本文選題：PZT基疊層壓電陶瓷 + 低溫共燒(LTCC)��； 參考：《南京航空航天大學》2017年碩士論文

【摘要】：壓電作動器具有控制精度高、響應速度快、線性度好、功耗低等優(yōu)點,已被廣泛應用于電子、通信、醫(yī)學等諸多領(lǐng)域。與此同時,隨著科學的發(fā)展,單層壓電作動器驅(qū)動電壓高、位移太小,已經(jīng)沒法滿足當前低電壓下大位移的需要。為了克服這一缺點,疊層壓電作動器受到了越來越多的關(guān)注。本文主要對制備疊層陶瓷壓電作動器過程中的流延工藝和疊層、熱壓、埋壓燒結(jié)工藝進行了系統(tǒng)的研究,成功的探索出了良好的制備工藝。還嘗試著采用對內(nèi)電極銀漿進行摻雜陶瓷粉的方式,對疊層陶瓷器件層間的界面缺陷進行了優(yōu)化,也取得了較好的實驗結(jié)果。系統(tǒng)地摸索了整個制備疊層陶瓷器件的工藝,重點對流延工藝和埋壓燒結(jié)工藝進行了相應的優(yōu)化。結(jié)果表明:當添加0.9%wt分散劑、4.3%wt粘結(jié)劑、2.5%wt增塑劑,且當所使用的溶劑丁酮和無水乙醇的體積比為7:3時,所制備的流延漿料符合使用要求;當流延機加熱基板溫度設置為38℃左右,流延速度為0.21m/min-0.22m/min,流延機刀口間隙為180μm時,可以流延出表面無明顯缺陷,厚度為50μm左右,綜合性能良好的流延生片;當疊層器件層數(shù)低于20層,每平方毫米負重0.1875克左右,可以很好地起到抑制Z軸方向的變形且可以不導致疊層器件開裂的現(xiàn)象,而在器件的四周堆積大量的預燒陶瓷粉,可以很好地起到抑制X-Y方向的側(cè)彎變形。隨后,對成功燒結(jié)制備的疊層試樣進行了性能檢測,結(jié)果表明:燒結(jié)致密的疊層壓電陶瓷作動器層與層之間界面清晰,有很少的孔洞和間隙等缺陷,壓電層和內(nèi)電極層的厚度分別為35μm和5μm。同時,通過向內(nèi)電極銀漿中添加不同比例的陶瓷粉,研究不同的添加量對疊層陶瓷的界面改善情況。實驗結(jié)果表明:當內(nèi)電極銀漿的陶瓷粉摻雜量達到30%-40%時,此時疊層器件的抗拉強度提高了約1.8-1.9倍。但是內(nèi)電極的方阻也由未摻雜陶瓷粉的2mΩ/mm增大到摻雜了40%時的40mΩ/mm;當摻雜量達到50%左右時,內(nèi)電極開始出現(xiàn)不連續(xù)的狀況,基本失去了連續(xù)導電性,此時的疊層器件已經(jīng)無法投入使用。最后,還對不同陶瓷粉添加量的試樣進行了疲勞測試,測試結(jié)果表明:隨著陶瓷粉的添加量的逐漸增大,εr和d33逐漸降低,漏電流逐漸增大。這種實驗結(jié)果與疊層陶瓷作動器的電極連接模型吻合度較好。
[Abstract]:Piezoelectric actuators have been widely used in many fields, such as electronics, communication, medicine and so on, because of the advantages of high control precision, fast response, good linearity and low power consumption.At the same time, with the development of science, the single-layer piezoelectric actuators drive voltage is high, the displacement is too small to meet the needs of large displacement at low voltage.In order to overcome this shortcoming, laminated piezoelectric actuators have attracted more and more attention.In this paper, the rolling process, lamination, hot pressing and burying sintering process of laminated ceramic piezoelectric actuators are studied systematically, and a good preparation process has been successfully explored.The interface defects between laminated ceramic devices were optimized by doping ceramic powder with internal electrode silver paste, and good experimental results were obtained.The process of fabricating laminated ceramic devices is studied systematically. The key process of convection casting and burying sintering are optimized.The results show that when the addition of 0.9%wt dispersant 4.3wt binder and 2.5wt plasticizer, and when the volume ratio of solvent butanone and anhydrous ethanol is 7:3, the casting slurry meets the requirements of application, and when the heating temperature of the casting machine is about 38 鈩，

本文編號：1761533