本文選題：CrN膜層 + 電弧離子鍍��； 參考：《昆明理工大學(xué)》2017年碩士論文

【摘要】：CrN涂層因具有高硬度、低的內(nèi)應(yīng)力、良好的韌性、耐磨損等優(yōu)異性能,在如汽車、船舶、航空航天等領(lǐng)域得到廣泛應(yīng)用。隨著材料服役環(huán)境更加苛刻,傳統(tǒng)的單相CrN等在硬度、耐磨性等方面無法滿足使用工況。研究發(fā)現(xiàn)通過控制制備參數(shù)及膜層體系得到高硬度、高韌性低以及摩擦系數(shù)低的納米多層膜能夠改善其抗摩擦磨損性能,但是隨著涂層厚度增加,涂層內(nèi)應(yīng)力的增加,影響涂層與基體的結(jié)合力。因此,制備大厚度、高結(jié)合力、耐磨損性能好的CrN膜層成為時下的研究重點。本文采用真空陰極電弧離子鍍技術(shù)制備CrN膜層,首先通過正交試驗法對氣壓、靶電流及負偏壓進行優(yōu)化,得到CrN薄膜最佳制備工藝;以此為基礎(chǔ),制備不同厚度CrN單層膜。然后,改變Cr/CrN多層膜調(diào)制周期并對其進行優(yōu)化;以最佳調(diào)制周期為基礎(chǔ),增加沉積時間,制備不同厚度的Cr/CrN多層膜,檢測基本性能,重點對各膜層磨損率及與基體的結(jié)合力進行研究,結(jié)果表明:1)本實驗CrN薄膜最佳制備工藝參數(shù)為氣壓1.4 Pa、靶電流100 A、偏壓-100 V。2)隨著膜層厚度的增加,CrN單層膜表面質(zhì)量急劇下降;CrN膜層硬度逐漸增加;膜層與基體的結(jié)合強度急劇降低,膜層厚度在20μm時膜層結(jié)合力僅為13N;膜層磨損率急劇升高。3)隨著調(diào)制周期的減小,Cr/CrN多層膜截面致密性逐漸升高;不同調(diào)制周期Cr/CrN多層膜與基體結(jié)合力均在100 N以上,同時調(diào)制周期為321 nm的Cr/CrN多層膜附著性及韌性最佳;不同調(diào)制周期的Cr/CrN多層膜硬度相近;不同調(diào)制周期的Cr/CrN多層膜磨損率在2-4×10-6 mm3/N·m范圍,調(diào)制周期為569 nm的Cr/CrN多層膜磨損率相對較低。4)隨著膜層厚度的增加,Cr/CrN多層膜表面質(zhì)量逐漸下降,但膜層致密性均良好;Cr/CrN多層膜韌性及結(jié)合強度相近,且與基體結(jié)合強度均在100 N以上;Cr/CrN多層膜的磨損在同一水平上小幅度升高。5)CrN單層膜的摩擦過程中以磨粒磨損為機理,而Cr/CrN多層膜摩擦過程以滑動摩擦磨損為主;膜層厚度在10 μm以上,Cr/CrN多層膜磨損率為CrN單層膜磨損率的1/4。
[Abstract]:CrN coating has been widely used in automobile, ship, aerospace and other fields because of its excellent properties such as high hardness, low internal stress, good toughness and wear resistance. With the material service environment more harsh, the traditional single-phase CrN in hardness, wear resistance and other aspects can not meet the operating conditions. It is found that the nano-multilayer films with high hardness, low toughness and low friction coefficient can improve their friction and wear resistance by controlling the preparation parameters and the coating system. However, with the increase of coating thickness, the internal stress of the coating increases. The adhesion between coating and substrate is affected. Therefore, the preparation of CrN films with large thickness, high adhesion and good wear resistance has become the focus of research. In this paper, the CrN film was prepared by vacuum cathode arc ion plating. Firstly, the air pressure, target current and negative bias voltage were optimized by orthogonal test, and the optimal preparation process of CrN thin film was obtained, on the basis of which, different thickness CrN monolayer films were prepared. Then, the modulation period of Cr/CrN multilayer film is changed and optimized, based on the optimal modulation period, the deposition time is increased, and the Cr/CrN multilayer films with different thickness are prepared, and the basic properties are tested. The wear rate of each film and its adhesion to the substrate were studied. The results show that the optimum preparation parameters of CrN thin films in this experiment are as follows: pressure 1.4 Pa, target current 100A, bias voltage -100V. 2) with the increase of film thickness, the surface quality of CRN monolayer decreases sharply and the hardness of CRN film increases gradually. When the thickness of the film is 20 渭 m, the adhesive force of the film is only 13N, and the wear rate of the film increases sharply. 3) with the decrease of modulation period, the compactness of Cr-CrN multilayer cross section increases gradually. The adhesion and toughness of Cr/CrN multilayer films with different modulation periods are all over 100N, and the adhesion and toughness of Cr/CrN multilayers with modulation period of 321nm are the best, and the hardness of Cr/CrN multilayer films with different modulation periods is similar. The wear rate of Cr/CrN multilayer films with different modulation periods is in the range of 2-4 脳 10-6 mm3/N m, and the wear rate of Cr/CrN multilayer films with modulation period of 569nm is relatively low. 4) the surface quality of Cr-Cr-CrN multilayer films decreases with the increase of film thickness. However, the compactness of the film is good and the toughness and bonding strength of the multilayer Cr / CrN film are similar, and the wear of Cr-CrN multilayer film increases slightly at the same level. The wear mechanism of the Cr / CrN multilayer film is the abrasive wear mechanism in the friction process of the single layer of Cr / CrN film. The friction process of Cr/CrN multilayer film is mainly sliding friction and wear, and the wear rate of Cr-CrN multilayer film with thickness more than 10 渭 m is 1 / 4 of that of CrN monolayer film.
【學(xué)位授予單位】：昆明理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TQ153

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