本文選題：光學(xué)自由曲面　切入點(diǎn)：單點(diǎn)金剛石車削　出處：《吉林大學(xué)》2015年碩士論文

【摘要】：當(dāng)前，基于快速刀具伺服(Fast Tool Servo, FTS)的單點(diǎn)金剛石車削技術(shù)已被普遍應(yīng)用于加工各種復(fù)雜曲面，如光學(xué)自由曲面和微結(jié)構(gòu)功能表面等，因而被國內(nèi)外工程界及學(xué)術(shù)界認(rèn)為一種具有發(fā)展?jié)摿Φ臋C(jī)械加工技術(shù)。一般而言，數(shù)控機(jī)床運(yùn)動精度直接決定了被加工表面的面形精度，盡管飛速發(fā)展的數(shù)控機(jī)床技術(shù)可以在一定程度上促進(jìn)FTS車削技術(shù)的應(yīng)用，但仍然難以滿足光學(xué)復(fù)雜曲面納米級的精度要求�；诖耍疚睦靡环N兩自由度的FTS裝置對加工工程中的機(jī)床運(yùn)動誤差進(jìn)行有效的補(bǔ)償，提高被加工表面的面形精度，，并降低FTS金剛石車削技術(shù)對于數(shù)控機(jī)床的精度要求，這必將有效降低光學(xué)復(fù)雜曲面的制造程度并提高其加工效率。本文的主要研究內(nèi)容主要包括如下幾個(gè)方面： 1)設(shè)計(jì)了一種兩自由度可變前角式的快速刀具伺服裝置。壓電驅(qū)動器和電容位移傳感器的工作特性分析，并根據(jù)FTS裝置的性能指標(biāo)選取適當(dāng)?shù)男吞�；柔性鉸鏈的結(jié)構(gòu)設(shè)計(jì)與分析，包括柔性鉸鏈結(jié)構(gòu)參數(shù)的設(shè)計(jì)、剛度性能及強(qiáng)度性能參數(shù)的校核、輸入輸出位移的分析、動力學(xué)/靜力學(xué)性能分析及金剛石刀具的選用等等。 2)兩自由度FTS裝置的柔度建模及有限元仿真；首先利用柔度矩陣法(Matrix-basedcompliance modeling, MCM)建立FTS裝置的柔度矩陣模型，并利用ANSYS有限元分析元件對建立的MCM模型進(jìn)行驗(yàn)證；其次基于Lagrange原理，建立該FTS裝置的動力學(xué)模型及其固有頻率對結(jié)構(gòu)參數(shù)的依賴關(guān)系模型，并利用有限元分析結(jié)果與解析結(jié)果進(jìn)行比較，其一致性表明所建立解析模型的有效性。 3)對兩自由度FTS裝置進(jìn)行性能測試；在開環(huán)條件下測試所設(shè)計(jì)FTS裝置的基本工作性能，如工作頻率、運(yùn)動分辨率、最大行程等性能參數(shù)；利用PMAC控制器建立FTS裝置的兩軸伺服控制系統(tǒng)，并通過階躍響應(yīng)測試建立系統(tǒng)閉環(huán)響應(yīng)特征及刀具定位精度。
[Abstract]:At present, single point diamond turning technology based on fast cutting tool servo Fast Tool Servo (FTS) has been widely used to process various complex surfaces, such as optical free surface and microstructural functional surface, etc. Therefore, the engineering and academic circles at home and abroad consider a kind of machining technology with developing potential. Generally speaking, the motion accuracy of NC machine tools directly determines the surface shape accuracy of the machined surface. Although the rapid development of CNC machine tool technology can promote the application of FTS turning technology to a certain extent, it is still difficult to meet the precision requirements of optical complex surfaces at nanometer level. In this paper, a FTS device with two degrees of freedom is used to compensate the machine tool motion error effectively, to improve the surface shape accuracy of the machined surface, and to reduce the precision requirement of FTS diamond turning technology for NC machine tools. This will effectively reduce the manufacturing degree of optical complex surface and improve its processing efficiency. The main contents of this paper include the following aspects:. 1) A kind of fast cutter servo device with two degrees of freedom with variable front angle, piezoelectric actuator and capacitive displacement sensor is designed, and the appropriate model is selected according to the performance index of the FTS device; The structural design and analysis of the flexure hinge include the design of the structural parameters of the flexure hinge, the checking of the stiffness and strength performance parameters, the analysis of the input and output displacement, the dynamic / static performance analysis and the selection of diamond cutting tools, etc. 2) the flexibility modeling and finite element simulation of two-degree-of-freedom FTS device. Firstly, the compliance matrix model of FTS device is established by using the flexibility matrix method, and the MCM model is verified by ANSYS finite element analysis element. The dynamic model of the FTS device and the dependence of the natural frequency on the structural parameters are established. The results of finite element analysis are compared with the analytical results. The consistency of the proposed analytical model shows the validity of the established analytical model. 3) testing the performance of the two-degree-of-freedom FTS device, testing the basic performance of the designed FTS device under open-loop conditions, such as operating frequency, motion resolution, maximum stroke and other performance parameters. The two-axis servo control system of FTS device is established by using PMAC controller, and the closed-loop response characteristics and tool positioning accuracy are established by step response test.
【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TG659

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 M.Weck ,H.Oezmeral ,K.Mehlkopp ,T.Terwei ,羅兵;采用空氣軸承的大行程快速刀具伺服系統(tǒng)[J];國防科技參考;1997年03期

2 戴一帆;段緯然;王貴林;楊帆;;音圈電機(jī)驅(qū)動的快刀伺服系統(tǒng)建模與性能分析[J];國防科技大學(xué)學(xué)報(bào);2008年01期

3 張華,王文,龐媛媛;光學(xué)表面超精密加工技術(shù)[J];光學(xué)儀器;2003年03期

4 李懷剛;;電容位移傳感器[J];大壩觀測與土工測試;1984年01期

5 楊元華,陳時(shí)錦,程凱,孫西芝;超精密機(jī)械加工技術(shù)在微光學(xué)元件制造中的應(yīng)用[J];航空精密制造技術(shù);2005年04期

6 羅松保;;金剛石超精密切削刀具技術(shù)概述[J];航空精密制造技術(shù);2007年01期

7 汪亮;羅松保;;快速伺服刀具技術(shù)發(fā)展現(xiàn)狀及趨勢[J];航空精密制造技術(shù);2007年06期

8 簡林柯,李新忠,何鋮;基于重復(fù)控制的跟蹤系統(tǒng)設(shè)計(jì)及應(yīng)用[J];機(jī)床與液壓;1998年06期

9 劉建琴,張策,王玉新,韓s

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