本文關(guān)鍵詞： 含氧混合氣體 臭氧 射流放電 直流增強(qiáng)　出處：《大連理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：等離子體射流放電技術(shù)具有廣闊應(yīng)用空間,已經(jīng)受到越來(lái)越多的關(guān)注。其優(yōu)勢(shì)在于可以將放電等離子體產(chǎn)生的化學(xué)活性成分“吹出”放電區(qū)域,可以解決處理工件大小受放電電極間隙限制的工藝瓶頸,同時(shí)放電區(qū)與作用區(qū)的分離可以減弱工件特性對(duì)放電穩(wěn)定性的影響。射流放電技術(shù)被廣泛應(yīng)用在醫(yī)療、環(huán)境等眾多領(lǐng)域。在這些應(yīng)用場(chǎng)合中不僅要求放電穩(wěn)定,而且需要產(chǎn)生多種化學(xué)活性成分滿足不同應(yīng)用需要。含氧氣體中的射流放電是產(chǎn)生活性氧物種的常用方案,但是放電在產(chǎn)生諸多氧物種的同時(shí)也會(huì)不可避免地產(chǎn)生臭氧,而臭氧對(duì)于有些應(yīng)用場(chǎng)合是不利的,例如：醫(yī)療領(lǐng)域。本文研究等離子體射流放電的臭氧產(chǎn)生過(guò)程,探索含氧混合氣體中臭氧產(chǎn)生行為的規(guī)律性。分別以Ar、He為載氣,通入一定比例的O2,構(gòu)成含氧混合氣體。利用三電極放電電極結(jié)構(gòu),施加千赫茲的交流電壓,探究含氧混合氣體中產(chǎn)生臭氧的行為。通過(guò)測(cè)量放電電壓電流數(shù)據(jù)和放電照片,分離出放電傳導(dǎo)電流,進(jìn)行電學(xué)診斷。研究了電流脈沖峰值,電流脈沖寬度、電流脈沖個(gè)數(shù)、電流脈沖峰值位置相對(duì)電壓峰值的超前量隨放電參量的變化規(guī)律。探討了多個(gè)參量如氣體種類、電壓峰值、電源頻率、放電氣壓、氧氣含量、放電功率,電極間隙對(duì)臭氧濃度的影響和相關(guān)規(guī)律,結(jié)合機(jī)理分析,證實(shí)了射流放電中臭氧產(chǎn)生和分解的一些動(dòng)力學(xué)行為。結(jié)果表明,射流放電中臭氧的形成是一個(gè)動(dòng)態(tài)過(guò)程,其合成和分解是同時(shí)發(fā)生,放電氣體中臭氧濃度是兩種動(dòng)力學(xué)過(guò)程平衡的結(jié)果,放電參量對(duì)于臭氧形成都具有雙向作用,因此存在峰值條件。為了提高射流放電強(qiáng)度,對(duì)放電結(jié)構(gòu)進(jìn)行了改造,實(shí)現(xiàn)了直流增強(qiáng)型射流放電。放電方案是：將直流增強(qiáng)電壓加在中間驅(qū)動(dòng)電極上,在環(huán)形懸浮電極上施加交流驅(qū)動(dòng)電壓,接地電極保持。研究了在此放電結(jié)構(gòu)下,Ar/O2、He/O2混合氣體中臭氧濃度隨直流正偏壓、直流負(fù)偏壓及施加直流偏壓位置的變化,結(jié)果表明：施加直流電壓之后,射流放電體積和放電功率都有增強(qiáng),達(dá)到了增強(qiáng)放電電子密度的目標(biāo)。與此同時(shí),臭氧的濃度可以維持幾乎不升高。
[Abstract]:Plasma jet discharge technology has attracted more and more attention due to its wide application space, and its advantage is that it can "blow out" the chemical active components produced by discharge plasma. It can solve the process bottleneck which the size of the workpiece is limited by the gap of the discharge electrode, and the separation of the discharge zone and the action zone can weaken the influence of the characteristics of the workpiece on the discharge stability. The jet discharge technology has been widely used in medical treatment. Environment and many other fields. In these applications, not only discharge stability is required, but also a variety of chemical active components should be produced to meet different application needs. Jet discharge in oxygen-containing gases is a common method for producing reactive oxygen species. However, the discharge will inevitably produce ozone while producing many oxygen species, and ozone is unfavorable to some applications, for example, in the medical field. This paper studies the ozone generation process of plasma jet discharge. To explore the regularity of ozone production behavior in oxygen-containing mixed gases, the mixture of oxygen was formed by using Arhe as carrier gas and O _ 2 as carrier gas respectively. The three-electrode discharge electrode structure was used to apply the AC voltage of KHz. By measuring discharge voltage and current data and discharge photos, the discharge conduction current is separated for electrical diagnosis. The peak value of current pulse, current pulse width, number of current pulses are studied. The variation rule of the peak position of current pulse relative to the peak voltage with discharge parameters is discussed. Several parameters, such as gas type, voltage peak, power supply frequency, discharge pressure, oxygen content, discharge power, are discussed. The effect of electrode gap on ozone concentration and its correlation law, combined with mechanism analysis, confirmed some dynamic behaviors of ozone generation and decomposition in jet discharge. The results show that the formation of ozone in jet discharge is a dynamic process. The concentration of ozone in the discharge gas is the result of the equilibrium of two dynamic processes. The discharge parameters have bidirectional effect on the formation of ozone, so there is a peak value condition in order to increase the discharge intensity of the jet. The discharge structure is modified to realize the DC enhanced jet discharge. The discharge scheme is that DC enhanced voltage is added to the intermediate drive electrode and AC drive voltage is applied to the annular suspension electrode. The change of ozone concentration in the mixed gas of ar / O _ 2 and he / O _ 2 with positive DC bias, negative DC bias and the position of DC bias applied under this discharge structure is studied. The results show that when DC voltage is applied, Both the discharge volume and the discharge power of the jet have been enhanced to achieve the goal of enhancing the electron density of the discharge. At the same time, the concentration of ozone can be kept almost unchanged.
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ123.2

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本文編號(hào)：1501535