本文關(guān)鍵詞： 物理氣相沉積 CrN薄膜 AlCrN薄膜 摩擦學(xué)性能　出處：《中國地質(zhì)大學(xué)(北京)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：物理氣相沉積是改善機(jī)械零部件表面摩擦學(xué)性能的重要表面工程技術(shù)。本文針對切削刀具的高溫磨損問題采用陰極電弧離子鍍法制備了CrN和AlCrN薄膜,然后對CrN和AlCrN薄膜進(jìn)行常溫摩擦磨損試驗(yàn),并分別在大氣和真空環(huán)境中對AlCrN薄膜進(jìn)行熱處理。采用磁控濺射法制備了4種不同參數(shù)的AlCrN薄膜,在大氣環(huán)境中對其進(jìn)行熱處理。選擇參數(shù):Ar氣流量100 sccm的樣品進(jìn)行高溫摩擦磨損試驗(yàn)。利用三維白光形貌儀、掃描電子顯微鏡、納米壓痕儀和摩擦磨損實(shí)驗(yàn)儀等分析測試儀器測試分析了薄膜的表面形貌、組織結(jié)構(gòu)、硬度和相組成。探討氮化物薄膜常溫和高溫摩擦學(xué)性能及機(jī)理。結(jié)果如下:(1)陰極電弧離子鍍制備的CrN薄膜表面平整,缺陷較少,其納米硬度和彈性模量分別為28 GPa和350 GPa。對磨球?yàn)镾i3N4陶瓷球時(shí),CrN薄膜的磨損機(jī)制主要為磨粒磨損,伴有少量的氧化和粘著磨損,316L不銹鋼的磨損機(jī)制主要為磨粒磨損和塑形變形,伴有少量的氧化和粘著磨損。對磨球?yàn)?2100鋼球時(shí),CrN薄膜的主要磨損機(jī)制為粘著磨損,伴有少量的氧化,316L不銹鋼的磨損機(jī)制主要為粘著磨損,伴有少量的氧化和磨粒磨損。(2)陰極電弧離子鍍制備的AlCrN薄膜表面平整,由CrN、AlCrN和AlN三種相組成,薄膜納米硬度為18 GPa,彈性模量為290 GPa。干摩擦條件下,AlCrN薄膜具有良好的承載能力,磨損機(jī)制主要為磨粒磨損。在PAO4潤滑油條件下,其磨損率隨載荷的增大而增大,其磨損機(jī)制主要為粘著磨損,并有輕微的磨粒磨損。大氣環(huán)境下,AlCrN薄膜在800℃時(shí)開始出現(xiàn)氧化相Cr2O3,并且在800℃下仍能保持較高的納米硬度和彈性模量,分別為15 GPa和260 GPa。(3)磁控濺射法制備的4種參數(shù)的AlCrN薄膜表面沒有明顯差別,整體平整致密,薄膜表面有CrN、AlCrN、AlN三種氮化物相,Al元素和Cr元素的氧化產(chǎn)物Al2O3和Cr2O3有效提高了薄膜的抗氧化性和力學(xué)性能。Ar/N2氣體流量為100s ccm/50 sccm的AlCrN薄膜與SiC球?qū)δr(shí),高溫條件下的摩擦系數(shù)均高于20℃時(shí)的摩擦系數(shù)。20℃條件下AlCrN薄膜的磨損機(jī)制主要是磨粒磨損,同時(shí)有粘著磨損和氧化磨損,高溫條件下,AlCrN薄膜的磨損機(jī)制是塑性變形、磨粒磨損、氧化磨損和粘著磨損的復(fù)合磨損。
[Abstract]:Physical vapor deposition is an important surface engineering technology to improve the tribological properties of mechanical parts. In this paper, CrN and AlCrN thin films were prepared by cathode arc ion plating for cutting tool wear at high temperature. Then the CrN and AlCrN thin films were tested by friction and wear at room temperature, and the AlCrN films were heat-treated in atmosphere and vacuum respectively. Four kinds of AlCrN thin films with different parameters were prepared by magnetron sputtering. The heat treatment was carried out in atmospheric environment. The friction and wear tests were carried out at high temperature by selecting the sample with the flow rate of 1: ar gas for 100 sccm. The three dimensional white light profilometer, scanning electron microscope, scanning electron microscope (SEM) were used. Nano-indentation instrument and friction and wear tester etc., the surface morphology, microstructure and structure of the film were tested and analyzed. Hardness and phase composition. Tribological properties and mechanism of nitride films at room and high temperatures are discussed. The results are as follows: the surface of CrN films prepared by cathodic arc ion plating is flat and the defects are less. The wear mechanism of CrN film is mainly abrasive wear when the grinding ball is Si3N4 ceramic ball, and the wear mechanism of 316L stainless steel with a small amount of oxidation and adhesive wear is mainly abrasive wear and plastic deformation. The main wear mechanism of CrN film is adhesive wear when the grinding ball is 52100 steel ball, and the adhesive wear is the main wear mechanism of stainless steel with a small amount of oxidized 316L stainless steel. The surface of AlCrN film prepared by cathodic arc ion plating with a small amount of oxidation and abrasive wear is smooth, which consists of three phases: CrNO AlCrN and AlN. The nano-hardness of the film is 18 GPaand the elastic modulus is 290GPa. the thin film has good bearing capacity under dry friction condition. The wear mechanism is mainly abrasive wear. Under the condition of PAO4 lubricating oil, the wear rate increases with the increase of load, and the wear mechanism is mainly adhesive wear. At 800 鈩，

本文編號(hào)：1511208