【摘要】：雙工件臺是光刻機(jī)運(yùn)動控制系統(tǒng)的核心部件,雙工件臺的運(yùn)動由多個(gè)電機(jī)共同驅(qū)動。由于雙工件臺是高速運(yùn)行的平臺,這樣使得雙工件臺伺服控制系統(tǒng)對實(shí)時(shí)性要求極高。晶圓傳輸升降機(jī)構(gòu)在雙工件臺中負(fù)責(zé)晶圓的上下片,其動態(tài)性能和穩(wěn)態(tài)誤差影響光刻機(jī)的產(chǎn)率和晶圓硅片質(zhì)量。本文主要針對雙工件臺嵌入式上下位機(jī)進(jìn)行設(shè)計(jì),并對晶圓傳輸升降機(jī)構(gòu)進(jìn)行了運(yùn)動控制研究。首先,針對雙工件臺的功能需求,確定異構(gòu)平臺的上下位機(jī)系統(tǒng)的軟件總體架構(gòu)。對下位機(jī)Vxworks嵌入式系統(tǒng)結(jié)構(gòu)進(jìn)行詳細(xì)介紹,并設(shè)計(jì)了嵌入式主控CPU板與多塊運(yùn)動控制卡間的通信機(jī)制;接下來對下位機(jī)Vxworks嵌入式系統(tǒng)進(jìn)行任務(wù)規(guī)劃,包括Vxworks嵌入式系統(tǒng)任務(wù)間同步與通信,任務(wù)間調(diào)度等任務(wù),最后具體實(shí)現(xiàn)下位機(jī)嵌入式的多任務(wù)實(shí)時(shí)系統(tǒng)。其次,基于MFC開發(fā)了上位機(jī)界面,對異構(gòu)平臺的大小端模式進(jìn)行研究,解決了上下位機(jī)的數(shù)據(jù)傳輸問題,最后基于功能需要詳細(xì)介紹了上位機(jī)程序設(shè)計(jì),并通過實(shí)驗(yàn),驗(yàn)證了上位機(jī)的正確性。再次,針對晶圓升降機(jī)構(gòu)控制系統(tǒng)進(jìn)行軟硬件介紹,設(shè)計(jì)了包括傳感器模塊、信號采集卡在內(nèi)的硬件電路,并對運(yùn)動控制卡的軟件進(jìn)行了設(shè)計(jì),最后驗(yàn)證各功能模塊的正確性。最后,利用搭建的軟硬件平臺,進(jìn)行晶圓升降控制系統(tǒng)實(shí)驗(yàn),設(shè)計(jì)基于前饋控制的PID控制算法,通過實(shí)物驗(yàn)證控制系統(tǒng)的正確性。
[Abstract]:Double workpiece table is the core part of motion control system of lithography machine. The motion of double workpiece table is driven by multiple motors. Because the double workpiece platform is a high speed running platform, the servo control system of double workpiece platform requires high real-time performance. Wafer transport lift mechanism is responsible for wafer up-and-down in double workpiece table. Its dynamic performance and steady-state error affect the production rate of lithography machine and wafer quality. In this paper, a dual workpiece embedded upper and lower machine is designed, and the motion control of wafer transmission lifting mechanism is studied. Firstly, the software architecture of the upper and lower computer system of the heterogeneous platform is determined according to the functional requirements of the dual workpiece platform. The architecture of Vxworks embedded system is introduced in detail, and the communication mechanism between embedded master CPU board and motion control card is designed. Then, the task planning of Vxworks embedded system is carried out. It includes the tasks of synchronization and communication between tasks in Vxworks embedded system, inter-task scheduling and so on. Finally, the multi-task real-time system of embedded lower computer is implemented. Secondly, the upper computer interface is developed based on MFC, and the model of large and small end of heterogeneous platform is studied, which solves the problem of data transmission between upper and lower computers. Finally, the program design of upper computer is introduced in detail based on the need of function, and the experiment is carried out. The correctness of the upper computer is verified. Thirdly, the hardware and software of the wafer lifting mechanism control system are introduced, the hardware circuit including sensor module and signal acquisition card is designed, and the software of motion control card is designed. Finally, the correctness of each function module is verified. Finally, using the software and hardware platform, the experiment of wafer lifting control system is carried out, and the PID control algorithm based on feedforward control is designed, and the correctness of the control system is verified by physical object.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN305.7

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本文編號：2187963