【摘要】：為了研究深冷處理后GLC多層薄膜界面結(jié)構(gòu)及結(jié)合強(qiáng)度的變化,采用非平衡直流磁控濺射技術(shù),在W9高速鋼上沉積了含GLC功能層、Cr/C梯度層及Cr底層的類石墨碳多層薄膜,厚度約為4μm。采用液氮(-197℃)對(duì)GLC/高速鋼復(fù)合體系進(jìn)行深冷處理,借助XPS、SEM及TEM表征了GLC薄膜的表面、斷面結(jié)構(gòu)及界面微觀組織;采用洛氏硬度儀定性考察了薄膜的膜基結(jié)合強(qiáng)度。結(jié)果表明:復(fù)合體系經(jīng)深冷處理后除基體的硬度及承載能力得以提高外,多層膜各層及基體中裂紋的萌生及傳播受到抑制,界面結(jié)合強(qiáng)度明顯增強(qiáng)。其作用機(jī)理在于深冷處理后,Cr底層的柱狀晶結(jié)構(gòu)被"打破",纖維狀結(jié)構(gòu)消除,組織更加致密均勻;同時(shí),Cr/C梯度層中Cr晶粒碎化平均尺寸由20 nm減小為5 nm,達(dá)到細(xì)晶強(qiáng)化效果。因此,膜基及層間界面結(jié)構(gòu)得以改善,界面失配減小,基體及多層膜各層間的變形協(xié)調(diào)性能增強(qiáng)。
[Abstract]:In order to study the interface structure and bonding strength of GLC multilayer films after cryogenic treatment, graphite-like carbon like multilayer films containing GLC functional layer, Cr/C gradient layer and Cr substrate were deposited on W9 high speed steel by unbalanced DC magnetron sputtering technique. The thickness is about 4 渭 m. Liquid nitrogen (-197 鈩，

本文編號(hào)：2328984