【摘要】：非接觸、高精度、無(wú)導(dǎo)軌的絕對(duì)距離測(cè)量技術(shù)在計(jì)量科學(xué)領(lǐng)域與工業(yè)應(yīng)用領(lǐng)域有著重要的理論價(jià)值和實(shí)用意義，因此基于激光頻率掃描干涉的絕對(duì)距離測(cè)量技術(shù)受到廣泛研究。由于現(xiàn)有的基于該原理的測(cè)距系統(tǒng)大多采用連續(xù)來(lái)回掃描的調(diào)諧激光器作為光源，應(yīng)用透鏡系統(tǒng)搭建干涉光路，并且實(shí)現(xiàn)高精度測(cè)量時(shí)需要附加波長(zhǎng)定位器，因此這種測(cè)量系統(tǒng)存在著體積大、光路對(duì)準(zhǔn)要求高、被測(cè)目標(biāo)需要安裝反射鏡等缺點(diǎn)。 本論文針對(duì)這些問(wèn)題，在分析了基于頻率掃描干涉絕對(duì)距離測(cè)量技術(shù)的原理和數(shù)據(jù)處理方法的基礎(chǔ)上，設(shè)計(jì)了采用數(shù)字調(diào)諧激光器的光纖光學(xué)相干測(cè)距儀。論文研究的測(cè)距儀由數(shù)字調(diào)諧激光器、光纖干涉光路、信號(hào)采集電路以及PC機(jī)組成。采用數(shù)字調(diào)諧激光器作為掃描光源，所輸出激光的頻率可以設(shè)定且定位十分精準(zhǔn)，因此無(wú)需另設(shè)波長(zhǎng)定位器就可以實(shí)現(xiàn)高精度測(cè)量。選用單模光纖及相關(guān)光纖器件搭建干涉光路，并設(shè)計(jì)了帶有參考反射面的集成光纖相干傳感器作為測(cè)量探頭，根據(jù)光纖纖芯的空間濾波特性和光的漫反射特性實(shí)現(xiàn)了對(duì)非光學(xué)表面的直接測(cè)量，并降低了測(cè)量光路的對(duì)準(zhǔn)要求。信號(hào)采集電路包括ARM控制板和八路采集板，，其中八路采集板實(shí)現(xiàn)8通道干涉信號(hào)的光電轉(zhuǎn)換和AD采集；ARM控制板以STM32為主控芯片，實(shí)現(xiàn)對(duì)數(shù)字調(diào)諧激光器的控制，并將AD采集的干涉信號(hào)數(shù)據(jù)通過(guò)以太網(wǎng)轉(zhuǎn)發(fā)給PC機(jī)。PC機(jī)上通過(guò)LabVIEW編程實(shí)現(xiàn)干涉信號(hào)的分析與距離值的計(jì)算。 對(duì)所制作的光纖光學(xué)相干測(cè)距儀樣機(jī)進(jìn)行了測(cè)試。實(shí)驗(yàn)表明該測(cè)距儀的量程達(dá)到30mm，測(cè)量的重復(fù)偏差值小于0.002%，可以對(duì)金屬、塑料等非光學(xué)表面進(jìn)行直接測(cè)量，且允許測(cè)量光路存在一定的角度偏差。同時(shí)測(cè)距儀擁有體積小、集成度高、可多通道遠(yuǎn)距離測(cè)量等優(yōu)點(diǎn)，在工業(yè)自動(dòng)生產(chǎn)中有著很好的應(yīng)用前景。
文內(nèi)圖片：
圖片說(shuō)明：圖1.1雙波長(zhǎng)干涉測(cè)距原理圖
[Abstract]:The absolute distance measurement of non-contact, high-precision and non-guide rail has important theoretical and practical significance in the field of measurement science and the field of industrial application, so the absolute distance measurement technology based on laser frequency scanning interference is widely studied. Because the existing ranging system based on the principle is used as a light source for most of the ranging systems which are continuously and back-and-forth, an interference light path is built by using a lens system, and an additional wavelength positioner is required to realize high-precision measurement, so that the measurement system has a large volume, The light path alignment requirement is high, and the target to be tested needs to be provided with a reflector and the like. In this paper, based on the analysis of the principle of the absolute distance measurement based on the frequency sweep and the data processing method, the optical coherence distance measurement of the optical fiber with the digital tuning laser is designed based on the analysis of the principle of the absolute distance measurement based on the frequency scanning and the data processing method. The range finder is composed of a digital tuning laser, an optical fiber interference light path, a signal acquisition circuit and a PC unit. by adopting a digital tuning laser as a scanning light source, the frequency of the output laser can be set and the positioning is very precise, In this paper, a single-mode optical fiber and a related optical fiber device are used to set up the interference light path, and an integrated optical fiber coherence sensor with a reference reflection surface is designed as the measuring probe, and the direct measurement of the non-optical surface is realized according to the spatial filtering characteristic of the optical fiber core and the diffuse reflection characteristic of the light. the amount and the alignment of the measurement light path are reduced to The signal acquisition circuit comprises an ARM control board and an eight-way acquisition board, wherein the eight-way acquisition board is used for realizing the photoelectric conversion and the AD acquisition of the 8-channel interference signal; and the ARM control board takes the STM32 as the main control chip to realize the control of the digital tuning laser And the interference signal data acquired by the AD is forwarded to the PC through the Ethernet. Machine. The analysis of the interference signal and the meter of the distance value are realized by the LabVIEW programming on the PC. calculating the produced optical fiber optical coherence range finder The test shows that the range of the range finder is 30 mm and the measured repeat deviation is less than 0.002%. The non-optical surface such as metal, plastic and other non-optical surfaces can be measured directly, and a certain angle is allowed to be measured in the optical path. The range finder has the advantages of small volume, high integration level, multi-channel long-distance measurement and the like,
【學(xué)位授予單位】：浙江理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TN247

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