【摘要】：針對現(xiàn)有的藍(lán)寶石單晶生長冷卻水系統(tǒng)的水溫控制精度不高、波動范圍大和不穩(wěn)定的問題,經(jīng)過分析水溫變化的滯后特性和爐內(nèi)溫度的變化,提出一套通過比例水閥連續(xù)調(diào)節(jié)由制冷變頻機(jī)組和中間換熱設(shè)備雙回路混合后冷卻水的溫度控制方法。在Matlab/Simulink仿真環(huán)境中,仿真結(jié)果表明,參數(shù)自整定模糊PID控制器與常規(guī)PID相比具有不依賴系統(tǒng)模型、響應(yīng)快、控制精度高的優(yōu)點,且易于PLC控制器實現(xiàn),使得水溫有效的控制在(25±1)℃,適用于藍(lán)寶石單晶生長冷卻水系統(tǒng)的水溫控制。
[Abstract]:Aiming at the problems of low control precision, large fluctuation range and unstable water temperature in the existing cooling water system of single crystal sapphire growth, the hysteresis characteristic of water temperature change and the variation of temperature in furnace are analyzed. This paper presents a method for controlling the temperature of cooling water continuously adjusted by proportional water valve after cooling water is mixed by refrigerating variable frequency unit and intermediate heat exchanger. In the Matlab/Simulink simulation environment, the simulation results show that the parameter self-tuning fuzzy PID controller has the advantages of independent system model, fast response, high control precision, and is easy to be implemented by PLC controller. The water temperature is effectively controlled at (25 鹵1) 鈩，

本文編號：2414761