【摘要】：全固態(tài)紫外激光器有以下優(yōu)點(diǎn):結(jié)構(gòu)緊湊、工作穩(wěn)定、壽命長等,在眾多領(lǐng)域如軍用、工業(yè)制造及科學(xué)研究都有廣闊的應(yīng)用前景,特別在精密加工應(yīng)用。UV激光具有高光子能量,能夠使分子鍵迅速斷裂,不對物質(zhì)產(chǎn)生多余熱量,即“冷加工”,這種加工方法精度高、速度快,在電子、生物工程等領(lǐng)域應(yīng)用廣泛,其中355nm全固態(tài)紫外激光器是紫外光源中使用頻率最高的。全固態(tài)紫外激光器有端面泵浦和側(cè)面泵浦兩種常見結(jié)構(gòu),與側(cè)面泵浦相比,端面泵浦的轉(zhuǎn)換效率更高、輸出光束的質(zhì)量更好,多數(shù)商業(yè)化全固態(tài)紫外激光器采用此種結(jié)構(gòu),國內(nèi)華日等幾家公司都開發(fā)了激光二極管(LD)光纖耦合端面泵浦的商用355nm紫外激光器。側(cè)面泵浦雖然效率略低,但結(jié)構(gòu)緊湊,模塊標(biāo)準(zhǔn)化,成本低,易實(shí)現(xiàn)高功率輸出。本文充分利用側(cè)面泵浦激光器的功率優(yōu)勢,采用標(biāo)準(zhǔn)化細(xì)棒徑側(cè)面泵浦的耦合模塊,通過諧振腔模擬優(yōu)化基模振蕩光束與晶體棒直徑匹配實(shí)現(xiàn)激光器近基模輸出,并通過腔內(nèi)倍頻、和頻設(shè)計(jì)了結(jié)構(gòu)簡單,功率較高,成本低,光束質(zhì)量近基模的355nm紫外激光器,在紫外激光工程化應(yīng)用方面實(shí)現(xiàn)創(chuàng)新,大大促進(jìn)紫外激光器的發(fā)展,使其應(yīng)用前景更加廣闊。本文分析了LD側(cè)面泵浦全固態(tài)Nd:YAG紫外激光器的相關(guān)理論并研究了其相對應(yīng)的實(shí)驗(yàn)部分。應(yīng)用矩陣?yán)碚撃M了諧振腔內(nèi)振蕩光束的模式,控制晶體棒徑與激光器諧振腔優(yōu)化相結(jié)合控制光束質(zhì)量,采用腔內(nèi)倍頻和頻提高激光系統(tǒng)諧波轉(zhuǎn)化效率,分析并設(shè)計(jì)了溫度控制系統(tǒng);根據(jù)理論分析采用Nd:YAG標(biāo)準(zhǔn)化LD泵浦耦合模塊設(shè)計(jì)了激光實(shí)驗(yàn)系統(tǒng),分別進(jìn)行了基頻激光、倍頻激光和355nm紫外激光實(shí)驗(yàn)研究,分析了泵浦功率、Q開關(guān)頻率等相關(guān)參數(shù)與輸出激光之間的關(guān)系;在輸入電功率為280W,調(diào)制頻率為40k Hz時(shí),355nm紫外激光的最高輸出功率為10.58W,激光脈沖寬度為20ns,M2=1.3。理論及實(shí)驗(yàn)研究表明,近基模高功率355nm紫外激光的輸出可以通過側(cè)面泵浦腔內(nèi)倍頻、和頻來實(shí)現(xiàn),此種紫外激光器結(jié)構(gòu)簡單、成本低,對紫外激光的工程應(yīng)用發(fā)展具有重要意義。
[Abstract]:All-solid-state UV lasers have the following advantages: compact structure, stable operation, long life and so on. They have broad application prospects in many fields such as military, industrial manufacturing and scientific research. Especially in precision machining applications. UV laser has high photon energy, can make the molecular bond break quickly, do not produce excess heat to the matter, that is, "cold working", this kind of processing method has high precision, high speed, in electron, Bioengineering is widely used, among which 355nm all-solid-state UV laser is the most frequently used ultraviolet laser. There are two common structures of end-pumped and side-pumped all-solid-state UV lasers. Compared with side-pumped lasers, end-pumped lasers have higher conversion efficiency and better output beam quality. Most commercial all-solid-state UV lasers use this structure. Several domestic companies, such as Huari, have developed a commercial 355nm ultraviolet laser pumped by (LD) fiber coupling end-pumped laser diode. Although the side-pumping efficiency is a little low, the structure is compact, the module is standardized, the cost is low, and the high power output is easy to be realized. In this paper, we make full use of the power advantage of side-pumped laser, adopt the coupling module of standard fine rod diameter side-pumped, and optimize the matching between the fundamental mode oscillation beam and the crystal rod diameter through the resonator simulation to realize the near-base mode output of the laser. The 355nm UV laser with simple structure, high power, low cost and near-base mode beam quality is designed by intracavity frequency doubling. The invention in the engineering application of ultraviolet laser has greatly promoted the development of ultraviolet laser. Make its application foreground more broad. In this paper, the theory of LD side-pumped all-solid-state Nd:YAG ultraviolet laser is analyzed and its corresponding experimental part is studied. The mode of oscillating beam in resonator is simulated by matrix theory. The beam quality is controlled by combining the control of crystal rod diameter with the optimization of laser resonator, and the harmonic conversion efficiency of laser system is improved by intracavity frequency doubling and frequency summation. The temperature control system is analyzed and designed. Based on the theoretical analysis, the laser experimental system is designed using Nd:YAG standardized LD pump coupling module. The fundamental frequency laser, frequency-doubling laser and 355nm ultraviolet laser are studied respectively, and the pump power is analyzed. The relationship between Q switching frequency and output laser; When the input power is 280 W and the modulation frequency is 40 k Hz, the maximum output power and pulse width of the 355nm ultraviolet laser are 10.58 W and 1.3, respectively. Theoretical and experimental studies show that the output of near-base mode high power 355nm ultraviolet laser can be achieved by side-pumped intracavity frequency doubling and sum frequency. The structure of the ultraviolet laser is simple and the cost is low. It is of great significance to the development of engineering application of ultraviolet laser.
【學(xué)位授予單位】：湖北工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN248

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