本文選題：介電性能 + 品質(zhì)因數(shù)　； 參考：《西安電子科技大學》2015年碩士論文

【摘要】：低溫共燒陶瓷(Low Temperature Co-fired Ceramics LTCC)技術已成為實現(xiàn)各類電子元器件制造、集成及其封裝的主流技術,低介電常數(shù)微波介質(zhì)陶瓷由于其介電常數(shù)低、品質(zhì)因數(shù)高、溫度系數(shù)近似為零等優(yōu)點被廣泛應用于LTCC基板材料中,成為微波介質(zhì)陶瓷研究的熱點。本論文中選取CaO-SiO_2-B_2O_3作為研究體系,采用多步固相法制備低介電常數(shù)微波介質(zhì)陶瓷材料,分別研究了Ca/Si比和B_2O_3的改變對材料晶相組成、微觀形貌和介電性能的影響。在最佳Ca/Si比和適當B_2O_3含量的基礎上,添加適量陶瓷助溶劑BBAS粉,以降低陶瓷粉體的燒結溫度,最終獲得可用于制備LTCC基板材料的陶瓷粉料。采用X-射線衍射(XRD)法、掃描電子顯微鏡(SEM)、阿基米德原理和Zeta電位分析對陶瓷粉料的物相、表面形貌、密度和Zeta電位進行表征。精選CBS陶瓷粉體后通過不斷調(diào)配漿料配比和工藝參數(shù),采用流延工藝制備出可應用的LTCC生瓷帶,在此基礎上制備LC諧振天線,并對其諧振頻率進行測試。研究結果表明,當CaO:SiO_2:B_2O_3=21:13:16(質(zhì)量比),煅燒溫度為900℃時,所得樣品C中除了有主晶相b-CaSiO3和Ca2B_2O_4外,含有少量a-SiO_2相。由該粉體制備的陶瓷樣品中,晶粒以板條狀為主,晶粒間氣孔較少,結構比較致密,具有較大的密度。此時該樣品具有最佳的介電性能,其介電常數(shù)為6.3、品質(zhì)因數(shù)為2.4×104GHz(f=11.7 GHz)、溫度系數(shù)為-67 ppm/℃,熱導率為3.6W/m×K。在樣品C的配方基礎上,添加適量陶瓷助溶劑BBAS粉,以降低該組分的燒結溫度。研究發(fā)現(xiàn),添加陶瓷助溶劑BBAS粉后,晶體的結構沒有明顯改變,晶粒的形貌仍以板條狀的為主,一些小的粒狀晶粒分散在其中。當燒結溫度降低至920℃時,所得陶瓷樣品C_6的晶粒粒徑介于1.0-2.0mm之間,并且陶瓷顆粒在水溶液中顯負電性,顆粒之間的穩(wěn)定性較差。該樣品具有較好的介電性能,其介電常數(shù)為6.3,品質(zhì)因數(shù)為1.1×104 GHz(f=12.7 GHz),溫度系數(shù)為-84 ppm/℃。以所得陶瓷粉料C_6為填充物,有機物(乙酸乙酯和酒精的混合物)作為溶劑,通過調(diào)節(jié)粘結劑PVB和增塑劑的含量,制備不同配比的流延漿料。采用流延法制備LTCC生瓷帶,再經(jīng)絲網(wǎng)印刷、打孔、疊層、溫水等靜壓、排膠、共燒等LTCC工藝后,通過CAD繪圖,制備可用于測試應變的LC諧振天線,并采用接觸法和非接觸法測試其共振頻率。結果表明,所制備的天線的共振頻率約為f=155 MHz,與設計目標f=120MHz接近。
[Abstract]:Low Temperature Co-fired Ceramics LTCC (low temperature Temperature Co-fired Ceramics LTCC) technology has become the mainstream technology to realize the fabrication, integration and packaging of all kinds of electronic components. The low dielectric constant microwave dielectric ceramics have high quality factor due to their low dielectric constant. The temperature coefficient is approximately zero and has been widely used in LTCC substrate materials, and has become a hot spot in microwave dielectric ceramics research. The low dielectric constant microwave dielectric ceramics were prepared by multi-step solid state method with CaO-SiO_2-B_2O_3 as the research system. The effects of the changes of Ca/Si ratio and B_2O_3 on the crystal phase composition, microstructure and dielectric properties of the materials were studied. On the basis of the optimum Ca/Si ratio and the appropriate B_2O_3 content, the proper amount of ceramic co-solvent BBAS powder was added to lower the sintering temperature of the ceramic powder, and finally the ceramic powder which could be used to prepare the LTCC substrate material was obtained. The phase, surface morphology, density and Zeta potential of ceramic powders were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Archimedes principle and Zeta potential analysis. After selecting the CBS ceramic powder, the suitable LTCC ceramic tape was prepared by continuous mixing of slurry ratio and technological parameters. On this basis, LC resonant antenna was prepared and its resonant frequency was measured. The results show that when Cao: Sio _ 2O _ 2: B _ 2O _ 2O population is 321: 13: 16 (mass ratio, calcination temperature is 900 鈩，

本文編號：1776822