本文關(guān)鍵詞：固結(jié)磨料研磨K9玻璃亞表面損傷研究　出處：《南京航空航天大學(xué)》2015年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 光學(xué)玻璃 K9玻璃 亞表面損傷 固結(jié)磨料 BOE分步腐蝕法

【摘要】：光學(xué)元件在研磨加工過程中產(chǎn)生的亞表面損傷會(huì)直接影響其使用壽命、穩(wěn)定性、成像質(zhì)量、鍍膜質(zhì)量和抗激光損傷閾值等重要指標(biāo)。如何準(zhǔn)確檢測(cè)和評(píng)價(jià)加工過程產(chǎn)生的亞表面損傷以提高加工質(zhì)量是光學(xué)制造業(yè)必須解決的關(guān)鍵問題之一。本課題以固結(jié)磨料研磨墊(FAP)研磨典型硬脆性光學(xué)材料──K9玻璃后亞表面損傷作為研究對(duì)象,圍繞K9玻璃亞表面損傷的成因與表征研究,探索固結(jié)磨料研磨方式下K9玻璃亞表面裂紋的形成與擴(kuò)展機(jī)理、固結(jié)磨料研磨加工參數(shù)與工件亞表面損傷之間的關(guān)系。本文的主要研究工作和研究成果包括以下幾個(gè)方面:1.提出了BOE分步腐蝕法測(cè)量研磨后工件的亞表面損傷層深度。提出了一種光學(xué)工件亞表面損傷層厚度測(cè)量方法,分析了其檢測(cè)原理,詳細(xì)介紹了檢測(cè)過程,并進(jìn)行試驗(yàn)驗(yàn)證。將該方法與其它光學(xué)硬脆材料亞表面損傷檢測(cè)方法進(jìn)行比較。2.單顆磨粒作用下光學(xué)材料亞表面初始裂紋的形成與擴(kuò)展研究。采用循環(huán)拋光腐蝕法,對(duì)單顆磨粒作用下光學(xué)材料亞表面初始裂紋(微米級(jí))進(jìn)行準(zhǔn)確觀測(cè);建立了單顆磨粒作用K9玻璃亞表面損傷力學(xué)模型,分析了光學(xué)材料亞表面微米級(jí)初始裂紋的形成與擴(kuò)展過程;借助ANSYS/LS-DYNA3維動(dòng)態(tài)有限元分析軟件對(duì)不同載荷下K9玻璃亞表面初始裂紋的形成與擴(kuò)展過程進(jìn)行模擬。3.建立了固結(jié)磨料研磨K9玻璃的亞表面損傷模型。在單顆磨粒作用光學(xué)材料亞表面塑性屈服區(qū)模型基礎(chǔ)上,分析FAP表面磨粒平均切深情況下,磨粒間距對(duì)工件亞表面裂紋(中位裂紋、橫向裂紋)的影響;建立FAP表面磨粒突起高度一致(平均切深假設(shè))、不一致(最大切深假設(shè))兩種情況下,FAP研磨工藝參數(shù)與工件亞表面損傷之間的聯(lián)系。4.FAP加工玻璃亞表面損傷模型的數(shù)值模擬與試驗(yàn)驗(yàn)證。通過BOE分步腐蝕法獲得了不同磨粒粒徑FAP研磨K9玻璃、熔石英玻璃的亞表面損傷層厚度,建立了磨粒平均粒徑與亞表面損傷層深度的數(shù)學(xué)關(guān)系;對(duì)FAP加工光學(xué)工件亞表面損傷模型進(jìn)行模擬分析,并與試驗(yàn)結(jié)果進(jìn)行對(duì)比。
[Abstract]:The subsurface damage caused by optical elements in the grinding process will directly affect its service life, stability and imaging quality. How to accurately detect and evaluate the subsurface damage caused by the processing process to improve the processing quality is one of the key problems that must be solved in the optical manufacturing industry. Abrasive grinding pad (. FAP lapping a typical hard and brittle optical material, the subsurface damage of K9 glass, as an object of study. The formation and propagation mechanism of subsurface crack in K9 glass was investigated by studying the causes and characterization of subsurface damage of K9 glass. The relationship between grinding parameters of consolidation abrasive and sub-surface damage of workpiece. The main research work and research results in this paper include the following aspects:. 1. BOE step etching method is proposed to measure the depth of the subsurface damage layer of the workpiece after grinding, and a method to measure the thickness of the subsurface damage layer of the optical workpiece is proposed. The detection principle is analyzed and the detection process is introduced in detail. The method is compared with other optical hard brittle material subsurface damage detection methods. 2. The initial crack formation and propagation of optical material under the action of single abrasive particle is studied. Cyclic polishing is used. Corrosion method. The initial subsurface crack (micron level) of optical material under the action of single abrasive particle is observed accurately. A mechanical model of subsurface damage of K9 glass by single abrasive particle is established, and the formation and propagation process of initial micrometer crack on the subsurface of optical material is analyzed. The forming and propagation process of initial crack on the subsurface of K9 glass under different loads was simulated with the help of ANSYS/LS-DYNA3 dynamic finite element analysis software. 3. A consolidation abrasive grinding K9 glass was established. Model of subsurface damage of glass. Based on the model of plastic yield zone of subsurface of optical materials acting on single abrasive particle. The effect of particle spacing on sub-surface crack (median crack, transverse crack) of the workpiece is analyzed under the condition of average cutting depth of FAP surface abrasive particles. The results show that there are two cases: the average cutting depth hypothesis and the inconsistent (maximum cutting depth hypothesis). The relationship between FAP grinding process parameters and sub-surface damage of workpiece. 4. Numerical simulation and experimental verification of subsurface damage model of glass fabricated by FAP. Different particle sizes F were obtained by BOE step etching method. AP ground K9 glass. The thickness of the subsurface damage layer of fused quartz glass is studied. The mathematical relationship between the average particle size and the depth of the subsurface damage layer is established. The subsurface damage model of optical workpiece fabricated by FAP was simulated and analyzed, and the results were compared with the experimental results.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2015
【分類號(hào)】：TG580.68

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