【摘要】：微機(jī)電系統(tǒng)(MEMS)垂直腔面發(fā)射激光器(VCSELs)是一種特殊光源,具有低功耗、高調(diào)制速率、寬波長調(diào)諧范圍、易耦合等優(yōu)點(diǎn),被廣泛應(yīng)用于激光通信領(lǐng)域。為提升激光器工作性能,如擴(kuò)大波長調(diào)諧范圍、提高偏振對(duì)比度等,需要優(yōu)化內(nèi)腔亞波長光柵結(jié)構(gòu)參數(shù)來改善腔內(nèi)光場分布以及偏振輸出模式�；诘刃Ы橘|(zhì)理論(EMT),并結(jié)合薄膜理論設(shè)計(jì)了針對(duì)調(diào)諧范圍中心波長為850nm、GaAs材料的亞波長光柵的較優(yōu)周期、占空比、脊高的取值。分析了橫電(TE)、橫磁(TM)光,占空比與脊高對(duì)光柵透射率的影響。另外,通過系統(tǒng)模擬,對(duì)比了未刻蝕光柵、光柵未優(yōu)化及光柵優(yōu)化后的激光器波長調(diào)諧范圍,結(jié)果表明:針對(duì)特定波長調(diào)諧范圍及光柵材料,通過優(yōu)化光柵參數(shù)可實(shí)現(xiàn)光柵對(duì)TE或TM光的增透,增強(qiáng)半導(dǎo)體腔和空氣隙之間光場的耦合,進(jìn)而擴(kuò)大激光器的波長調(diào)諧范圍。
[Abstract]:(MEMS) vertical cavity surface emitting laser (VCSELs) in MEMS is a special light source, which has the advantages of low power consumption, high modulation rate, wide wavelength tuning range and easy coupling. It is widely used in the field of laser communication. In order to improve the performance of the laser, such as enlarging the wavelength tuning range and increasing the polarization contrast, it is necessary to optimize the structure parameters of the subwavelength grating in the cavity to improve the optical field distribution and the polarization output mode in the cavity. Based on the equivalent dielectric theory (EMT),) and the thin film theory, the optimal period, duty cycle and ridge height of the subwavelength grating with tuning range of 850 nm are designed. The effects of transverse (TE), transverse magnetic (TM) light, duty cycle and ridge height on the transmittance of the grating are analyzed. In addition, through systematic simulation, the wavelength tuning range of the laser with unetched grating, unoptimized grating and optimized grating is compared. The results show that: for specific wavelength tuning range and grating material, By optimizing the grating parameters, the grating can enhance the optical field coupling between the semiconductor cavity and the air gap, and then enlarge the wavelength tuning range of the laser.
【作者單位】： 長春理工大學(xué)高功率半導(dǎo)體激光國家重點(diǎn)實(shí)驗(yàn)室;北京工業(yè)大學(xué)光電子技術(shù)省部共建教育部重點(diǎn)實(shí)驗(yàn)室;
【基金】：國家自然科學(xué)基金(60908012,61575008) 吉林省科技計(jì)劃重點(diǎn)項(xiàng)目(201502040689x)
【分類號(hào)】：TN248

【相似文獻(xiàn)】

相關(guān)期刊論文 前10條

1 吳正茂;光柵外腔半導(dǎo)體激光器的調(diào)諧范圍[J];應(yīng)用激光;1996年03期

2 關(guān)寶璐;郭霞;楊浩;梁庭;顧曉玲;郭晶;鄧軍;高國;沈光地;;寬調(diào)諧范圍垂直腔面發(fā)射激光器特性分析及設(shè)計(jì)[J];物理學(xué)報(bào);2007年08期

3 周小紅,陳建國,李義峰,李大義,盧玉村,韓松;減反射膜與外腔半導(dǎo)體激光器調(diào)諧范圍[J];半導(dǎo)體光電;1997年06期

4 諶立新;;我國成功改寫納米線激光器調(diào)諧范圍的世界記錄[J];功能材料信息;2009年03期

5 ;國內(nèi)外專家合作改寫納米線激光器調(diào)諧范圍世界紀(jì)錄[J];電子元件與材料;2009年03期

6 諶立新;;我國成功改寫納米線激光器調(diào)諧范圍的世界紀(jì)錄[J];功能材料信息;2009年02期

7 周小紅，陳建國，，盧玉村;射線法研究外腔半導(dǎo)體激光器的調(diào)諧范圍[J];半導(dǎo)體光電;1996年02期

8 薛價(jià)猷;1,4雙[β-(取代苯基)乙烯基]苯衍生物的激光轉(zhuǎn)換效率與調(diào)諧范圍測試[J];中國激光;1983年04期

9 周金芳;李明范;;基于超磁致伸縮材料的光纖光柵調(diào)諧范圍研究(英文)[J];光子學(xué)報(bào);2007年01期

10 ;中美合作納米線激光器研究獲進(jìn)展打破半導(dǎo)體激光器調(diào)諧范圍世界紀(jì)錄[J];光學(xué)儀器;2009年02期

相關(guān)會(huì)議論文 前1條

1 李國華;呂治輝;張棟文;袁建民;;利用GaSe差頻產(chǎn)生THz的研究[A];第十五屆全國原子與分子物理學(xué)術(shù)會(huì)議論文摘要集[C];2009年

本文編號(hào)：2169189