室溫合成非晶CdO納米片陣列及其氣敏性能研究
發(fā)布時間:2018-03-06 04:14
本文選題:氣敏 切入點:室溫制備 出處:《天津大學(xué)》2016年碩士論文 論文類型:學(xué)位論文
【摘要】:隨著現(xiàn)代社會工業(yè)化的高速發(fā)展,生活中可以接觸到的危險氣體逐漸增多,這些氣體一旦外泄,會對人們的生命財產(chǎn)安全帶來不可估量的損失。因此,研發(fā)性能優(yōu)異的氣敏傳感器以實現(xiàn)對危險氣體快速準(zhǔn)確的監(jiān)控是十分有必要的。本文通過室溫化學(xué)浴沉積法在FTO和叉指電極表面一步法制備了非晶結(jié)構(gòu)的CdO納米片陣列,通過SEM、XPS、EELS、FTIR等表征方法和氣敏性能的測試,探討了非晶CdO納米片陣列作為氣敏材料在探測乙醚氣體上的獨特優(yōu)勢。之后探索了合適的熱處理方式,制備了高比表面積的多晶CdO納米片陣列,探討了三維CdO結(jié)構(gòu)的優(yōu)勢。主要取得以下結(jié)果:本文成功地用室溫化學(xué)浴沉積的方法原位制備了非晶CdO納米片陣列,該方法成本低過程簡便,室溫制備有利于擴大基底的選擇范圍,原位生長使基底和材料接觸更牢固。非晶材料表面大量的缺陷會成為吸附O2的活性位點,當(dāng)器件與目標(biāo)氣體接觸時,會有充足的氧離子與其反應(yīng),提高了器件的靈敏度,使得本身電阻很高的材料對于乙醚有了穩(wěn)定的響應(yīng)。室溫制備使得材料表面附著大量的含氧官能團,由于分子間作用力會對乙醚產(chǎn)生選擇性吸附,提高了材料對于乙醚的選擇性。另外,由于片陣列結(jié)構(gòu),有利于氣體在材料內(nèi)部的擴散,大大提高了器件對于乙醚的響應(yīng)時間,對50ppm的乙醚的響應(yīng)時間為4.5s,為目前報道過的最短響應(yīng)時間。將非晶CdO材料先選用CdCl_2的飽和甲醇溶液浸泡,之后在空氣中350℃退火1小時,得到了很好的保持了陣列形貌的結(jié)晶性CdO材料。器件對于200ppm異丙醇的靈敏度達到了90,而對于乙醇為35。
[Abstract]:With the rapid development of industrialization in modern society, the number of dangerous gases in daily life is increasing gradually. Once these gases are released out, they will bring incalculable losses to the safety of people's lives and property. It is necessary to develop a gas sensor with excellent performance for the rapid and accurate monitoring of dangerous gases. In this paper, amorphous CdO nanoarrays were fabricated on the surface of FTO and interDigital electrodes by room temperature chemical bath deposition. The unique advantage of amorphous CdO nanoscale array as gas sensing material in detecting ether gas was discussed by means of the characterization method and gas sensing performance test of SEM-XPSX EELSX FTIR, and the suitable heat treatment method was explored. Polycrystalline CdO nanoarrays with high specific surface area were prepared, and the advantages of three-dimensional CdO structures were discussed. The main results were as follows: amorphous CdO nanoarrays were successfully prepared in situ by chemical bath deposition at room temperature. This method has the advantages of low cost and simple process, the preparation at room temperature is beneficial to expand the selective range of substrate, and in situ growth makes the contact between substrate and material stronger. A large number of defects on the surface of amorphous materials will become the active sites for the adsorption of O2. When the device is in contact with the target gas, there will be sufficient oxygen ions to react with it, which improves the sensitivity of the device. The materials with high resistance have a stable response to ether. The preparation at room temperature results in a large number of oxygen-containing functional groups attached to the surface of the material, which is selectively adsorbed by the intermolecular force on the ether. The selectivity of the material to ether is improved. In addition, because of the structure of the chip array, it is advantageous to the diffusion of gas inside the material and greatly increases the response time of the device to the ether. The response time for 50 ppm ether is 4.5 s, which is the shortest reported response time. The amorphous CdO material is first soaked in saturated methanol solution of CdCl_2, then annealed in air at 350 鈩,
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