本文選題：光束整形 + 微透鏡陣列��； 參考：《南京理工大學(xué)》2015年碩士論文

【摘要】：在材料處理、醫(yī)學(xué)手術(shù)、半導(dǎo)體制造、激光核聚變及全息術(shù)等激光應(yīng)用領(lǐng)域,激光光束的能量分布不均勻特性限制了其應(yīng)用,需將高斯光束整形成能量均勻分布的平頂激光束。目前國內(nèi)大多采用非球面透鏡組、二元光學(xué)元件或空間光調(diào)制器構(gòu)成光束整形均化裝置,而鮮有對以微透鏡陣列(Microlens array, MLA)作為均化元件的激光均化器研究。微透鏡陣列均化器具有結(jié)構(gòu)簡單、制造成本低、對入射光束變化不敏感等優(yōu)點(diǎn),所以研究基于微透鏡陣列的激光光束均化技術(shù)有很大的工程意義和應(yīng)用價(jià)值。本文主要研究了微透鏡陣列為主要元件組成的衍射型和成像型兩種結(jié)構(gòu)光束均化器。首先以標(biāo)量衍射理論為基礎(chǔ),詳細(xì)推導(dǎo)了兩種結(jié)構(gòu)均化器的目標(biāo)面理論光場分布的數(shù)學(xué)表達(dá)式。根據(jù)幾何光學(xué)成像公式得到目標(biāo)面光斑大小與系統(tǒng)參數(shù)的關(guān)系。然后以菲涅爾數(shù)評價(jià)均化器中衍射效應(yīng),通過MATLAB軟件仿真菲涅爾數(shù)變化對均化光斑的影響。用算子光學(xué)方法得到了兩種微透鏡陣列均化器的等效模型。最后,分析了準(zhǔn)直激光器作為光源時(shí)均化面的干涉效應(yīng),對于高相干光源均化光光斑不可避免的出現(xiàn)高對比度的干涉點(diǎn)陣圖。本文構(gòu)建了衍射型與成像型微透鏡陣列均化試驗(yàn)系統(tǒng),計(jì)算測量結(jié)果并與論文推導(dǎo)的理論結(jié)果相比較。實(shí)驗(yàn)結(jié)果證明了文中所建立的微透鏡陣列均化器模型正確有效。說明了微透鏡陣列作為激光光束均化器主要元件的可行性和高效性。
[Abstract]:In the fields of material processing, medical surgery, semiconductor manufacturing, laser fusion and holography, the nonuniformity of laser beam energy distribution limits its application. It is necessary to shape the Gao Si beam into a flat-top laser beam with uniform energy distribution. At present, most of our country use aspheric lens group, binary optical element or spatial light modulator to form beam shaping and homogenizing device, but there are few researches on laser equalizer with microlens array (MLA) as homogenization element. Microlens array homogenizer has the advantages of simple structure, low manufacturing cost and insensitivity to the change of incident beam, so it is of great engineering significance and application value to study laser beam equalization technology based on microlens array. In this paper, the diffractive and imaging beam equalizers composed of microlens arrays are studied. Firstly, based on the scalar diffraction theory, the mathematical expressions of the theoretical light field distribution on the target surface of two kinds of structural equalizers are derived in detail. According to the geometric optical imaging formula, the relationship between the target surface spot size and the system parameters is obtained. Then the diffraction effect in the equalizer is evaluated by Fresnel number, and the influence of Fresnel number change on the equalization spot is simulated by MATLAB software. The equivalent models of two kinds of microlens array equalizers are obtained by using operator optics method. Finally, the interference effect of collimation laser as a light source is analyzed, and a high contrast interference dot matrix is inevitable to homogenize the light spot of high coherent light source. In this paper, a diffractive and imaging microlens array homogenization test system is constructed. The measured results are compared with the theoretical results derived in this paper. The experimental results show that the model of microlens array equalizer is correct and effective. The feasibility and efficiency of microlens array as the main component of laser beam equalizer are explained.
【學(xué)位授予單位】：南京理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN24

【參考文獻(xiàn)】

相關(guān)期刊論文 前4條

1 殷智勇;汪岳峰;賈文武;黃峰;強(qiáng)繼平;雷呈強(qiáng);張琳琳;;基于微透鏡陣列光束均勻化的傅里葉分析[J];激光與紅外;2012年02期

2 李殿軍;梁思遠(yuǎn);曹建建;;非球面伽利略擴(kuò)束系統(tǒng)實(shí)現(xiàn)激光束空間整形[J];激光技術(shù);2008年04期

3 李珂;石鵬;張曉波;王聲波;黃坤;李永平;;雙透鏡系統(tǒng)光束整形元件的設(shè)計(jì)制作[J];中國激光;2010年08期

4 夏國才;孫小燕;段吉安;;用于實(shí)現(xiàn)激光高效率加工的光束整形技術(shù)[J];激光與光電子學(xué)進(jìn)展;2012年10期

相關(guān)博士學(xué)位論文 前1條

1 林勇;用于激光光束整形的衍射光學(xué)元件設(shè)計(jì)[D];大連理工大學(xué);2009年

，

本文編號：1963693