納米鋁涂層制備及其對(duì)沉積態(tài)鈾薄膜的防護(hù)性能研究
發(fā)布時(shí)間:2018-09-17 16:10
【摘要】:為探索沉積態(tài)貧鈾(DU)薄膜更有效的防護(hù)層新材料與更薄的防護(hù)層制備技術(shù),開(kāi)展了納米Al涂層的磁控濺射制備技術(shù)研究,制備了Al與DU單層、Al/DU/Al三層薄膜樣品,并開(kāi)展了納米Al防護(hù)層Al/DU/Al樣品大氣環(huán)境下72 h的防氧化性能研究。利用掃描電鏡(SEM)觀察樣品表面形貌,X射線光電子能譜儀(XPS)測(cè)量樣品元素組成與價(jià)態(tài)變化,X射線衍射(XRD)測(cè)量樣品物相組成與變化。結(jié)果表明:厚度大于10 nm即可生成連續(xù)的Al涂層,Al涂層晶粒隨著厚度增加呈現(xiàn)長(zhǎng)大的趨勢(shì);30 nm厚Al防護(hù)涂層有效阻止了DU薄膜大氣環(huán)境的氧化:72 h內(nèi),DU層O含量沒(méi)有發(fā)現(xiàn)明顯的變化。
[Abstract]:In order to explore a more effective new material and thin protective layer for depositing depleted uranium (DU) thin films, the magnetron sputtering technique for preparing nanocrystalline Al coatings was studied. Three layers of Al and DU monolayer Al / du / Al thin films were prepared. The oxidation resistance of nanometer Al protective layer Al/DU/Al samples in atmosphere for 72 h was studied. Scanning electron microscopy (SEM) was used to observe the surface morphology of samples. X-ray photoelectron spectroscopy (XPS) was used to measure the changes of element composition and valence state. X-ray diffraction (XRD) was used to measure the phase composition and change of samples. The results show that when the thickness is more than 10 nm, the grain size of the continuous Al coating can grow up with the increase of thickness. The thickness of the Al protective coating of 30 nm can effectively prevent the oxidation of the DU film in atmospheric environment within 72 h, and the O content of the DU layer can be effectively prevented. No obvious change was observed.
【作者單位】: 中國(guó)工程物理研究院;
【分類號(hào)】:TG174.44
,
本文編號(hào):2246444
[Abstract]:In order to explore a more effective new material and thin protective layer for depositing depleted uranium (DU) thin films, the magnetron sputtering technique for preparing nanocrystalline Al coatings was studied. Three layers of Al and DU monolayer Al / du / Al thin films were prepared. The oxidation resistance of nanometer Al protective layer Al/DU/Al samples in atmosphere for 72 h was studied. Scanning electron microscopy (SEM) was used to observe the surface morphology of samples. X-ray photoelectron spectroscopy (XPS) was used to measure the changes of element composition and valence state. X-ray diffraction (XRD) was used to measure the phase composition and change of samples. The results show that when the thickness is more than 10 nm, the grain size of the continuous Al coating can grow up with the increase of thickness. The thickness of the Al protective coating of 30 nm can effectively prevent the oxidation of the DU film in atmospheric environment within 72 h, and the O content of the DU layer can be effectively prevented. No obvious change was observed.
【作者單位】: 中國(guó)工程物理研究院;
【分類號(hào)】:TG174.44
,
本文編號(hào):2246444
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