本文選題：TiCN復(fù)合膜 + TiVN復(fù)合膜��； 參考：《江蘇科技大學(xué)》2017年碩士論文

【摘要】：本論文采用JGP450型反應(yīng)磁控濺射儀,在Si片(100)和304不銹鋼基底上,制備了一系列不同C含量的TiCN復(fù)合膜和不同V含量的TiVN復(fù)合膜。分別用掃描電子顯微鏡(SEM)及附帶的能譜儀(EDS)、X射線衍射儀(XRD)、納米壓痕/劃痕儀、摩擦磨損試驗(yàn)機(jī)和三維形貌儀等對(duì)各復(fù)合膜的化學(xué)成分、截面形貌、微結(jié)構(gòu)、顯微硬度、膜基結(jié)合力及不同溫度下的摩擦磨損性能進(jìn)行表征并分析。研究結(jié)果如下:對(duì)于不同C含量的TiCN復(fù)合膜的研究表明:室溫下制備的TiCN復(fù)合膜為面心立方結(jié)構(gòu),擇優(yōu)取向?yàn)門iN(111)晶面,隨著C含量的增加,(111)晶面衍射峰逐漸向小角度偏移,且不斷寬化、弱化。TiCN復(fù)合膜中C原子的存在形式:部分C原子占據(jù)TiN晶格中N原子的位置,形成置換固溶體;還有部分C原子以無(wú)定形潤(rùn)滑相的形式存在。隨著C含量的增加,TiCN復(fù)合膜的硬度呈現(xiàn)出先增大后減小的趨勢(shì),當(dāng)C含量為19.10at.%時(shí),復(fù)合膜的硬度達(dá)到最大,為32GPa。室溫下的摩擦磨損實(shí)驗(yàn)結(jié)果表明:隨著C含量的增加,TiCN復(fù)合膜的平均摩擦系數(shù)逐漸減小,說(shuō)明C元素的加入能有效改善TiCN復(fù)合膜的室溫摩擦性能,且C含量越高,摩擦性能越優(yōu)異。此外,不同C含量的TiCN復(fù)合膜室溫下的平均磨損率先減小后增大,當(dāng)C含量為19.10at.%時(shí),磨損率達(dá)到最低,為3.76×10-8 mm2N-1。高溫下的摩擦磨損實(shí)驗(yàn)結(jié)果表明:隨著環(huán)境溫度的升高,TiCN復(fù)合膜的平均摩擦系數(shù)和磨損率均逐漸增大。說(shuō)明C元素的加入并不能有效改善Ti CN薄膜的高溫摩擦磨損性能。對(duì)于不同V含量的TiVN復(fù)合膜的研究表明:室溫下制備的TiVN復(fù)合膜為面心立方結(jié)構(gòu),當(dāng)V含量為9.48at.%時(shí),Ti VN復(fù)合膜中出現(xiàn)了明顯的VN(111)晶面衍射峰,此時(shí)薄膜為TiVN和VN的雙相結(jié)構(gòu),擇優(yōu)取向始終為TiN(111)晶面,且隨著V含量的增加,TiN(111)晶面衍射峰逐漸向大角度偏移。當(dāng)V含量低于9.48at.%時(shí),Ti VN復(fù)合膜中的V原子占據(jù)TiN晶格中Ti原子的位置,形成(Ti,V)N置換固溶體;當(dāng)V原子在薄膜中的固溶度達(dá)到飽和時(shí),多余的V原子則與N原子結(jié)合以VN的形式存在。隨著V含量的增加,Ti VN復(fù)合膜的硬度和彈性模量值均先增大后減小:當(dāng)V含量為4.53at.%時(shí),復(fù)合膜的硬度達(dá)到最大,為23 GPa,同時(shí)彈性模量值也達(dá)到最大,為281GPa。室溫下的摩擦磨損實(shí)驗(yàn)結(jié)果表明:TiVN復(fù)合膜室溫下的平均摩擦系數(shù)隨著V含量的增加先略升高后逐漸降低,并逐漸穩(wěn)定在0.66左右。此外,不同V含量的TiVN復(fù)合膜室溫下的平均磨損率先減小后增大,當(dāng)V含量為4.53at.%時(shí),磨損率達(dá)到最低,為6.88×10-8 mm2N-1。高溫下的摩擦磨損實(shí)驗(yàn)結(jié)果表明:當(dāng)環(huán)境溫度低于300℃時(shí),隨著環(huán)境溫度的升高,TiVN復(fù)合膜的平均摩擦系數(shù)逐漸增大;當(dāng)環(huán)境溫度高于300℃時(shí),TiVN復(fù)合膜的平均摩擦系數(shù)逐漸降低,因?yàn)閺?fù)合膜中形成了具有低剪切模量和自潤(rùn)滑效應(yīng)的V2O5來(lái)充當(dāng)固體潤(rùn)滑劑,且在700℃時(shí),TiVN復(fù)合膜的平均摩擦系數(shù)達(dá)到最低,為0.44。此外,隨著環(huán)境溫度的升高,Ti VN復(fù)合膜的平均磨損率逐漸增大。
[Abstract]:In this paper, a series of TiCN composite films with different C content and TiVN composite films with different V content were prepared on Si (100) and 304 stainless steel substrates by JGP450 reactive magnetron sputtering instrument. The scanning electron microscope (SEM) and the incidental spectrometer (EDS), X ray diffraction instrument (XRD), nano indentation / scratch tester, friction and wear tester and three were used respectively. The chemical composition, cross section morphology, microstructure, microhardness, film base bonding force and friction and wear properties at different temperatures are characterized and analyzed. The results are as follows: the study of TiCN composite films with different C content shows that the TiCN composite film prepared at room temperature is a face centered cubic structure and the preferred orientation is TiN (111) the crystal surface, with the increase of C content, (111) the diffraction peak of the crystal plane is gradually shifted to a small angle and widens continuously, weakening the existence form of C atoms in the.TiCN composite membrane: some C atoms occupy the position of the N atom in the TiN lattice and form the replacement solid solution; and some C atoms exist in the form of amorphous lubricating phase. With the increase of C content, TiCN complex The hardness of the composite film increases first and then decreases. When the content of C is 19.10at.