【摘要】：隨著精密與超精密加工技術(shù)迅速發(fā)展,對(duì)位移測量的精度提出了更高的要求。目前微米級(jí)精度位移測量技術(shù)已遠(yuǎn)遠(yuǎn)不能滿足需求,因此納米級(jí)位移測量技術(shù)得到了迅猛發(fā)展,已成為測試計(jì)量行業(yè)中的研究熱點(diǎn)。基于衍射光柵的衍射干涉式位移傳感測量技術(shù)有著測量精度高、抗干擾能力強(qiáng)和制造成本廉價(jià)等優(yōu)點(diǎn),在當(dāng)前的超精密測試計(jì)量技術(shù)領(lǐng)域得到了普遍的運(yùn)用。國外在該領(lǐng)域的研究起步比較早,相關(guān)技術(shù)比較成熟,而國內(nèi)的技術(shù)水平相比于國外有著較大的差距。本文就基于數(shù)字相位原理的光柵干涉位移傳感技術(shù)進(jìn)行研究。采用數(shù)學(xué)方法,對(duì)光柵衍射現(xiàn)象、光學(xué)多普勒現(xiàn)象、相干光的干涉現(xiàn)象和光電轉(zhuǎn)換的實(shí)現(xiàn)進(jìn)行了求解。在測量系統(tǒng)的光路設(shè)計(jì)方面,重點(diǎn)采用了一種雙層光路結(jié)構(gòu),有效地減小了測量系統(tǒng)的空間,提高了其實(shí)用性。在信號(hào)調(diào)理電路方面,根據(jù)光電轉(zhuǎn)換輸出信號(hào)的特征,分別采用差分放大、低通濾波等多個(gè)基本電路完成了信號(hào)調(diào)理電路的設(shè)計(jì)。采用多級(jí)放大的方式有效地降低噪聲干擾,提高電路的信噪比。同時(shí),在PCB電路制作中也采用了一些抗干擾措施來減小不確定噪聲的影響。研究過程中發(fā)現(xiàn),光電轉(zhuǎn)換器的安裝角度誤差、條紋寬度的測量以及電路的延遲作用會(huì)使輸出的兩路信號(hào)處于非正交的狀態(tài),導(dǎo)致信號(hào)的細(xì)分計(jì)算誤差較大。為減少信號(hào)的非正交性產(chǎn)生的細(xì)分計(jì)算誤差,本文根據(jù)數(shù)字相關(guān)原理,提出了一種基于數(shù)字相位差測量的細(xì)分計(jì)算方法。對(duì)經(jīng)典數(shù)字相關(guān)法測量相位差的原理和誤差來源進(jìn)行了詳細(xì)討論,提出一種以經(jīng)典數(shù)字相關(guān)理論為基礎(chǔ)的相位差計(jì)算方法,打破了經(jīng)典計(jì)算理論中需要對(duì)被測信號(hào)進(jìn)行整周期采樣的限制條件,實(shí)現(xiàn)了相位差的高精度測量。將相位差的測量結(jié)果引入細(xì)分計(jì)算表達(dá)式中,得到最后的細(xì)分計(jì)算結(jié)果。此外,還運(yùn)用軟件的方法實(shí)現(xiàn)了信號(hào)整周期數(shù)計(jì)算和運(yùn)動(dòng)方向辨別的,有效地簡化了信號(hào)處理電路。利用實(shí)驗(yàn)室現(xiàn)有條件,搭建了光柵干涉位移傳感系統(tǒng)實(shí)驗(yàn)平臺(tái),并對(duì)該系統(tǒng)的光路結(jié)構(gòu)、信號(hào)調(diào)理電路和信號(hào)采集系統(tǒng)等模塊進(jìn)行獨(dú)立調(diào)試和系統(tǒng)聯(lián)調(diào),獲得了包含有位移信號(hào)的干涉條紋,并經(jīng)光電轉(zhuǎn)換后得到了雙路輸出電信號(hào),再經(jīng)數(shù)據(jù)采集系統(tǒng)和計(jì)算機(jī)處理后得到位移值。實(shí)驗(yàn)的結(jié)果顯示,系統(tǒng)的分辨率可達(dá)到5nm,且具有良好的重復(fù)性和線性度。
[Abstract]:With the rapid development of precision and ultra-precision machining technology, the accuracy of displacement measurement is required higher. At present, the precision displacement measurement technology of micron scale is far from meeting the demand, so the nanometer displacement measurement technology has been developed rapidly, and has become the research hotspot in the field of measurement and measurement. The diffraction interferometric displacement sensing technology based on diffraction grating has many advantages such as high measurement precision, strong anti-interference ability and low cost of manufacture, so it has been widely used in the field of ultra-precision measurement and measurement. The foreign research in this field started early, the related technology is relatively mature, but the domestic technical level has a big gap compared with the foreign countries. In this paper, the grating interferometric displacement sensing technology based on digital phase principle is studied. The diffraction phenomenon of grating, optical Doppler phenomenon, interference phenomenon of coherent light and the realization of photoelectric conversion are solved by mathematical method. In the aspect of optical circuit design of measurement system, a two-layer optical circuit structure is adopted, which effectively reduces the space of measurement system and improves its practicability. In the aspect of signal conditioning circuit, according to the characteristics of photoelectric conversion output signal, the signal conditioning circuit is designed by using several basic circuits, such as differential amplifier, low pass filter and so on. Multistage amplification is used to effectively reduce noise interference and improve the signal-to-noise ratio of the circuit. At the same time, some anti-interference measures are adopted in PCB circuit to reduce the influence of uncertain noise. During the research, it is found that the angle error of the photoelectric converter, the measurement of the width of the stripe and the delay of the circuit will make the two output signals in a non-orthogonal state, resulting in a large error in the subdivision calculation of the signal. In order to reduce the subdivision error caused by non-orthogonality of signal, a subdivision calculation method based on digital phase difference measurement is proposed according to the principle of digital correlation. The principle and error source of phase difference measurement by classical digital correlation method are discussed in detail. A phase difference calculation method based on classical digital correlation theory is proposed. It breaks the limit condition of the classical calculation theory, which requires the whole period sampling of the measured signal, and realizes the high precision measurement of the phase difference. The measurement results of phase difference are introduced into the expression of subdivision calculation, and the final subdivision results are obtained. In addition, the method of software is used to calculate the whole period number of signal and distinguish the direction of motion, which simplifies the signal processing circuit effectively. The experimental platform of grating interferometric displacement sensing system is built by using the existing conditions in the laboratory. The optical circuit, signal conditioning circuit and signal acquisition system of the system are debugged independently and the system is combined. The interference fringes with displacement signals are obtained. After photoelectric conversion, two output electrical signals are obtained, and the displacement values are obtained by data acquisition system and computer processing. The experimental results show that the resolution of the system can reach 5 nm, and the system has good repeatability and linearity.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH822;TN25

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本文編號(hào)：2162687