【摘要】：基于激光熱裂紋控制法,提出了多焦點(diǎn)激光分離厚透明材料的方法。通過理論計(jì)算與ZEMAX軟件模擬相結(jié)合的方式,設(shè)計(jì)了能形成三個(gè)焦點(diǎn)的光路系統(tǒng),并利用該系統(tǒng)進(jìn)行了夾層玻璃、磷酸二氫鉀(KDP)晶體、超白玻璃等透明材料的切割分離實(shí)驗(yàn)。結(jié)果表明,利用該方法得到的表面平整光滑,無亞表面損傷,粗糙度小,有效解決了單個(gè)激光焦點(diǎn)熱裂紋分離方法受材料厚度限制的問題,該方法具有很大的應(yīng)用前景。
[Abstract]:Based on the laser thermal crack control method, a multi-focus laser separation method for thick transparent materials is proposed. Through the combination of theoretical calculation and ZEMAX simulation, a three-focus optical system was designed, and the experiments of cutting and separating transparent materials such as laminated glass, potassium dihydrogen phosphate (KDP) crystal and ultra-white glass were carried out by using the system. The results show that the proposed method has the advantages of smooth surface, no sub-surface damage and small roughness, which effectively solves the problem that the thermal crack separation method with single laser focus is limited by the thickness of the material, and this method has a great application prospect.
【作者單位】： 華中科技大學(xué)武漢光電國(guó)家實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金(51675205,51475182)
【分類號(hào)】：TN249

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