本文選題：AlN陶瓷 + 低溫燒結(jié)　； 參考：《合肥工業(yè)大學》2015年碩士論文

【摘要】：隨著微電子技術(shù)的不斷發(fā)展,電力電子系統(tǒng)高集成度導致功率密度的提高,器件工作時產(chǎn)生的熱量增加,Al203等傳統(tǒng)的陶瓷基板已經(jīng)難以滿足電子封裝工業(yè)對基板越來越高的熱耗散性能的要求。由于具有優(yōu)良的導熱、介電及力學性能,AlN陶瓷在電力電子等領(lǐng)域得到愈加廣泛的應(yīng)用。AlN為強共價鍵化合物,燒結(jié)活性很低,AlN陶瓷低溫燒結(jié)面臨很大的困難。本文采用Y2O3-Sm2O3-CaO復合雙稀土助燒劑體系,開展A1N陶瓷的低溫燒結(jié)工藝開發(fā),研究不同助燒劑添加方式及其添加量對AlN陶瓷組成、結(jié)構(gòu)及性能的影響,確定組織結(jié)構(gòu)與性能的關(guān)系,實現(xiàn)低溫燒結(jié)AlN陶瓷的組織結(jié)構(gòu)優(yōu)化。以脫水硝酸鹽的形式添加助燒劑利于其均勻分布,燒結(jié)活性高,采用Sm2O3、 Y2O3共同添加的方式,比單一添加相同質(zhì)量的Sm203促進燒結(jié)的效果更好。當稀土氧化物含量為2 wt%時,AlN陶瓷燒結(jié)生成CaYAl3O7和CaSmAl3O7第二相；當其含量增加到4 wt%時,其中除形成上述兩種第二相外,還形成YAG和SmAlO3反應(yīng)產(chǎn)物。助燒劑含量為1 wt%Sm2O3、1wt%Y2O3和2 wt%CaO時,1700℃燒結(jié)AlN陶瓷的抗彎強度和熱導率分別達到321.4 MPa、123.8 W/(m·K)。低溫燒結(jié)AlN陶瓷的致密度及其晶界第二相的組成、數(shù)量與分布狀態(tài)是影響其性能的關(guān)鍵因素。在低溫燒結(jié)AlN陶瓷完全致密的前提下,優(yōu)化燒結(jié)助劑的組成與含量,有助于減少AlN陶瓷晶界第二相的量,有利于其在AlN三叉晶界處分布,從而進一步提高AlN的性能。采用脫水硝酸鹽的形式添加2wt% Sm2O3、2wt%Y203及1 wt%CaO燒結(jié)助劑,并在1750℃燒結(jié)制備的AlN陶瓷的第二相主要是YAG和SmAlO3,有少量的CaAl4O7相,AlN陶瓷顯微組織結(jié)構(gòu)均勻,斷裂方式為沿晶和解理混合斷裂形式,主要性能分別為熱導率153.7 W/(m·K),抗彎強度402.1 MPa。
[Abstract]:With the development of microelectronics technology, the high integration of power electronic system leads to the increase of power density. The traditional ceramic substrates such as Al203 and other traditional ceramic substrates can not meet the requirements of the electronic packaging industry for the higher and higher thermal dissipation performance of the substrates. Because of its excellent thermal conductivity, the dielectric and mechanical properties of AlN ceramics have been widely used in power electronics and other fields. AlN is a strong covalent bond compound. It is very difficult to sintering AlN ceramics with low sintering activity at low temperature. In this paper, the low temperature sintering process of A1N ceramics was developed by using Y2O3-Sm2O3-CaO compound double rare earth sintering aid system. The effects of different sintering aids and their amount on the composition, structure and properties of AlN ceramics were studied, and the relationship between microstructure and properties was determined. The microstructure of AlN ceramics sintered at low temperature was optimized. The addition of sintering aids in the form of dehydrated nitrate is beneficial to its uniform distribution and high sintering activity. The effect of adding Sm2O3 and Y2O3 together is better than that of single addition of Sm203 of the same quality. When the content of rare earth oxide is 2 wt%, the second phase of CaYAl3O7 and CaSmAl3O7 is formed when the content of rare earth oxide is 2 wt%, and the reaction products of YAG and SmAlO3 are also formed when the content is increased to 4 wt%. The flexural strength and thermal conductivity of AlN ceramics sintered at 1700 鈩，

本文編號：1978968