【摘要】：激光自混合干涉是指激光器發(fā)出的光被外部物體反射或散射回來,其中一部分?jǐn)y帶了外部物體運(yùn)動(dòng)信息的光重新耦合進(jìn)激光腔內(nèi),與腔內(nèi)的光場(chǎng)相互作用,調(diào)制了激光輸出的功率和頻率的現(xiàn)象。由于該效應(yīng)輸出的光信號(hào)與傳統(tǒng)雙光束干涉信號(hào)類似,所以被稱為激光自混合干涉。激光自混合干涉用于測(cè)量時(shí),具有和傳統(tǒng)干涉儀一樣的相位靈敏度,但由于自混合干涉沒有參考光路,因此它結(jié)構(gòu)簡(jiǎn)單、緊湊、易于準(zhǔn)直。利用激光自混合干涉可以對(duì)位移、振動(dòng)、速度等進(jìn)行高精度測(cè)量,并且可以對(duì)低反射率物體進(jìn)行測(cè)量。 本論文研究了光纖激光自混合干涉效應(yīng)及其在位移及臺(tái)階測(cè)量中的應(yīng)用。設(shè)計(jì)了線型腔單波長(zhǎng)光纖激光器、環(huán)形腔單波長(zhǎng)光纖激光器,以及提出了一種新的具有獨(dú)立通道的雙波長(zhǎng)環(huán)形腔光纖激光器,實(shí)現(xiàn)了它們各自的自混合干涉。并分別利用單波長(zhǎng)自混合干涉和雙波長(zhǎng)自混合干涉對(duì)位移和臺(tái)階進(jìn)行了測(cè)量。利用單波長(zhǎng)自混合干涉對(duì)位移進(jìn)行測(cè)量時(shí),條紋為傾斜的類鋸齒波,傾斜方向?qū)?yīng)被測(cè)物體的運(yùn)動(dòng)方向,該系統(tǒng)量程可達(dá)6cm,實(shí)驗(yàn)用高精度電壓掃描臺(tái)做標(biāo)準(zhǔn)值,測(cè)量范圍為450μm時(shí),精度達(dá)到34.3m。利用雙波長(zhǎng)自混合干涉對(duì)臺(tái)階高度進(jìn)行測(cè)量,測(cè)量量程可達(dá)毫米量級(jí),并對(duì)可能影響測(cè)量精度的因素進(jìn)行了分析。
[Abstract]:Laser self-mixing interference means that the light emitted by the laser is reflected or scattered back by an external object. Some of the light which carries the information of the motion of the external object is recoupled into the laser cavity and interacts with the light field in the cavity. Modulation of laser output power and frequency phenomenon. Because the optical signal output by this effect is similar to that of the traditional two-beam interference signal, it is called laser self-mixing interference. Laser self-mixing interferometry has the same phase sensitivity as traditional interferometer, but it is simple, compact and easy to collimate because it has no reference optical path. The laser self-mixing interference can be used to measure displacement, vibration, velocity and so on with high precision, and can be used to measure low reflectivity objects. In this paper, the self-mixing interference effect of fiber laser and its application in displacement and step measurement are studied. The linear cavity single wavelength fiber laser, ring cavity single wavelength fiber laser and a new dual wavelength ring cavity fiber laser with independent channels are designed, and their self-mixing interference is realized. The displacement and step were measured by single wavelength self-mixing interference and two-wavelength self-mixing interference respectively. When single wavelength self-mixing interference is used to measure displacement, the stripes are slanted like sawtooth waves, and the inclination direction corresponds to the motion direction of the object being measured. The measuring range of the system can be up to 6 cm. The standard value of the system is measured by a high-precision voltage scanning table. When the measuring range is 450 渭 m, the precision reaches 34.3 m. The step height is measured by double wavelength self-mixing interferometry. The measuring range is up to millimeter and the factors that may affect the measurement accuracy are analyzed.
【學(xué)位授予單位】：北京交通大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TN248

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本文編號(hào)：2221859