本文選題：空氣靜壓主軸 + 動態(tài)特性��； 參考：《中國工程物理研究院》2015年碩士論文

【摘要】：金剛石飛切(Diamond Flying Cutting, DFC)機床是實現(xiàn)大口徑平面類光學元件超精密加工的關鍵裝備,在國防和民用尖端產(chǎn)品(如精確制導、夜視、熱成像瞄準系統(tǒng)、強激光武器)的加工中得到了廣泛應用。空氣靜壓主軸是DFC機床實現(xiàn)回轉運動的核心。實際切削時,來自切削過程、DFC機床傳動系統(tǒng)以及機床外界的各種擾動力將作用在DFC機床的空氣靜壓主軸系統(tǒng)上,致使刀具與工件間產(chǎn)生相對位移,改變了它們之間的正確位置關系,并在加工表面上留下振紋,從而降低了被加工零件的表面質量。因此,研究空氣靜壓主軸系統(tǒng)的動態(tài)特性,識別空氣靜壓主軸系統(tǒng)抗振的薄弱環(huán)節(jié),并優(yōu)化改進,對提高其空氣靜壓主軸系統(tǒng)的抗振性能和DFC機床加工穩(wěn)定性具有重要意義,為此本文主要開展了如下工作：(1)建立了空氣靜壓主軸動態(tài)特性理論模型,基于集中質量模型給出了主軸系統(tǒng)的動力學方程,為系統(tǒng)開展主軸動態(tài)特性研究奠定了基礎。(2)基于結合面動態(tài)特性理論,開展了空氣靜壓主軸典型結合面的動態(tài)特性分析與實驗研究,獲得了主軸氣膜結合面和螺栓結合面的動態(tài)特性參數(shù)及其變化規(guī)律。(3)采用數(shù)值仿真與模態(tài)實驗相結合的方法,建立了空氣靜壓主軸系統(tǒng)的動態(tài)特性模型。在此基礎上,研究了主軸系統(tǒng)的動態(tài)特性參數(shù)及其變化規(guī)律。(4)結合金剛石飛切工藝實驗,采用特征頻率辨識的方法,初步建立了空氣靜壓主軸系統(tǒng)動態(tài)特性與金剛石飛切工件表面部分波段波紋誤差的對應關系,識別了空氣靜壓主軸系統(tǒng)內的薄弱環(huán)節(jié),并提出了相應的優(yōu)化改善措施,最后通過金剛石飛切實驗驗證了優(yōu)化措施的有效性。通過以上的研究工作,本研究最終建立了包含結合面的DFC機床空氣靜壓主軸系統(tǒng)動態(tài)模型,獲得了主軸動態(tài)特性參數(shù)及其變化規(guī)律,揭示了主軸動態(tài)特性與金剛石飛切表面波紋誤差的對應關系,最終通過對主軸薄弱環(huán)節(jié)的優(yōu)化,使PSD1頻段(2.5mm≤L≤33mm)內的金剛石飛切表面波紋誤差RMS值從53nm降低至12nm,驗證了本文研究方法和結論的正確性。
[Abstract]:Diamond Flying cutting machine tool is the key equipment to realize ultra-precision machining of large-caliber planar optical components. It is used in advanced products such as precision guidance, night vision, thermal imaging aiming system, and so on, in national defense and civil advanced products, such as precision guidance, night vision, thermal imaging aiming system, etc. High-power laser weapon) has been widely used in processing. The air static spindle is the core of DFC machine tool. In actual cutting, the driving system of the DFC machine tool and the external disturbance force will act on the air static spindle system of the DFC machine tool, resulting in the relative displacement between the cutting tool and the workpiece. The correct position relation between them is changed, and the vibration is left on the machined surface, which reduces the surface quality of the machined parts. Therefore, it is of great significance to study the dynamic characteristics of air static spindle system, identify the weak links of vibration resistance of air static spindle system, and optimize the improvement to improve the anti-vibration performance of air static spindle system and the machining stability of DFC machine tool. The main work of this paper is as follows: (1) A theoretical model of the dynamic characteristics of the air static spindle is established, and the dynamic equation of the spindle system is given based on the lumped mass model. Based on the theory of dynamic characteristics of the interface, the dynamic characteristic analysis and experimental study of the typical joint surface of the aerostatic spindle are carried out. The dynamic characteristic parameters and their variation law of the air film bonding surface and the bolt joint surface are obtained. The dynamic characteristic model of the air static pressure spindle system is established by combining the numerical simulation with the modal experiment. On the basis of this, the dynamic characteristic parameters of the spindle system and its variation law are studied. Combined with the experiment of diamond flying cutting process, the method of characteristic frequency identification is adopted. The relationship between the dynamic characteristics of the aerostatic spindle system and the waveband corrugation error on the surface of the diamond flying cutting workpiece is preliminarily established, the weak links in the air static spindle system are identified, and the corresponding optimization and improvement measures are put forward. Finally, the effectiveness of the optimization measures is verified by diamond flying cutting experiments. Through the above research work, the dynamic model of air static spindle system of DFC machine tool including joint surface is established, and the dynamic characteristic parameters of spindle and its variation law are obtained. The relationship between the dynamic characteristics of the spindle and the corrugation error of the diamond flying cutting surface is revealed. Finally, the weak links of the spindle are optimized. The corrugation error (RMS) of diamond flying cutting surface in PSD1 band (2.5mm 鈮，

本文編號：1864156