本文關鍵詞： FePd薄膜 晶粒生長 磁化過程　出處：《稀有金屬材料與工程》2017年07期 　論文類型：期刊論文

【摘要】：采用磁控濺射方法在玻璃襯底上制備了不同厚度的FePd合金薄膜。利用X射線衍射(XRD),能譜(EDS)和物理性能測試研究了薄膜厚度對結構和磁性能的影響。結果表明,在FePd合金薄膜中有序化過程發(fā)生在更厚的薄膜中。隨著薄膜厚度從d=22.5 nm增加到d=67.5 nm,面內矯頑力剛開始急劇增大,然后隨著薄膜厚度的進一步增加矯頑力會減小。在d=67.5 nm時面內矯頑力最大約為3.2×79.6kA/m。
[Abstract]:FePd alloy thin films of different thickness were prepared on glass substrates by magnetron sputtering. The effect of thickness on the structure and magnetic properties was investigated by X-ray diffraction (XRD) and energy dispersive spectroscopy (EDS) and physical properties. In FePd alloy films, the ordering process occurs in the thicker films. As the thickness of the films increases from 22.5 nm to 67.5 nm, the in-plane coercivity increases sharply. Then the coercivity decreases with the increase of film thickness, and the maximum in plane coercivity is about 3.2 脳 79.6 Ka / m at 67.5 nm.
【作者單位】： 廣西信息材料重點實驗室;桂林電子科技大學;
【基金】：National Key Basic Research Development Program of China(“973” Program)(2014CB643703) National Natural Science Foundation of China(51261004,51461012) Natural Science Foundation of Guangxi(2013GXNSFBA019242) the Research Foundation of Guangxi Key Laboratory of Information Materials(131003-Z,131007-Z)
【分類號】：TB383.2;TG132.27

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