【摘要】：隨著機(jī)械工程技術(shù)的發(fā)展,人們對(duì)零件的耐磨性和低摩擦特性要求不斷提高,而納米表面涂層技術(shù)是改善零件表面性能最簡(jiǎn)單最直接的方法。納米涂層不僅能夠進(jìn)一步提高零件的低摩擦和耐磨特性,而且能夠保持零件基體的高韌性,是目前表面防護(hù)和功能涂層技術(shù)領(lǐng)域的研究熱點(diǎn)。石墨烯已經(jīng)被證明是一種極好的固體潤(rùn)滑劑材料,當(dāng)納米石墨烯晶體嵌入碳膜中,納米石墨烯晶體將對(duì)碳膜涂層的摩擦行為產(chǎn)生顯著影響,因此,通過(guò)調(diào)控碳膜中嵌入的石墨烯結(jié)構(gòu)可以使納米碳膜達(dá)到極低的摩擦系數(shù),對(duì)改善納米碳膜的摩擦磨損特性具有重要研究意義。針對(duì)以上研究背景,我們開(kāi)展了“ECR離子照射可控制造納米結(jié)構(gòu)碳膜及其摩擦特性研究”的工作。本研究利用ECR電子回旋共振中的發(fā)散型磁場(chǎng)離子照射進(jìn)行加工。首先,改變電子回旋共振等離子體濺射系統(tǒng)中的基片偏壓、微波功率和工作氣壓控制離子照射能量和密度。利用朗繆爾探針對(duì)等離子體進(jìn)行診斷發(fā)現(xiàn):離子照射能量隨基片偏壓增加而增加,離子照射密度隨功率的增加而增加。通過(guò)調(diào)節(jié)離子照射能量和密度,可控制造納米結(jié)構(gòu)碳膜。利用透射電子顯微鏡(TEM),拉曼光譜和原子力顯微鏡(AFM)來(lái)表征納米碳膜中的納晶尺寸和表面粗糙度。實(shí)驗(yàn)結(jié)果表明,離子照射能夠形成石墨烯納米結(jié)構(gòu)。離子照射密度增加和離子照射能量的減少會(huì)致使碳膜中含有的石墨烯晶粒尺寸變大。離子照射加工碳膜的表面光滑,表面粗糙度隨照射能量和密度變化較小,在0.1nm左右。最后,利用球盤式摩擦磨損試驗(yàn)機(jī)對(duì)碳膜摩擦特性進(jìn)行評(píng)價(jià),得到碳膜的摩擦系數(shù)在0.07~0.13內(nèi)變化,并且摩擦系數(shù)隨著石墨烯晶粒尺寸的增加而降低。石墨烯納晶結(jié)構(gòu)碳膜展現(xiàn)出良好的耐磨特性,摩擦壽命在10000圈以上。為了闡明石墨烯納晶碳膜的摩擦機(jī)理,通過(guò)高分辨金相顯微鏡和拉曼光譜對(duì)碳膜磨痕表面和對(duì)磨件氮化硅球的表面進(jìn)行了表征分析。澄清了在相同條件下石墨烯納晶碳膜低摩擦的機(jī)理是在摩擦接觸界面形成3nm左右的石墨烯納晶轉(zhuǎn)移膜,同時(shí)接觸面積較小使界面剪切強(qiáng)度降低。
[Abstract]:With the development of mechanical engineering technology, the requirements of wear resistance and low friction properties of the parts are constantly improved, and nano-surface coating technology is the simplest and most direct method to improve the surface properties of parts. Nanocrystalline coating can not only improve the low friction and wear resistance of the parts, but also maintain the high toughness of the substrates. It is a hot spot in the field of surface protection and functional coating technology. Graphene has been proved to be an excellent solid lubricant. When nano-graphene crystals are embedded in carbon films, nano-graphene crystals will have a significant effect on the friction behavior of carbon film coatings. By regulating the structure of graphene embedded in the carbon film, the friction coefficient of the nano-carbon film can reach a very low level, which is of great significance in improving the friction and wear characteristics of the nano-carbon film. In view of the above research background, we have carried out the work of "ECR Ion irradiation controlled Fabrication of Nanostructured carbon Films and their tribological Properties". In this study, ECR electron cyclotron resonance (ECR) was fabricated by irradiation of divergent magnetic field ions. Firstly, the substrate bias, microwave power and working pressure in the electron cyclotron resonance plasma sputtering system are changed to control the energy and density of ion irradiation. Using Langmuir probe to diagnose the plasma, it is found that the ion irradiation energy increases with the increase of substrate bias, and the ion irradiation density increases with the increase of power. Nanostructured carbon films can be produced by adjusting the energy and density of ion irradiation. The nanocrystalline size and surface roughness were characterized by transmission electron microscopy (TEM) (TEM), Raman spectroscopy and atomic force microscope (AFM). The experimental results show that the graphene nanostructures can be formed by ion irradiation. The increase of ion irradiation density and the decrease of ion irradiation energy will increase the grain size of graphene in carbon film. The surface of carbon film prepared by ion irradiation is smooth, and the surface roughness changes slightly with the irradiation energy and density, about 0.1nm. Finally, the friction characteristics of carbon film were evaluated by ball disk friction and wear tester. The friction coefficient of carbon film varied within 0.07 ~ 0.13, and the friction coefficient decreased with the increase of graphene grain size. Graphene nanocrystalline carbon film shows good wear resistance and its friction life is more than 10000 circles. In order to elucidate the friction mechanism of graphene nanocrystalline carbon film, the wear surface of carbon film and the surface of silicon nitride ball were characterized by high resolution metallographic microscope and Raman spectroscopy. It is clarified that the mechanism of low friction of graphene nanocrystalline carbon film under the same conditions is that the graphene nanocrystalline transfer film about 3nm is formed at the frictional contact interface, and the interface shear strength is decreased when the contact area is small.
【學(xué)位授予單位】：深圳大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG174.4

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