【摘要】：采用反應(yīng)磁控濺射技術(shù)在304不銹鋼基片上沉積Ti-Al-Si-Cu-N涂層。通過(guò)掃描電鏡(SEM)、能譜儀(EDS)、X射線衍射儀(XRD)、納米壓痕儀、劃痕儀和球盤(pán)式摩擦磨損試驗(yàn)機(jī)研究了不同基材溫度(沉積溫度)對(duì)涂層結(jié)構(gòu)和摩擦學(xué)性能的影響。結(jié)果表明:隨著沉積溫度從室溫升至250℃,涂層表面變得平滑,結(jié)構(gòu)致密。硬度和彈性模量隨沉積溫度的升高而升高。劃痕試驗(yàn)表明:當(dāng)沉積溫度分別為室溫,150和250℃時(shí),臨界載荷為3.85,3.45和5.10 N。當(dāng)沉積溫度為250℃時(shí),涂層的摩擦系數(shù)和磨損速率最小,摩擦過(guò)程中產(chǎn)生的磨屑主要來(lái)自GCr15不銹鋼珠。在較低的沉積溫度下,涂層的磨損機(jī)理主要為疲勞斷裂和磨粒磨損,而250℃沉積的涂層的磨損機(jī)制主要為磨粒磨損。
[Abstract]:Ti-Al-Si-Cu-N coatings were deposited on 304 stainless steel substrates by reactive magnetron sputtering. The effects of substrate temperature (deposition temperature) on the structure and tribological properties of the coatings were investigated by scanning electron microscope (SEM),) energy spectrometer (SEM),) and (EDS) X-ray diffractometer (XRD),) nano-indentation instrument, scratch tester and ball disk friction and wear tester. The results show that with the deposition temperature rising from room temperature to 250 鈩，

本文編號(hào)：2143538