【摘要】：晶圓測試是半導(dǎo)體制造的一道重要工序,而探針臺是晶圓測試的核心裝備,其研究與開發(fā)受到越來越多的重視,其中探針臺Z向距離測量是保證晶圓與探針正確對針的前提。本文結(jié)合某公司項(xiàng)目開展了基于自動(dòng)聚焦技術(shù)的探針臺Z向距離測量系統(tǒng)的研究,完成了探針臺Z向距離測量系統(tǒng)的總體設(shè)計(jì)并對其關(guān)鍵技術(shù)進(jìn)行了研發(fā)。全文主要內(nèi)容包括:第一章:分析了探針臺的研究現(xiàn)狀,總結(jié)了探針臺自動(dòng)聚焦技術(shù)及Z向距離測量技術(shù)的發(fā)展?fàn)顩r,給出了本文研究內(nèi)容。第二章:分析了基于自動(dòng)聚焦技術(shù)的探針臺Z向距離測量原理,給出了基于自動(dòng)聚焦技術(shù)的探針臺Z向距離測量系統(tǒng)的總體方案,并對系統(tǒng)的視覺模塊、光學(xué)模塊、運(yùn)動(dòng)控制模塊等關(guān)鍵模塊進(jìn)行了詳細(xì)設(shè)計(jì)。第三章:探討了自動(dòng)聚焦清晰度評價(jià)準(zhǔn)則,對比分析了時(shí)域法、頻域法、熵函數(shù)法三大類圖像清晰度評價(jià)算法,在此基礎(chǔ)上提出了改進(jìn)的四方向模板Sobel算法,該算法具有較高的靈敏度和計(jì)算效率,可以達(dá)到快速精準(zhǔn)聚焦的目的。第四章:研究了融合窗口選擇與極值點(diǎn)搜索的自動(dòng)聚焦加速算法,首先基于圖像的灰度直方圖特性,有效分離了背景與特征信息,實(shí)現(xiàn)像素特征窗口的選擇;接著對極值點(diǎn)搜索算法中的爬山算法進(jìn)行改進(jìn),采用自適應(yīng)變步長的搜索方式,之后對峰值附近的6點(diǎn)做曲線擬合,選取曲線中最大的值即為準(zhǔn)焦位置處。第五章:開發(fā)了基于自動(dòng)聚焦技術(shù)的探針臺Z向距離測量原型系統(tǒng),從系統(tǒng)實(shí)現(xiàn)層面出發(fā),通過主動(dòng)視覺標(biāo)定建立了圖像像素坐標(biāo)與三維空間坐標(biāo)的聯(lián)系。利用晶圓樣片,對探針臺Z向距離測量系統(tǒng)進(jìn)行30次重復(fù)實(shí)驗(yàn),驗(yàn)證了該系統(tǒng)的高精度及穩(wěn)定性。第六章:總結(jié)了全文的主要工作和研究內(nèi)容;對論文的下一步研究工作進(jìn)行了展望。
[Abstract]:Wafer testing is an important process in semiconductor manufacturing, and probe table is the core equipment of wafer testing. More and more attention has been paid to its research and development. The Z direction distance measurement is the prerequisite to ensure the correct alignment between wafer and probe. In this paper, the research of Z direction distance measurement system of probe station based on automatic focusing technology is carried out, the overall design of Z direction distance measurement system of probe station is completed and the key technology is researched and developed. The main contents of this paper are as follows: chapter 1: the research status of the probe platform is analyzed, the development of the automatic focusing technology and the Z direction distance measurement technology are summarized, and the research content of this paper is given. Chapter 2: the principle of Z direction distance measurement of probe station based on auto focusing technology is analyzed, and the overall scheme of Z direction distance measurement system based on auto focusing technology is given. The vision module and optical module of the system are also given. The key modules such as motion control module are designed in detail. In chapter 3, we discuss the criterion of automatic focus definition evaluation, and compare and analyze three kinds of image definition evaluation algorithms, such as time domain method, frequency domain method and entropy function method. On this basis, an improved four-direction template Sobel algorithm is proposed. The algorithm has high sensitivity and computational efficiency, and can achieve the purpose of fast and accurate focusing. Chapter 4: the automatic focusing acceleration algorithm of fusion window selection and extremum search is studied. Firstly, based on the gray histogram characteristics of image, the background and feature information are effectively separated to realize the selection of pixel feature window. Then we improve the mountain climbing algorithm in the extreme point search algorithm, adopt the adaptive variable step size search method, and then do the curve fitting for the 6 points near the peak value, and select the largest value in the curve, that is, the quasi-focal position. Chapter 5: the prototype system of Z direction distance measurement of probe station based on automatic focusing technology is developed. From the level of system realization, the connection between pixel coordinate and 3D coordinate is established through active visual calibration. The high precision and stability of the system are verified by 30 repeated experiments on the Z direction distance measurement system of the probe station using wafer samples. Chapter 6: summarizes the main work and research contents of the thesis, and looks forward to the next research work of the thesis.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN305;TP391.41

【參考文獻(xiàn)】

相關(guān)期刊論文 前10條

1 王龍興;;2015年中國集成電路晶圓制造產(chǎn)業(yè)現(xiàn)狀分析[J];集成電路應(yīng)用;2016年11期

2 王龍興;;2015年全球集成電路技術(shù)發(fā)展和主要產(chǎn)品分析[J];集成電路應(yīng)用;2016年07期

3 羅仲偉;;“十三五”電子信息產(chǎn)業(yè)發(fā)展態(tài)勢與路徑[J];全球化;2016年03期

4 葉甜春;;“十三五”期間中國集成電路制造產(chǎn)業(yè)鏈發(fā)展的思考[J];集成電路應(yīng)用;2016年01期

5 馮雁;梁光明;朱旭東;;融合灰度直方圖分布的自動(dòng)聚焦改進(jìn)算法[J];現(xiàn)代電子技術(shù);2015年06期

6 張曉娟;王曉慧;;一種改進(jìn)的自動(dòng)聚焦搜索算法及實(shí)現(xiàn)[J];現(xiàn)代工業(yè)經(jīng)濟(jì)和信息化;2014年17期

7 黃厚田;王德江;沈宏海;高玉軍;;航空成像系統(tǒng)檢調(diào)焦技術(shù)分析與展望[J];中國光學(xué);2014年04期

8 陳芳;張存繼;韓延祥;史金飛;;簡單圖像的快速聚焦[J];光學(xué)精密工程;2014年01期

9 張艷超;孫強(qiáng);趙建;;對數(shù)功率譜離焦深度法在多光譜成像儀的應(yīng)用[J];光學(xué)精密工程;2013年03期

10 尤玉虎;劉通;劉佳文;;基于圖像處理的自動(dòng)對焦技術(shù)綜述[J];激光與紅外;2013年02期

，

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