為參考;合理的測試參數(shù)范圍,可重復出現(xiàn)臨界載荷值。制備的Ti N薄膜聲發(fā)射信號存在共同的臨界特征值4.9 N,結(jié)合劃痕形貌特征,判定其結(jié)合強度值為4.9 N。
[Abstract]:Aim to study the effect of scratch test parameters on critical failure load in order to determine the bonding strength of hard film more accurately. Methods Titanium nitride (tin) thin films were prepared on 304 stainless steel and Si substrates by magnetron sputtering. The morphology and thickness of the films were observed by scanning electron microscope (SEM), the hardness of the films was measured by nano-indentation method, the bonding strength of the films was measured by scratch method, and the effects of different scratch lengths, scratching rates and loading rates on the critical loads were studied. Results the Ti N thin films were dense and the thickness was about 2 渭 m, and the hardness of the nanocomposites was about 2300 HVN / 304 stainless steel. Under the same loading load (10 N) and stroke (3 mm), the increase of stroke rate (1 ~ 3 mm/min) leads to the delay of first acoustic emission signal, and under the same loading load (10 N) and stroke rate (3 mm/min), with the increase of stroke (3 ~ 9 mm), Four types of failure modes are gradually weakened. Conclusion in the determination of bonding strength by scratch method, failure should be judged by the first to fourth modes of scratch appearance, and corresponding to typical acoustic emission signals, and the critical load value can be repeated in a reasonable range of test parameters. There is a common critical eigenvalue of 4.9 N in the acoustic emission signal of the prepared tin film, and the binding strength of the film is determined to be 4.9 N. combined with the scratch morphology.
【作者單位】： 裝甲兵工程學院再制造技術(shù)重點實驗室;
【基金】：國家自然科學基金項目(51102283) 北京市自然科學基金項目(3132024)~~
【分類號】：TG174.4;TB302

【共引文獻】

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7 朱e，

本文編號：2107438