【摘要】：當(dāng)前環(huán)境污染日趨嚴(yán)重,有機(jī)氣體檢測成為氣體檢測領(lǐng)域不可或缺的一部分。與此同時,隨著微電子技術(shù)和微納制造工藝及其理論的不斷完善,氣體傳感器逐漸向一體化、智能化、圖像化及微型化、低能耗和高靈敏度高選擇性的方向發(fā)展,氣敏傳感器也逐漸以具有氣敏特性的微納結(jié)構(gòu)氣敏元件為核心部件。本學(xué)位論文針對有機(jī)氣體,通過理論、實驗和仿真相結(jié)合,研究蝶翅微納結(jié)構(gòu)的光學(xué)氣敏特性和Zn O納米線結(jié)構(gòu)的電學(xué)氣敏特性,主要研究工作包括:針對Morpho蝶翅鱗片微納結(jié)構(gòu),搭建了光學(xué)實驗平臺,檢測蝶翅樣本在甲醇、乙醇飽和蒸汽和氮?dú)庵械墓鈱W(xué)反射譜,結(jié)合主成分分析方法,對光譜數(shù)據(jù)進(jìn)行降維處理,實現(xiàn)了三種氣體的檢測和識別;研究了蝶翅結(jié)構(gòu)氣敏機(jī)理,提出蝶翅結(jié)構(gòu)在有機(jī)氣體中會在表面形成一層納米液膜,導(dǎo)致結(jié)構(gòu)的光學(xué)特性發(fā)生變化;采用Rsoft軟件DiffractMOD模塊對該蝶翅結(jié)構(gòu)進(jìn)行建模和仿真,研究了蒸氣濃度變化對結(jié)構(gòu)反射譜的影響。進(jìn)一步,以蝶翅生物樣本為模板,結(jié)合磁控濺射薄膜制備技術(shù)與燒結(jié)成型方法,制備出與原蝶翅結(jié)構(gòu)和光學(xué)特性相似的蝶翅遺態(tài)結(jié)構(gòu)。研究了ZnO半導(dǎo)體對還原性氣體的氣敏機(jī)理,結(jié)合Zn O納米線生長和微納結(jié)構(gòu)制備工藝,制備出叉指型和對尖型兩種氣敏微納結(jié)構(gòu),并進(jìn)行了Au顆粒修飾,探索了修飾前后結(jié)構(gòu)氣敏特性的變化。研究了350℃最佳測試溫度下500ppm到10ppm不同濃度乙醇?xì)怏w的電流-時間變化曲線,發(fā)現(xiàn)Au顆粒修飾對響應(yīng)時間有所改善的,同時得到有無Au顆粒修飾的叉指型和對尖型氣敏元件的濃度-靈敏度曲線,Au顆粒修飾強(qiáng)化了元件對乙醇?xì)怏w的靈敏度,而叉指型氣敏元件氣敏特性優(yōu)于對尖型氣敏元件。上述研究工作對于進(jìn)一步深入研究有機(jī)氣體檢測技術(shù)具有良好的指導(dǎo)作用。
[Abstract]:At present, the environmental pollution is becoming more and more serious, and organic gas detection has become an indispensable part in the field of gas detection. At the same time, with the continuous improvement of microelectronics technology, micro-nano manufacturing process and its theory, gas sensors are gradually developing in the direction of integration, intelligence, visualization and miniaturization, low energy consumption and high sensitivity and high selectivity. Gas sensors also gradually take micro-nano structure gas sensors with gas sensing characteristics as the core components. In this thesis, the optical gas sensing properties of butterfly wing micro-nano structure and the electrical gas sensing characteristics of Zn O nanowire structure are studied through the combination of theory, experiment and simulation. The main research work includes: aiming at the micro-nano structure of Morpho butterfly wing scale, an optical experimental platform has been set up to detect the optical reflection spectrum of butterfly wing samples in methanol, ethanol saturated steam and nitrogen, combined with principal component analysis method. The dimension reduction of spectral data is carried out, and the detection and identification of three kinds of gases are realized. The gas sensing mechanism of butterfly wing structure is studied, and it is proposed that the butterfly wing structure will form a layer of nanometer liquid film on the surface of organic gas, which will lead to the change of optical properties of the structure. Rsoft software DiffractMOD module is used to model and simulate the butterfly wing structure, and the effect of vapor concentration change on the reflection spectrum of the structure is studied. Furthermore, using butterfly wing biological sample as template, combined with magnetron sputter thin film preparation technology and sintering method, the residual structure of butterfly wing was prepared, which was similar to the original butterfly wing structure and optical properties. The gas sensing mechanism of ZnO semiconductor to reductive gas was studied. combined with the growth of ZnO nanowires and the preparation process of micro-nano structure, two kinds of gas sensing micro-nano structures, fork finger type and pair tip type, were prepared. Au particles were modified, and the changes of gas sensing properties of the structure before and after modification were explored. The current-time variation curves of different concentrations of ethanol gas from 500ppm to 10ppm at 350 鈩，

本文編號：2509297