超疏水金屬基圓柱陣列的掩膜微細加工研究
發(fā)布時間:2018-04-09 02:13
本文選題:超疏水表面 切入點:金屬 出處:《大連理工大學》2016年碩士論文
【摘要】:超疏水表面具有自清潔、耐腐蝕、減磨減阻、液滴定向運輸及無損轉移、防霧、防結冰結霜等優(yōu)異性能,金屬基超疏水表面的制備在工業(yè)生產(chǎn)、醫(yī)療以及國防領域都具有廣闊的應用前景。針對現(xiàn)有金屬基超疏水表面制備方法存在的材料種類受限、不利于實現(xiàn)工業(yè)生產(chǎn)以及成本較高等問題,本文提出采用掩膜電化學方法和掩膜化學方法在鋁和銅基體上制得具有微小圓柱陣列結構的超疏水表面,通過試驗研究加工參數(shù)對圓柱陣列結構尺寸的影響規(guī)律以及圓柱陣列結構尺寸對金屬表面潤濕性的影響規(guī)律。掩膜電化學加工圓柱陣列微結構的試驗結果顯示,超聲振動可有效改善電化學刻蝕的表面質量;鋁基表面制備光刻膠掩膜較為合適的曝光時間和顯影時間分別為20s和240s;隨著電化學刻蝕過程中電流密度的增加和加工時間的延長,陣列圓柱的直徑逐漸減小,間隙和高度逐漸增加,但過長的加工時間會引起結構的破壞。掩膜化學加工圓柱陣列微結構的試驗結果顯示,銅基表面制備光刻膠掩膜較為合適的曝光時間和顯影時間分別為20s和360s,隨著化學刻蝕時間的延長,陣列圓柱的直徑逐漸減小,間隙和高度逐漸增加,過長的加工時間同樣會引起結構的破壞。根據(jù)所得加工參數(shù)對圓柱陣列結構尺寸的影響規(guī)律選用合適的掩膜圖案尺寸以及加工參數(shù),分別在鋁基和銅基表面制備具有不同尺寸參數(shù)的圓柱陣列微結構,經(jīng)低表面能修飾后,研究不同尺寸參數(shù)對表面潤濕性的影響規(guī)律。試驗發(fā)現(xiàn),由于鋁和銅自身性能的不同,水滴在具有相同尺寸圓柱陣列微結構的鋁和銅表面可能呈現(xiàn)出兩種不同的接觸狀態(tài),鋁表面用于“支撐”起變形水滴而實現(xiàn)Cassie-Baxter狀態(tài)所需的陣列圓柱高度較高,而銅表面較低的陣列圓柱高度即可使水滴在其上實現(xiàn)Cassie-Baxter狀態(tài)。水滴在具有圓柱陣列微結構的表面上呈Cassie-Baxter狀態(tài)時更易實現(xiàn)超疏水性能,且表面接觸角隨陣列圓柱直徑的減小和間隙的增大而增大,但隨高度的變化并不明顯。當鋁基表面陣列圓柱直徑、間隙和高度分別為60 μm、100μm口40μm時,可獲得平均接觸角為156.50的超疏水表面;當銅基表面陣列圓柱的直徑、間隙和高度分別為60μm、100μm和45μm時,可獲得平均接觸角為161.5°的超疏水表面。
[Abstract]:Superhydrophobic surfaces have excellent properties such as self-cleaning, corrosion resistance, wear reduction and drag reduction, droplet transport and non-destructive transfer, anti-fogging, anti-icing and frosting, etc. The preparation of superhydrophobic surfaces based on metal is used in industrial production.The field of medical treatment and national defense has broad application prospect.In view of the limited kinds of materials existing in the existing metal-based superhydrophobic surface preparation methods, which are not conducive to the realization of industrial production and high cost, etc.In this paper, the superhydrophobic surfaces with micro cylindrical arrays on aluminum and copper substrates have been prepared by mask electrochemical method and mask chemistry method.The effect of machining parameters on the structure size of cylindrical array and the wettability of metal surface were studied by experiments.The experimental results show that ultrasonic vibration can effectively improve the surface quality of electrochemical etching.The suitable exposure time and developing time for preparing photoresist mask on aluminum substrate were 20 s and 240 s respectively. With the increase of current density and processing time during electrochemical etching, the diameter of array cylinder gradually decreased.The gap and height increase gradually, but long processing time will cause damage to the structure.The experimental results show that the appropriate exposure time and developing time for photoresist mask preparation on copper base surface are 20 s and 360 s respectively. The diameter of the array cylinder decreases with the increase of chemical etching time.Gap and height increase gradually, too long processing time will also cause damage to the structure.According to the influence of machining parameters on the structural dimensions of cylindrical arrays, appropriate mask pattern size and machining parameters were selected, and cylindrical array microstructures with different size parameters were prepared on aluminum and copper base surfaces, respectively.The effect of different size parameters on surface wettability was studied after low surface energy modification.It is found that due to the different properties of aluminum and copper, water droplets may present two different contact states on aluminum and copper surfaces with the same size cylindrical array microstructures.The aluminum surface is used to "support" the deformed water droplets and the array cylinder height required to achieve Cassie-Baxter state is higher, while the lower copper surface array cylinder height enables the water droplets to realize the Cassie-Baxter state on it.The hydrophobicity of water droplets on the surface with cylindrical array microstructures is Cassie-Baxter, and the surface contact angle increases with the decrease of the cylinder diameter and the increase of the gap, but the change of the surface contact angle is not obvious with the height.A superhydrophobic surface with an average contact angle of 161.5 擄can be obtained.
【學位授予單位】:大連理工大學
【學位級別】:碩士
【學位授予年份】:2016
【分類號】:TG174.4
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