本文選題：光電復(fù)合沉積 + 強(qiáng)力攪拌　； 參考：《江蘇大學(xué)》2017年碩士論文

【摘要】：伴隨著微機(jī)電系統(tǒng)(MEMS)的發(fā)展,對(duì)于微小復(fù)雜零件制造的需求不斷提升。微細(xì)加工技術(shù)作為實(shí)現(xiàn)微小零件制造的關(guān)鍵技術(shù)引起了國(guó)內(nèi)外學(xué)者的極大關(guān)注。微細(xì)電沉積加工技術(shù)具有制造精度高、工藝柔性好、成本低等優(yōu)點(diǎn),但由于存在沉積速率慢、沉積定域性差、沉積質(zhì)量差等缺陷,制約了其發(fā)展和應(yīng)用。激光電化學(xué)光電復(fù)合沉積技術(shù)是將激光能量與電化學(xué)能量有效結(jié)合的多能場(chǎng)復(fù)合沉積技術(shù),不僅能提高沉積速率,還能改善沉積定域性和沉積質(zhì)量。由于激光電化學(xué)復(fù)合沉積是一個(gè)復(fù)雜的多物理場(chǎng)耦合過(guò)程,涉及到電場(chǎng)、溫度場(chǎng)和流場(chǎng)的耦合,采用傳統(tǒng)方法很難對(duì)該復(fù)雜多物理場(chǎng)耦合作用的加工機(jī)理進(jìn)行深入研究。因此為了分析激光對(duì)電化學(xué)沉積速率的促進(jìn)機(jī)理,本文利用有限元分析軟件,以沉積速率為研究重點(diǎn)對(duì)電沉積及光電復(fù)合沉積過(guò)程進(jìn)行了有限元仿真。首先對(duì)電沉積速率進(jìn)行了仿真研究,并針對(duì)電沉積過(guò)程中沉積速率難以確定的問(wèn)題,建立了計(jì)算沉積速率的神經(jīng)網(wǎng)絡(luò)模型;再分別對(duì)激光的熱效應(yīng)、強(qiáng)力攪拌效應(yīng)以及應(yīng)力沖擊效應(yīng)進(jìn)行仿真研究,模擬了激光作用時(shí)的溫度、流場(chǎng)及應(yīng)力分布;最后對(duì)激光電化學(xué)復(fù)合沉積加工中的電沉積電場(chǎng)、溫度場(chǎng)及流場(chǎng)進(jìn)行耦合模擬,研究了激光的熱效應(yīng)和強(qiáng)力攪拌效應(yīng)對(duì)電化學(xué)沉積速率的影響。其主要研究?jī)?nèi)容如下:1.研究了電化學(xué)沉積機(jī)理以及激光產(chǎn)生的熱效應(yīng)、強(qiáng)力攪拌效應(yīng)和應(yīng)力沖擊效應(yīng)對(duì)電沉積反應(yīng)的強(qiáng)化機(jī)理;建立了微細(xì)電沉積的仿真模型,并對(duì)微細(xì)電沉積中影響沉積速率較大的電勢(shì)差、沉積離子濃度、氫離子濃度、電極間隙、溫度和流速等工藝參數(shù)分別進(jìn)行了仿真研究,著重研究了離子匱乏區(qū)的形成及其對(duì)沉積速率的影響。2.建立了可靠的計(jì)算沉積速率的神經(jīng)網(wǎng)絡(luò)模型,并結(jié)合遺傳算法,實(shí)現(xiàn)了對(duì)沉積速率的定量分析和參數(shù)優(yōu)化;設(shè)計(jì)了沉積速率參數(shù)優(yōu)化的計(jì)算軟件,降低了程序的使用難度,并為今后的電沉積加工研究提供了軟件基礎(chǔ)。3.建立了激光電化學(xué)復(fù)合沉積的物理模型、數(shù)學(xué)模型和有限元模型,研究了激光作用下的溫度、流場(chǎng)及應(yīng)力分布;對(duì)激光電化學(xué)復(fù)合沉積過(guò)程中的電沉積電場(chǎng)、溫度場(chǎng)和流場(chǎng)進(jìn)行了耦合仿真研究,研究了激光作用對(duì)傳質(zhì)流量、濃度及沉積高度的影響。對(duì)微細(xì)電沉積速率的仿真研究及其神經(jīng)網(wǎng)絡(luò)建模,深化了對(duì)沉積機(jī)理的研究,并解決了沉積速率難以確定的問(wèn)題。對(duì)電沉積及光電復(fù)合沉積的仿真研究,有助于更好的理解光電復(fù)合沉積機(jī)理。模擬激光電化學(xué)的多場(chǎng)耦合作用效果能有效地利用多場(chǎng)耦合的有益效應(yīng)進(jìn)一步提高沉積速率、沉積定域性及沉積質(zhì)量,有力推動(dòng)了光電復(fù)合沉積技術(shù)的進(jìn)一步發(fā)展。
[Abstract]:With the development of MEMS (MEMS), the demand for micro and complex parts manufacturing is increasing. As a key technology to realize the manufacture of micro-parts, micro-machining technology has attracted great attention of scholars at home and abroad. Micro-electrodeposition technology has the advantages of high manufacturing precision, good flexibility and low cost. However, the development and application of micro-electrodeposition technology are restricted by the shortcomings of low deposition rate, poor deposition localization and poor deposition quality. Laser Electrochemical Electrochemical Composite deposition (LECO) is a multi-energy field composite deposition technology which combines laser energy with electrochemical energy effectively. It can not only improve deposition rate but also improve the localization and quality of deposition. Because the laser electrochemical composite deposition is a complex multi-physical field coupling process involving the coupling of electric field temperature field and flow field it is difficult to study the machining mechanism of the complex multi-physical field coupling by traditional methods. Therefore, in