【摘要】：在分析電子束流高能特點(diǎn)基礎(chǔ)上研究束流信號(hào)檢測(cè)和測(cè)量方法,提出小角度電子束磁控偏轉(zhuǎn)掃描采集方案,在高溫難熔鎢板上設(shè)計(jì)直徑25μm的小孔傳感器,建立信號(hào)檢測(cè)裝置和控制流程,共享60 MHz時(shí)鐘保證掃描與采集同步,將透過小孔的電子強(qiáng)度轉(zhuǎn)換成電壓信號(hào),經(jīng)高頻A/D采樣和量化后高速傳輸?shù)絻?nèi)存,對(duì)電子束單層截面信號(hào)可視化重構(gòu)后依能量等級(jí)進(jìn)行劃分和能量密度分布計(jì)算,通過不同高度的多層數(shù)據(jù)重構(gòu)活性區(qū)體模型,分割空間能量等值面形成序列能量曲面,標(biāo)定能量峰值90%的空間區(qū)域?yàn)榛钚詤^(qū)焦斑.文中的軟硬件系統(tǒng)能夠有效應(yīng)用于電子束品質(zhì)評(píng)價(jià).
[Abstract]:On the basis of analyzing the characteristics of electron beam high energy, the beam signal detection and measurement method is studied. A small angle electron beam magnetron deflection scanning acquisition scheme is proposed. A small hole sensor with a diameter of 25 渭 m is designed on a high temperature refractory tungsten plate. Set up signal detection device and control flow, share 60 MHz clock to ensure scanning and acquisition synchronization, convert electronic intensity through hole into voltage signal, transfer to memory at high speed after sampling and quantization of high frequency A / D, After visualized reconstruction of single layer cross section signal of electron beam, the energy level and energy density distribution are divided and calculated. The space energy isosurface is segmented to form a sequential energy surface by reconstructing the active zone volume model with different heights. The focal spot in the active region is the space with 90% peak energy. The software and hardware system in this paper can be used to evaluate the quality of electron beam effectively.
【作者單位】： 泰州學(xué)院船舶與機(jī)電工程學(xué)院;泰州南京理工大學(xué)研究院;
【基金】：國家自然科學(xué)基金資助項(xiàng)目(51375243) 江蘇省自然科學(xué)基金資助項(xiàng)目(BK20140784) 江蘇省高校自然科學(xué)基金資助項(xiàng)目(14KJB460028)
【分類號(hào)】：TG439.3
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本文編號(hào)：2142786