本文選題：飛秒激光　切入點(diǎn)：石英玻璃　出處：《大連理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：石英玻璃具有機(jī)械強(qiáng)度高、耐熱性好、熱膨脹系數(shù)小、化學(xué)性能穩(wěn)定等優(yōu)點(diǎn),因而廣泛應(yīng)用于光刻印刷、空間光學(xué)及激光核聚變系統(tǒng)等領(lǐng)域。這些領(lǐng)域,較多涉及石英玻璃微結(jié)構(gòu)的精密加工,如表面微流道制造、表面凹槽減薄等。但石英玻璃具有高硬易碎等特點(diǎn),傳統(tǒng)加工方法如光刻腐蝕、超聲波和離子刻蝕等很難在其表面進(jìn)行點(diǎn)線面等微結(jié)構(gòu)的精密加工。飛秒激光脈寬短于絕大多數(shù)物理化學(xué)過程的特征時(shí)間,因此具有閾值效應(yīng)明顯、熱影響區(qū)極小、重鑄層小和可控性高等特點(diǎn),使其在石英玻璃表面進(jìn)行微結(jié)構(gòu)的精密加工成為可能。本文采用實(shí)驗(yàn)與仿真相結(jié)合的方法,對(duì)飛秒激光精密加工石英玻璃微結(jié)構(gòu)的形狀和形貌特征進(jìn)行分析與討論,主要研究內(nèi)容包括：(1)分析飛秒激光加工電介質(zhì)過程中所涉及的非線性過程,基于�？�-普朗克方程,建立飛秒激光燒蝕石英玻璃的燒蝕閾值及單脈沖燒蝕深度模型,為微結(jié)構(gòu)加工實(shí)驗(yàn)提供脈沖能量參考,為微結(jié)構(gòu)仿真模型的建立提供理論基礎(chǔ)；(2)開展微孔結(jié)構(gòu)燒蝕實(shí)驗(yàn),分析脈沖能量和數(shù)目對(duì)微孔燒蝕形狀及形貌影響規(guī)律；測(cè)量燒蝕閾值、單脈沖燒蝕深度及多脈沖累積系數(shù)等參數(shù),對(duì)閾值模型進(jìn)行驗(yàn)證,并為飛秒激光加工石英玻璃微結(jié)構(gòu)仿真模型的建立提供基本參數(shù)；(3)開展線槽結(jié)構(gòu)加工實(shí)驗(yàn),分析脈沖能量和掃描速度對(duì)線槽加工形狀及形貌影響規(guī)律,確定優(yōu)化的線槽加工參數(shù)；基于單脈沖燒蝕深度模型,建立線槽結(jié)構(gòu)截面形狀仿真模型,為后續(xù)凹槽仿真建立基礎(chǔ)；(4)開展單層凹槽減薄實(shí)驗(yàn),分析線重疊率對(duì)凹槽減薄形狀及底面形貌影響規(guī)律；建立單層凹槽減薄三維仿真模型,通過模型分析脈沖能量和掃描速度參數(shù)對(duì)凹槽底面粗糙度影響規(guī)律；(5)開展不同減薄方式的雙層凹槽減薄實(shí)驗(yàn),與單層減薄凹槽進(jìn)行對(duì)比,分析減薄方式對(duì)石英玻璃凹槽形狀及形貌的影響規(guī)律。
[Abstract]:Quartz glass has high mechanical strength, good heat resistance, low thermal expansion coefficient, chemical stability and other advantages, is widely used in the field of space optical lithography, and laser fusion systems. These areas are more involved in precision machining of quartz glass micro structure, such as surface micro channel fabrication, surface groove thinning. But the quartz glass has high hard brittle characteristics, traditional processing methods such as photoetching, ultrasonic and ion etching on the surface of hard point such as precision machining of micro structure. The characteristics of femtosecond laser pulse width time shorter than the vast majority of the physical and chemical process, so it has obvious threshold effect, minimal heat affected Zone, recasting small and controllable high, the precision machining of micro structure on the surface of quartz glass becomes possible. This paper uses the method of combining experiment and simulation, the femtosecond laser precision machining The characteristics of the shape and morphology of quartz glass micro structure were analyzed and discussed, the main research contents include: (1) the nonlinear analysis of the processes involved in the process of femtosecond laser processing of dielectric, the Fokker Planck equation based on the ablation threshold of quartz glass based femtosecond laser ablation and single pulse ablation depth model, provide reference for micro energy pulse the structure of machining experiments for micro structure simulation model provides a theoretical basis; (2) to carry out the microporous structure of Ablation Experiment Analysis of pulse energy and number of micro ablation of shape and morphology influence; measurement of ablation threshold, single pulse ablation depth and multi pulse accumulation coefficient, to verify the threshold model, and for femtosecond laser the processing of quartz glass micro structure to establish simulation model to provide the basic parameters; (3) to carry out the line groove machining experiment, analysis of pulse energy and scanning speed on line Influence of groove shape and morphology, determine the processing parameters optimization of line groove; single pulse ablation depth model based on a line groove structure shape simulation model, establish the foundation for the subsequent simulation of groove; (4) to carry out single groove thinning experiments, analysis of line overlap rate on the groove shape and the bottom thinning effect of surface topography the establishment of single groove thinning; 3D simulation model, through the analysis of the model of pulse energy and scanning velocity parameters of roughness of the groove bottom surface; (5) to carry out the double groove of different thinning methods thinning experiments, compared with monolayer thin grooves, influences of thinning methods on the quartz glass groove shape and morphology.

【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ171.731;TN249

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本文編號(hào)：1576930