order to analyze the mechanism of laser promoting electrochemical deposition rate, the finite element simulation of electrodeposition and optoelectronic composite deposition process is carried out by using finite element analysis software and focusing on deposition rate. First of all, the electrodeposition rate is simulated, and a neural network model is established to calculate the deposition rate, which is difficult to determine in the electrodeposition process. The strong stirring effect and stress shock effect are simulated, and the temperature, flow field and stress distribution are simulated. Finally, the electrodeposition electric field, temperature field and flow field in laser electrochemical composite deposition are simulated. The influence of laser thermal effect and strong stirring effect on electrochemical deposition rate was studied. The main research contents are as follows: 1: 1. The mechanism of electrochemical deposition, the thermal effect produced by laser, the strengthening mechanism of strong stirring effect and stress shock effect on electrodeposition reaction were studied, and the simulation model of micro-electrodeposition was established. The process parameters, such as potential difference, ion concentration, hydrogen ion concentration, electrode gap, temperature and flow rate, which affect the deposition rate in micro electrodeposition are simulated, respectively. The formation of ion deficient region and its influence on deposition rate. A reliable neural network model for calculating deposition rate is established, and the quantitative analysis and parameter optimization of deposition rate are realized by combining genetic algorithm, and the calculation software of deposition rate parameter optimization is designed, which reduces the difficulty of using the program. It also provides the software foundation for the future research of electrodeposition processing. 3. The physical model, mathematical model and finite element model of laser electrochemical composite deposition are established, and the temperature, flow field and stress distribution under laser irradiation are studied. The effects of laser on mass transfer rate, concentration and deposition height are studied by coupling simulation of temperature field and flow field. The simulation study of micro-electrodeposition rate and its neural network modeling have deepened the study of deposition mechanism and solved the problem that the deposition rate is difficult to determine. The simulation study of electrodeposition and photoelectric composite deposition is helpful to better understand the mechanism of photovoltaic composite deposition. The multi-field coupling effect of simulated laser electrochemistry can effectively utilize the beneficial effect of multi-field coupling to further improve deposition rate, deposition localization and deposition quality, and promote the further development of optoelectronic composite deposition technology.
【學(xué)位授予單位】：江蘇大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG66

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