本文關(guān)鍵詞： 碳化硅 化學(xué)機械拋光 芬頓反應(yīng) 固相催化劑 去除效率　出處：《機械工程學(xué)報》2017年21期 　論文類型：期刊論文

【摘要】：針對單晶Si C化學(xué)機械拋光使用的拋光液,研究了產(chǎn)生芬頓反應(yīng)Fe、Fe O、Fe_2O_3、Fe_3O_4等4種鐵系固相催化劑的效果。結(jié)果發(fā)現(xiàn)當Fe_3O_4作為催化劑時,Si C表面能夠產(chǎn)生明顯的化學(xué)反應(yīng),生成較軟易去除的Si O_2氧化層,化學(xué)機械拋光時材料去除率最高達到17.2 mg/h、表面粗糙度最低達到R_a2.5 nm。相比Fe、Fe O、Fe_2O_3等固相催化劑,Fe_3O_4更適宜用作Si C的化學(xué)機械拋光。拋光液中Fe~(2+)離子濃度和穩(wěn)定性是決定芬頓反應(yīng)速率和穩(wěn)定性的重要因素,固相催化劑電離自由Fe~(2+)能力的差異直接影響了化學(xué)拋光液中的Fe~(2+)濃度,固相催化劑電離Fe~(2+)的能力越強,拋光液中Fe~(2+)濃度就越高,芬頓反應(yīng)速率越快,與Si C進行化學(xué)反應(yīng)速度越快,材料去除率越高,拋光質(zhì)量越好。
[Abstract]:In view of the polishing liquid used in chemical mechanical polishing of single crystal sic, the effect of producing four iron series solid phase catalysts, such as Fenton reaction, FeFe2O3, Fe2O3, Fe3O4, etc., has been studied. The results show that when Fe_3O_4 is used as catalyst, the surface of Si C can produce obvious chemical reaction. The formation of a soft and easily removable oxide layer of Sio _ 2, The material removal rate is up to 17.2 mg / h, and the surface roughness is the lowest up to Ra2.5 nm.Compared with FeFeFe2O3 solid phase catalyst, Feal _ 3O _ 2O _ 4 is more suitable for chemical and mechanical polishing of sic. The concentration and stability of Fe~(2 ion in polishing solution are as follows:. An important factor that determines the rate and stability of the Fenton reaction, The difference in the ability of solid phase catalyst to ionize free Fe~(2 directly affects the concentration of Fe~(2 in the chemical polishing solution. The stronger the ability of solid phase catalyst to ionize Fe~(2), the higher the concentration of Fe~(2 in the polishing solution, and the faster the Fenton reaction rate is. The faster the chemical reaction with sic, the higher the material removal rate and the better the polishing quality.
【作者單位】： 廣東工業(yè)大學(xué)機電工程學(xué)院;
【基金】：國家自然科學(xué)基金(51375097) 廣東省自然科學(xué)基金重點(2015A030311044) 高等學(xué)校博士學(xué)科點專項科研基金(20134420110001)資助項目
【分類號】：O643.36;TQ163.4

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