【摘要】：提出了一種測(cè)量平行液晶空間光調(diào)制器(SLM)相位調(diào)制特性的自干涉法。該方法實(shí)驗(yàn)簡(jiǎn)單,具有良好的穩(wěn)健性。加載到SLM的灰度圖由三部分組成,一部分是二元衍射光柵灰度圖;另外兩部分加載的灰度圖均勻分布,下部分灰度值恒為0,上部分灰度值從0逐漸增加。隨著上部分灰度的改變,經(jīng)過(guò)相位調(diào)制的反射光束與光柵產(chǎn)生的+1級(jí)衍射光干涉生成一整幅錯(cuò)位條紋圖,通過(guò)測(cè)量同一幅干涉條紋的周期和上下條紋之間的相對(duì)移動(dòng)量來(lái)計(jì)算SLM的相位調(diào)制量大小,該方法消除了環(huán)境振動(dòng)或空氣湍流引起的條紋抖動(dòng)對(duì)測(cè)量的影響,提高了測(cè)量精度。與其他方法相比,該方法獲取SLM相位調(diào)制特性不需要復(fù)雜的光學(xué)裝置,且具有優(yōu)良的機(jī)械穩(wěn)定性,反應(yīng)快速更易實(shí)施。
[Abstract]:A self-interference method for measuring the phase modulation characteristics of a parallel liquid crystal spatial light modulator (SLM) is proposed. The method is simple and robust. The grayscale image loaded into SLM consists of three parts, one is a binary diffraction grating grayscale image, the other two parts of the grayscale image are uniformly distributed, the gray value of the lower part of the image is constant to 0, and the upper part of the gray value increases gradually from 0. With the change of the upper gray level, a whole staggered fringe pattern is generated by the interference of the phase modulated reflected beam with the first order diffraction light generated by the grating. The magnitude of phase modulation of SLM is calculated by measuring the period of interference fringes and the relative movement between upper and lower fringes. This method eliminates the influence of ambient vibration or the fringe jitter caused by air turbulence and improves the accuracy of measurement. Compared with other methods, this method does not require complex optical devices to obtain SLM phase modulation characteristics, and has excellent mechanical stability, and the response is faster and easier to implement.
【作者單位】： 西安交通大學(xué)機(jī)械工程學(xué)院機(jī)械制造系統(tǒng)國(guó)家重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金(61575157) 中國(guó)博士后科學(xué)基金(163576)
【分類號(hào)】：TN761

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