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B270玻璃-TC4鈦合金熱壓陽極鍵合連接工藝研究

發(fā)布時間:2018-07-16 16:32
【摘要】:采用了熱壓-陽極鍵合復(fù)合連接工藝對B270玻璃/TC4鈦合金進行連接,分析了真空熱壓參數(shù)對B270玻璃/TC4鈦合金連接界面結(jié)構(gòu)、結(jié)合效果的影響,并研究了B270玻璃/TC4鈦合金的陽極鍵合工藝,分析了不同鍵合工藝參數(shù)下的工藝特征。結(jié)果表明,當對應(yīng)的真空熱壓參數(shù)為:T=750℃,t=2 h,P=0.5 MPa,當鍵合溫度T在350~550℃,電場電壓V在500~700 V時,有最佳的連接效果。鍵合界面結(jié)構(gòu)分析發(fā)現(xiàn),整個鍵合區(qū)域是由玻璃-中間過渡層-TC4鈦合金的結(jié)構(gòu)組成,界面兩側(cè)的化學(xué)元素呈梯度分布。
[Abstract]:B270 glass / TC4 titanium alloy was bonded by hot pressing and anodic bonding process. The effect of vacuum hot pressing parameters on the interface structure and bonding effect of B270 glass / TC4 titanium alloy was analyzed. The anodic bonding process of B270 glass / TC4 titanium alloy was studied, and the process characteristics of B270 glass / TC4 titanium alloy under different bonding parameters were analyzed. The results show that the optimal bonding effect is obtained when the corresponding vacuum hot pressing parameters are as follows: 1: TX 750 鈩,

本文編號:2126968

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