本文選題：BiSS-C + FPGA��； 參考：《液晶與顯示》2016年04期

【摘要】：為了滿足光刻機(jī)工件臺(tái)超精密運(yùn)動(dòng)控制系統(tǒng)對(duì)位移測(cè)量的需求,本文提出了基于FPGA的BiSS-C協(xié)議解碼方法,并針對(duì)該方法進(jìn)行了電路設(shè)計(jì)以及實(shí)驗(yàn)驗(yàn)證。首先,研究了BiSS-C協(xié)議內(nèi)容,就其組網(wǎng)方式和幀格式做了詳細(xì)的介紹。然后,針對(duì)絕對(duì)式編碼器解碼要求,利用FPGA拓展性好、靈活性高等特點(diǎn),通過(guò)狀態(tài)機(jī),設(shè)計(jì)了絕對(duì)式編碼器的數(shù)據(jù)傳輸電路,實(shí)現(xiàn)了BiSS-C協(xié)議的譯碼功能,并采用CLE-AA容柵尺進(jìn)行了應(yīng)用驗(yàn)證。最后,進(jìn)行了與增量式光柵尺的對(duì)比校準(zhǔn)實(shí)驗(yàn)。實(shí)驗(yàn)表明,容柵尺絕對(duì)式編碼器可實(shí)現(xiàn)10kHz的傳輸速率,運(yùn)動(dòng)誤差在±5μm之內(nèi),其可靠性與準(zhǔn)確性滿足超精密運(yùn)動(dòng)控制系統(tǒng)的粗定位要求。
[Abstract]:In order to meet the requirement of displacement measurement in ultra-precision motion control system of lithographic workpiece, this paper presents a decoding method of BiSS-C protocol based on FPGA, and designs the circuit and verifies the method by experiment. Firstly, the content of BiSS-C protocol is studied, and its networking mode and frame format are introduced in detail. Then, according to the decoding requirements of absolute encoder, the decoding function of BiSS-C protocol is realized by using the characteristics of FPGA, such as good expansibility and high flexibility, and the data transmission circuit of absolute encoder is designed by state machine. The application of CLE-AA capacitive grating ruler is verified. Finally, the contrast calibration experiment with the incremental grating ruler is carried out. The experimental results show that the absolute encoder can achieve the transmission rate of 10kHz, the motion error is within 鹵5 渭 m, and its reliability and accuracy meet the requirements of coarse positioning of ultra-precision motion control system.
【作者單位】： 清華大學(xué)機(jī)械工程系;
【基金】：國(guó)家自然科學(xué)基金(No.51475261)~~
【分類號(hào)】：TN762
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本文編號(hào)：2048976