【摘要】：目的提高高速鋼的干摩擦學(xué)性能,探究不同Ti含量摻雜對(duì)類石墨碳膜摩擦性能的影響。方法用非平衡磁控濺射離子鍍技術(shù)制備了不同Ti含量的類石墨碳膜,用光學(xué)顯微鏡、掃描電子顯微鏡、Raman光譜、洛氏硬度計(jì)、納米壓痕儀等分析薄膜的微觀結(jié)構(gòu)和力學(xué)性能,用高速線性往復(fù)磨損試驗(yàn)機(jī)檢測(cè)薄膜的干摩擦學(xué)性能,并用光學(xué)顯微鏡觀察磨痕。結(jié)果制備的碳膜表面顆粒尺寸較小,斷面致密,且逐漸趨向柱狀結(jié)構(gòu)。隨著Ti靶濺射電流的增大,逐漸增加的Ti元素打斷了sp~3鍵生長(zhǎng),薄膜中生成更穩(wěn)定的sp~2鍵,且sp~2鍵含量先增大后減小,在0.8 A達(dá)到最大,濺射電流為1.1 A時(shí),Ti元素含量最大,sp~2鍵和sp~3鍵都減少。碳膜與基體結(jié)合力隨著Ti靶電流變大而先增大后減小,在0.8 A結(jié)合最佳,約為HF3級(jí)。硬度和彈性模量先減小后增加,0.8 A時(shí)達(dá)到最小。碳膜摩擦系數(shù)相比于原樣都較低,在0.09~0.12之間。磨損率先增大后減小,維持在(5~15)×10~(-16) m~3/(N·m)左右。結(jié)論不同Ti含量的類石墨碳膜,能明顯降低高速鋼與鋼球?qū)δサ恼持p傾向,降低摩擦系數(shù)和磨損率。
[Abstract]:Aim to improve the dry tribological properties of high speed steel (HSS) and to investigate the effect of doping with different Ti content on the tribological properties of graphite-like carbon films. Methods Graphite-like carbon films with different Ti content were prepared by unbalanced magnetron sputtering ion plating technique. The microstructure and mechanical properties of the films were analyzed by optical microscope, scanning electron microscope, Raman spectrum, Rockwell hardness meter and nano-indentation instrument. The dry tribological properties of the films were tested by a high speed linear reciprocating wear tester and the wear marks were observed by optical microscope. Results the surface particle size of the prepared carbon film is smaller, the section is compact, and the carbon film tends to columnar structure. With the increase of sputtering current of Ti target, the growth of sp~3 bond is interrupted by increasing Ti element, and a more stable sp~2 bond is formed in the film. The content of sp~2 bond increases first and then decreases, and reaches the maximum at 0.8 A and the sputtering current is 1.1 A. The content of Ti element was the largest, and the sp~2 and sp~3 keys were decreased. The bonding force between carbon film and substrate increases first and then decreases with the increase of target current of Ti, and the best binding force is at 0.8 A. it is about HF3 grade. The hardness and elastic modulus decreased first and then increased, and reached the minimum at 0.8 A. The friction coefficient of carbon film is lower than that of the original film, ranging from 0.09 to 0.12. The wear increased first and then decreased, and maintained at (5 ~ 15) 脳 10 ~ (-16) MN / (N m). Conclusion the graphite like carbon film with different Ti content can obviously reduce the adhesion wear tendency of high speed steel and steel ball, and reduce the friction coefficient and wear rate.
【作者單位】： 太原理工大學(xué);寧波工程學(xué)院;寧波正元銅合金有限公司;
【分類號(hào)】：TG174.4

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