%, the hardness of the composite film reaches the maximum. The result of the friction and wear experiment at 32GPa. room temperature shows that the average friction coefficient of the TiCN composite film decreases with the increase of the C content. It shows that the addition of C element can effectively improve the room temperature friction of the TiCN composite film. And the higher the content of C, the better the friction performance. In addition, the average wear of the TiCN composite film with different C content first decreases and then increases. When the C content is 19.10at.%, the wear rate is the lowest. The friction and wear test results of 3.76 x 10-8 mm2N-1. at high temperature show that the average friction coefficient of the TiCN composite film is increased with the increase of the ambient temperature. The addition of the C element does not effectively improve the high temperature friction and wear properties of the Ti CN film. The study on the TiVN composite film with different V content shows that the TiVN composite film prepared at room temperature is a face centered cubic structure. When the V content is 9.48at.%, the obvious VN (111) plane diffraction peak appears in the Ti VN complex film. At this time, the film is a dual phase structure of TiVN and VN, and the preferred orientation is always TiN (111). And with the increase of V content, the TiN (111) diffraction peak is gradually shifted to a large angle. When V content is lower than 9.48at.%, V atoms in the Ti VN composite film occupy the position of Ti atoms in the TiN lattice and form the solid solution, when the atom is solid in the film. When the solubility reaches saturation, the superfluous V atom is combined with the N atom in the form of VN. With the increase of V content, the hardness and modulus of elasticity of the Ti VN composite film increase first and then decrease. When the V content is 4.53at.%, the hardness of the composite film reaches the maximum, which is 23 GPa, and the modulus of elasticity reaches the maximum, which is a friction mill at 281GPa. room temperature. The loss test results show that the average friction coefficient of TiVN composite film increases slightly at room temperature and gradually decreases with the increase of V content, and gradually stabilizes at about 0.66. In addition, the average wear of TiVN composite films with different V content decreases first and then increases. When V content is 4.53at.%, the wear rate reaches the lowest, which is 6.88 x 10-8 mm2N-1. high. The experimental results show that the average friction coefficient of TiVN composite film increases with the increase of ambient temperature when the ambient temperature is below 300 C, and the average friction coefficient of TiVN composite film decreases gradually when the ambient temperature is higher than 300, because the V2O5 with low shear modulus and self lubrication effect is formed in the composite film. To act as a solid lubricant, the average friction coefficient of the TiVN composite film reaches the lowest at 700 C and is 0.44.. The average wear rate of the Ti VN composite film increases with the increase of the ambient temperature.

【學(xué)位授予單位】：江蘇科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TG174.4;TB383.2

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