CVD法制備工藝參數(shù)對(duì)6.5%Si硅鋼脆性的影響
本文選題:6.5%Si硅鋼 + CVD ; 參考:《華東理工大學(xué)》2015年碩士論文
【摘要】:硅鋼的性能與所含硅含量存在密切關(guān)系,隨著硅含量的升高電阻率和導(dǎo)磁率逐漸升高,而鐵損逐漸降低。當(dāng)硅含量達(dá)到6.5%時(shí),硅鋼將表現(xiàn)出超高磁導(dǎo)率、超低鐵損以及幾乎為零的磁致伸縮等優(yōu)良特性。但隨著硅含量的提高,硅鋼將變的既脆又硬,其韌性和延展性急劇降低,導(dǎo)致傳統(tǒng)的軋制技術(shù)很難用于制備6.5%Si硅鋼,CVD法能夠避免軋制成材率低的狀況,但試樣力學(xué)性能與CVD制備工藝條件如溫度、氣氛含氧量、SiCl4濃度和基材狀況等有著密切的關(guān)系。本文通過CVD制備6.5%Si硅鋼,研究不同工藝參數(shù)對(duì)硅鋼脆性的影響并對(duì)改善其脆性具有極其重要的意義。本文簡(jiǎn)述了CVD法制備6.5%Si硅鋼的實(shí)驗(yàn)設(shè)備、制備過程,以及真空反應(yīng)爐反應(yīng)溫度和氣氛含氧量的測(cè)試和控制方法,并通過實(shí)驗(yàn)驗(yàn)證了SiCl4濃度和水浴溫度的關(guān)系,確定了CVD反應(yīng)的升溫方式。各工藝條件確定之后,根據(jù)單一控制CVD制備工藝制備出不同力學(xué)性能的6.5%Si硅鋼試樣。為了定量的分析6.5%Si硅鋼的脆性,自主設(shè)計(jì)制造了三點(diǎn)壓彎?rùn)C(jī),通過比較下壓量和載荷位移曲線評(píng)價(jià)試樣韌性。根據(jù)脆性測(cè)試結(jié)果進(jìn)一步對(duì)試樣進(jìn)行電鏡觀察、EDS能譜分析和SEM斷口掃描等微觀組織分析。通過對(duì)不同工藝參數(shù)制備試樣的脆性分析研究了粗大晶粒、晶界氧化和Kirkendall空洞對(duì)6.5%Si硅鋼脆性的影響規(guī)律,結(jié)果表明應(yīng)合理控制反應(yīng)溫度,盡可能降低氣氛含氧量,并且減小SiCl4濃度來降低6.5%Si硅鋼脆性:通過改變基材狀況研究了退火處理和微量元素Sn對(duì)6.5%Si硅鋼脆性的影響,結(jié)果表明基材退火導(dǎo)致晶粒不均勻長(zhǎng)大使試樣脆性增大,Sn促使Si均勻擴(kuò)散使試樣脆性降低。
[Abstract]:The properties of silicon steel are closely related to the silicon content. With the increase of silicon content, the resistivity and magnetic conductivity increase gradually, but the iron loss decreases gradually. When the silicon content reaches 6.5, the silicon steel will exhibit high permeability, ultra-low iron loss and almost zero magnetostriction. However, with the increase of silicon content, silicon steel will become brittle and hard, and its toughness and ductility will decrease sharply, which makes it difficult for traditional rolling technology to be used to prepare 6.5%Si silicon steel. However, the mechanical properties of the samples are closely related to the preparation conditions of CVD, such as temperature, oxygen content in atmosphere and the condition of the substrate. In this paper, 6.5%Si silicon steel was prepared by CVD. The influence of different process parameters on the brittleness of silicon steel was studied, and it was of great significance to improve the brittleness of silicon steel. In this paper, the experimental equipment and process of preparing 6.5%Si silicon steel by CVD method are briefly described, as well as the test and control methods of reaction temperature and oxygen content in atmosphere in vacuum reactor. The relationship between the concentration of SiCl4 and the temperature of water bath is verified by experiments. The heating mode of CVD reaction was determined. Different mechanical properties of 6.5%Si silicon steel samples were prepared according to the single controlled CVD process after each process was determined. In order to quantitatively analyze the brittleness of 6.5%Si silicon steel, a three-point bending machine was designed and manufactured. According to the results of brittleness test, the microstructures of the samples were further analyzed by electron microscope, EDS energy spectrum analysis and SEM fracture scanning. The effects of coarse grain size, grain boundary oxidation and Kirkendall voids on the brittleness of 6.5%Si silicon steel were studied by analyzing the brittleness of samples prepared with different process parameters. The results showed that the reaction temperature should be controlled reasonably and the oxygen content in atmosphere should be reduced as much as possible. By reducing the concentration of SiCl4 to reduce the brittleness of 6.5%Si silicon steel, the effects of annealing treatment and trace element Sn on the brittleness of 6.5%Si silicon steel were studied by changing the substrate condition. The results show that annealed substrate leads to uneven grain growth resulting in the increase of specimen brittleness and the decrease of specimen brittleness due to Si homogenization diffusion caused by Sn.
【學(xué)位授予單位】:華東理工大學(xué)
【學(xué)位級(jí)別】:碩士
【學(xué)位授予年份】:2015
【分類號(hào)】:TG142
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