TiCN coatings incorporated with Ti buffer layer were deposited on Ti6A14V alloy by arc ion plating. The carbon content in TiCN coatings was varied by controlling flow rates of C₂H₂ in reactive gas. The Ti/TiCN coatings have a typical structure of columnar crystal with a total thickness of about 2 μm. The elements of Ti, C and N are present as TiN and TiC in TiCN coatings. A little free carbon appears with carbon content increasing in TiCN coatings.For the TiCN coatings, the... 

【文章來源】：Rare Metals. 2017年11期

【文章頁數(shù)】：7 頁

【參考文獻(xiàn)】：
期刊論文
[1]Elevated-temperature tribological behavior of Ti–B–C–N coatings deposited by reactive magnetron sputtering[J]. Xiang-Yang Chen,Shao-Fu Huang,Sheng-Li Ma,Run Huang,Jin Zhang,Hai-Xia Hu.  Rare Metals. 2015(12)



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