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  本文選題：微V槽超精密機床　切入點：垂直度誤差　出處：《廣東工業(yè)大學》2015年博士論文

【摘要】：光電子、微電子器件中廣泛應用微V槽陣列結(jié)構(gòu),如光纖連接器、波分復用器、LCD背光板等。這些元器件一般需采用專用超精密機床加工,使其達到亞微米級尺寸加工精度和納米級表面粗糙度,以滿足光學級功能要求�；谧灾餮邪l(fā)的微V槽超精密機床,本文圍繞著通過幾何誤差補償來提高其加工精度這個主題,全面分析機床的結(jié)構(gòu)和其加工工藝特征,對機床垂直度誤差模型、幾何誤差測量與辨識方法、單項運動副誤差多項式擬合函數(shù)的優(yōu)化、幾何誤差建模及補償算法等幾個關(guān)鍵問題開展深入的理論和實驗研究。精密的誤差模型是實現(xiàn)誤差精密補償?shù)年P(guān)鍵。本文比較分析傳統(tǒng)基于小角度誤差假設的垂直度誤差變換矩陣的不足,推導出改進后的垂直度誤差模型,基于現(xiàn)有的誤差測量與辨識方法,對垂直度誤差變換矩陣改進中涉及的垂直度誤差角實施精算；針對微V槽超精密機床XFYZ型結(jié)構(gòu)特征,基于多體系統(tǒng)理論和前述的垂直度誤差改進模型,建立精密的幾何誤差模型；對比垂直度誤差精算前后的幾何誤差模型以檢測垂直度誤差變換矩陣改進的效果。數(shù)控機床幾何誤差的測量與辨識是一項復雜且費時的工作。如何快速精密地辨識出各單項幾何誤差一直是幾何誤差補償研究的重要課題。本文在分析目前常用的9線幾何誤差辨識法的基礎上,推導高精度的測量效率更快的6線幾何誤差辨識法,并用實驗檢測該方法的可靠性。為便于幾何誤差補償技術(shù)的實施就需要確定機床軸系運動到空間某坐標處各單項運動副誤差的具體值,這就要求將各單項運動副誤差擬合成關(guān)于機床運動坐標的函數(shù)。本文詳細分析多項式擬合法的優(yōu)點和不足,并基于統(tǒng)計學原理,推導出多項式擬合的優(yōu)化算法,通過對機床幾何誤差測量數(shù)據(jù)的處理,驗證該算法的優(yōu)化效果。幾何誤差的精密補償是垂直度誤差的精算、單項幾何誤差的測量與辨識、單項運動副誤差的多項式擬合及其優(yōu)化等所有工作的最終目的。本文簡單介紹數(shù)控修正指令的直接計算方法,并分析該方法的不足；推導出較優(yōu)的數(shù)控修正指令的附加指令算法,并通過實例演算檢測其修正效果。
[Abstract]:MicroV-slot arrays are widely used in optoelectronic and microelectronic devices, such as optical fiber connectors, wavelength division multiplexers (WDM) and LCD backlight panels.These components need to be machined with special ultra-precision machine tools to achieve sub-micron size machining accuracy and nanometer surface roughness to meet the requirements of optical function.Based on the micro-V-slot ultra-precision machine tool developed by ourselves, this paper focuses on the topic of geometric error compensation to improve the machining accuracy. The structure of the machine tool and its processing technology characteristics are analyzed in an all-round way, and the verticality error model of the machine tool is analyzed.Some key problems, such as geometric error measurement and identification method, optimization of polynomial fitting function of single motion pair error, geometric error modeling and compensation algorithm, are studied deeply in theory and experiment.Precision error model is the key to realize precision error compensation.This paper compares and analyzes the shortcomings of the traditional perpendicularity error transformation matrix based on the assumption of small angle error, and deduces the improved verticality error model, based on the existing methods of error measurement and identification.The perpendicularity error angle involved in the improvement of perpendicularity error transformation matrix is actualized, and according to the XFYZ structural characteristics of micro-V-slot ultra-precision machine tool, based on the theory of multi-body system and the improved model of perpendicularity error mentioned above,A precise geometric error model is established, and the geometric error model before and after the perpendicularity error actuarial is compared to detect the improvement effect of the perpendicularity error transformation matrix.The measurement and identification of geometric errors of NC machine tools is a complicated and time-consuming task.How to identify geometric errors quickly and accurately has always been an important topic in the research of geometric error compensation.Based on the analysis of the commonly used 9-line geometric error identification method, this paper deduces the 6-line geometric error identification method with high accuracy and faster measurement efficiency, and tests the reliability of the method by experiment.In order to facilitate the implementation of geometric error compensation technology, it is necessary to determine the specific value of each single motion pair error from the machine tool shafting to a space coordinate, which requires that each single motion pair error be synthesized into a function about the machine tool motion coordinate.In this paper, the advantages and disadvantages of polynomial fitting are analyzed in detail. Based on the principle of statistics, the optimization algorithm of polynomial fitting is derived. The optimization effect of the algorithm is verified by processing the measuring data of geometric error of machine tools.The precision compensation of geometric error is the ultimate purpose of all the works, such as the actuarial of perpendicularity error, the measurement and identification of single geometric error, the polynomial fitting and optimization of single motion pair error, etc.This paper briefly introduces the direct calculation method of numerical control correction instruction, and analyzes its shortcomings, deduces the better additional instruction algorithm of numerical control correction instruction, and detects its correction effect by example calculus.
【學位授予單位】：廣東工業(yè)大學
【學位級別】：博士
【學位授予年份】：2015
【分類號】：TG502
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本文編號：1694205