【摘要】：針對目前多晶硅切割廢料大量堆積造成環(huán)境污染的問題,提出了以多晶硅切割廢料為原料,經(jīng)過鹽酸浸出除Fe后,配加活性炭高溫反應(yīng)制備SiC的工藝。首先,對廢料成分與碳的反應(yīng)進(jìn)行了熱力學(xué)計(jì)算;然后,使用差熱分析、X射線衍射和掃描電子顯微鏡等分析手段,研究了反應(yīng)溫度、反應(yīng)時間以及廢料中的Fe對產(chǎn)物物相組成和形貌的影響。結(jié)果表明,切割廢料經(jīng)過酸浸后的主要成分為SiC和Si。碳不能與Fe-Si系合金(FeSi、Fe_5Si_3等)中的Si反應(yīng)生成SiC,所以為了制備純度較高的SiC,多晶硅廢料反應(yīng)前必須預(yù)先除Fe。當(dāng)反應(yīng)溫度高于1 400℃時,酸浸后的切割廢料與活性炭的反應(yīng)能夠迅速地發(fā)生,且反應(yīng)生成的SiC遺傳碳顆粒的形貌。
[Abstract]:In order to solve the problem of environmental pollution caused by mass accumulation of polysilicon cutting waste, the process of preparing SiC from polysilicon cutting waste by hydrochloric acid leaching and high temperature reaction of activated carbon after leaching with hydrochloric acid was put forward. Firstly, the reaction of waste material with carbon was calculated by thermodynamics. Then, the effects of reaction temperature, reaction time and Fe in waste material on the phase composition and morphology of the product were studied by means of differential thermal analysis, X-ray diffraction and scanning electron microscope. The results show that the main components of the cut waste after acid leaching are SiC and Si.. Carbon does not react with Si in Fe-Si alloys (FeSi,Fe_5Si_3 et al.) to form SiC,. In order to prepare high purity SiC, polysilicon scrap, Fe. must be removed in advance. When the reaction temperature is higher than 1 400 鈩，

本文編號：2381041