【摘要】：晶圓測(cè)試是半導(dǎo)體制造的一道重要工序,而探針臺(tái)是晶圓測(cè)試的核心裝備,其研究與開發(fā)受到越來(lái)越多的重視,其中探針臺(tái)Z向距離測(cè)量是保證晶圓與探針正確對(duì)針的前提。本文結(jié)合某公司項(xiàng)目開展了基于自動(dòng)聚焦技術(shù)的探針臺(tái)Z向距離測(cè)量系統(tǒng)的研究,完成了探針臺(tái)Z向距離測(cè)量系統(tǒng)的總體設(shè)計(jì)并對(duì)其關(guān)鍵技術(shù)進(jìn)行了研發(fā)。全文主要內(nèi)容包括:第一章:分析了探針臺(tái)的研究現(xiàn)狀,總結(jié)了探針臺(tái)自動(dòng)聚焦技術(shù)及Z向距離測(cè)量技術(shù)的發(fā)展?fàn)顩r,給出了本文研究?jī)?nèi)容。第二章:分析了基于自動(dòng)聚焦技術(shù)的探針臺(tái)Z向距離測(cè)量原理,給出了基于自動(dòng)聚焦技術(shù)的探針臺(tái)Z向距離測(cè)量系統(tǒng)的總體方案,并對(duì)系統(tǒng)的視覺(jué)模塊、光學(xué)模塊、運(yùn)動(dòng)控制模塊等關(guān)鍵模塊進(jìn)行了詳細(xì)設(shè)計(jì)。第三章:探討了自動(dòng)聚焦清晰度評(píng)價(jià)準(zhǔn)則,對(duì)比分析了時(shí)域法、頻域法、熵函數(shù)法三大類圖像清晰度評(píng)價(jià)算法,在此基礎(chǔ)上提出了改進(jìn)的四方向模板Sobel算法,該算法具有較高的靈敏度和計(jì)算效率,可以達(dá)到快速精準(zhǔn)聚焦的目的。第四章:研究了融合窗口選擇與極值點(diǎn)搜索的自動(dòng)聚焦加速算法,首先基于圖像的灰度直方圖特性,有效分離了背景與特征信息,實(shí)現(xiàn)像素特征窗口的選擇;接著對(duì)極值點(diǎn)搜索算法中的爬山算法進(jìn)行改進(jìn),采用自適應(yīng)變步長(zhǎng)的搜索方式,之后對(duì)峰值附近的6點(diǎn)做曲線擬合,選取曲線中最大的值即為準(zhǔn)焦位置處。第五章:開發(fā)了基于自動(dòng)聚焦技術(shù)的探針臺(tái)Z向距離測(cè)量原型系統(tǒng),從系統(tǒng)實(shí)現(xiàn)層面出發(fā),通過(guò)主動(dòng)視覺(jué)標(biāo)定建立了圖像像素坐標(biāo)與三維空間坐標(biāo)的聯(lián)系。利用晶圓樣片,對(duì)探針臺(tái)Z向距離測(cè)量系統(tǒng)進(jìn)行30次重復(fù)實(shí)驗(yàn),驗(yàn)證了該系統(tǒng)的高精度及穩(wěn)定性。第六章:總結(jié)了全文的主要工作和研究?jī)?nèi)容;對(duì)論文的下一步研究工作進(jìn)行了展望。
[Abstract]:Wafer testing is an important process in semiconductor manufacturing, and probe table is the core equipment of wafer testing. More and more attention has been paid to its research and development. The Z direction distance measurement is the prerequisite to ensure the correct alignment between wafer and probe. In this paper, the research of Z direction distance measurement system of probe station based on automatic focusing technology is carried out, the overall design of Z direction distance measurement system of probe station is completed and the key technology is researched and developed. The main contents of this paper are as follows: chapter 1: the research status of the probe platform is analyzed, the development of the automatic focusing technology and the Z direction distance measurement technology are summarized, and the research content of this paper is given. Chapter 2: the principle of Z direction distance measurement of probe station based on auto focusing technology is analyzed, and the overall scheme of Z direction distance measurement system based on auto focusing technology is given. The vision module and optical module of the system are also given. The key modules such as motion control module are designed in detail. In chapter 3, we discuss the criterion of automatic focus definition evaluation, and compare and analyze three kinds of image definition evaluation algorithms, such as time domain method, frequency domain method and entropy function method. On this basis, an improved four-direction template Sobel algorithm is proposed. The algorithm has high sensitivity and computational efficiency, and can achieve the purpose of fast and accurate focusing. Chapter 4: the automatic focusing acceleration algorithm of fusion window selection and extremum search is studied. Firstly, based on the gray histogram characteristics of image, the background and feature information are effectively separated to realize the selection of pixel feature window. Then we improve the mountain climbing algorithm in the extreme point search algorithm, adopt the adaptive variable step size search method, and then do the curve fitting for the 6 points near the peak value, and select the largest value in the curve, that is, the quasi-focal position. Chapter 5: the prototype system of Z direction distance measurement of probe station based on automatic focusing technology is developed. From the level of system realization, the connection between pixel coordinate and 3D coordinate is established through active visual calibration. The high precision and stability of the system are verified by 30 repeated experiments on the Z direction distance measurement system of the probe station using wafer samples. Chapter 6: summarizes the main work and research contents of the thesis, and looks forward to the next research work of the thesis.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TN305;TP391.41

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