本文關鍵詞： 薄膜 硅酸鋯 非水解溶膠-凝膠法 表面活性劑　出處：《中國陶瓷》2017年02期 　論文類型：期刊論文

【摘要】：采用非水解溶膠-凝膠法制備了硅酸鋯薄膜,通過添加表面活性劑四丁基溴化銨(TBAB)提高了膜基結合力,獲得了致密的硅酸鋯薄膜。通過X射線衍射(XRD)分析了樣品的晶體結構,采用場發(fā)射掃描電子顯微鏡(FESEM)對樣品的形貌進行了表征。實驗結果表明,603℃時硅酸鋯相開始生成,850℃保溫0.5 h可以獲得純相的致密硅酸鋯薄膜。此外,添加TBAB不會影響非水解溶膠-凝膠過程中的異質(zhì)聚合反應,同時還能將鍍膜次數(shù)由2次增加至3次。使用該法制備的薄膜表面光滑致密,能夠抵抗強堿液對硅基底的腐蝕。
[Abstract]:Zirconium silicate thin films were prepared by non-hydrolytic sol-gel method. By adding surfactant tetra#china_person0# ammonium bromide (TBA), a compact zirconium silicate thin film was obtained by increasing the adhesion of the film substrate. The crystal structure of the sample was analyzed by X-ray diffraction (XRD). The morphology of the samples was characterized by field emission scanning electron microscopy (FESEM). The experimental results show that the zirconium silicate phase can be formed at 603 鈩，

本文編號：1504093