本文選題：微細制造 + CVD金剛石�。� 參考：《南京航空航天大學》2016年碩士論文

【摘要】：微細制造在工業(yè)上有著廣泛的用途,隨著微細制造的發(fā)展越來越多的微型產品被加工生產出來,與此同時微細刀具的重要性也與日俱增。使用鋒利的金剛石微細刀具所加工出的工件表面光潔度高,質量可靠,且加工效率也較高。在金剛石類微細刀具中,聚晶金剛石刀具和金剛石涂層刀具已經得到廣泛應用,然而由于純金剛石材料難加工的特性,使得CVD金剛石微銑刀的研究相比之下進展緩慢,研究較少。本文以CVD金剛石微銑刀的制備和刃磨為研究對象,采用化學機械方法進行刃磨試驗并進行了刀具成形的試驗研究,在刃磨中保證刃口質量而在成形制備中保證材料的去除率。主要研究內容如下:(1)使用數控刀具磨床進行刀具的刃磨試驗。分別使用銅基碳化鎢盤和鋁基碳化硅盤對CVD金剛石微銑刀進行刃磨。銅基碳化鎢盤促進金剛石的氧化反應,在刃磨后獲得的刀具刃口半徑較小。通過不同試驗參數下刃磨質量的比對,優(yōu)化選擇較好的研磨方向、速度和進給速率。(2)為了尋找更好的刀具底刃成形制備方式,自行設計了一套研磨拋光刀具的裝置并利用該裝置結合鐵盤、大顆粒度金剛石砂輪對金剛石微細銑刀進行了試驗研究。(3)通過不同參數下拋光效率的對比試驗,證明了高轉速鐵盤的拋光效率較高,同時發(fā)現大粒度金剛石砂輪的研磨效果最好,比較適用于CVD金剛石微銑刀的初期成形制備。(4)利用銅基碳化鎢盤優(yōu)化的參數加工的CVD金剛石微銑刀,刃口鈍圓半徑最優(yōu)可達到2.5μm。
[Abstract]:Micro manufacturing has been widely used in industry. With the development of micro manufacturing, more and more micro products are processed and produced. At the same time, the importance of micro cutting tools is increasing. The surface of the workpiece machined by using the sharp diamond fine cutting tool has high surface finish, reliable quality and high machining efficiency. Polycrystalline diamond cutting tools and diamond-coated tools have been widely used in diamond-like micro-cutters. However, due to the difficult processing of pure diamond materials, the research on CVD diamond micro-milling cutters is slow. Less research has been done. In this paper, the preparation and grinding of CVD diamond micro-milling cutter are taken as the research object, the grinding experiments are carried out by means of chemical mechanical method and the experimental study of tool forming is carried out. The cutting edge quality is guaranteed in the grinding process and the material removal rate is guaranteed in the forming preparation. The main research contents are as follows: (1) NC tool grinder is used for tool grinding test. CVD diamond micromilling cutters were sharpened by copper-based tungsten carbide disk and aluminum-based silicon carbide disc respectively. The copper based tungsten carbide disk promotes the oxidation reaction of diamond, and the cutting edge radius is smaller after grinding. According to the comparison of grinding quality under different test parameters, the better grinding direction, speed and feed rate. A set of grinding and polishing tool equipment was designed by ourselves and the diamond micro-milling cutter with large particle size diamond grinding wheel was used to test the polishing efficiency under different parameters by using the device combined with iron disc and diamond grinding wheel with large particle size. It is proved that the polishing efficiency of high rotating speed iron disc is high and the grinding effect of large grain diamond grinding wheel is the best. Compared with the CVD diamond micromilling cutter, which is suitable for the initial forming of CVD diamond micromilling cutter, the cutting edge obtuse radius of CVD diamond micro-milling cutter can reach 2.5 渭 m by using the optimized parameters of copper based tungsten carbide disk.
【學位授予單位】：南京航空航天大學
【學位級別】：碩士
【學位授予年份】：2016
【分類號】：TG714;TG580.6

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本文編號：1822410