本文選題：非對稱金屬包覆介質(zhì)波導(dǎo) + 表面等離子體　； 參考：《蘭州理工大學(xué)》2017年碩士論文

【摘要】：本文基于非對稱金屬包覆介質(zhì)波導(dǎo),使用棱鏡激發(fā)該結(jié)構(gòu)中的導(dǎo)模,刻寫一維亞波長光柵和二維多層亞波長光子結(jié)構(gòu)。通過分析導(dǎo)模的色散曲線和導(dǎo)模干涉光場分布圖,研究一維亞波長光柵和二維多層亞波長光子結(jié)構(gòu)的周期與相關(guān)參數(shù)的關(guān)系。該制備方法成本低廉,操作簡單,產(chǎn)出高,為這兩種微納結(jié)構(gòu)的廣泛利用提供了重要的理論參考,并且為以后在實驗中刻寫制備多層亞波長光子結(jié)構(gòu)提供了一種可能的方法。具體研究內(nèi)容如下:(1)用325nm波長的激光激發(fā)由Al膜,光刻膠,和空氣組成的非對稱金屬包覆介質(zhì)波導(dǎo)結(jié)構(gòu)中的零階導(dǎo)模,來刻寫不同周期,不同深寬比的亞波長光柵。通過零階導(dǎo)模色散曲線理論分析和有限元方法數(shù)值模擬,發(fā)現(xiàn)改變光刻膠的厚度和折射率,導(dǎo)模的偏振可以刻寫不同周期和不同深寬比的亞波長光柵,并且刻寫的亞波長光柵最小周期能夠達90nm。(2)基于非對稱金屬包覆介質(zhì)波導(dǎo),利用棱鏡耦合方式激發(fā)該結(jié)構(gòu)中的TE0導(dǎo)模,通過兩束TE0導(dǎo)模干涉,從而在理論上實現(xiàn)刻寫周期可調(diào)的亞波長光柵。在研究中,我們用TE0導(dǎo)模的色散曲線,研究了TE0導(dǎo)模刻寫的亞波長光柵周期與激發(fā)光波長、光刻膠厚度和折射率、棱鏡之間的關(guān)系。再用有限元方法模擬的非對稱金屬包覆介質(zhì)波導(dǎo)中TE0導(dǎo)波模式的干涉電場分布進行驗證。最后,將TE0導(dǎo)模干涉光刻與表面等離子體干涉光刻進行比較,發(fā)現(xiàn)由于TE0導(dǎo)模穿透深度相較于SPP更大,故而可實現(xiàn)在厚光刻膠條件下,改變激發(fā)光波長、棱鏡折射率、光刻膠折射率、尤其是光刻膠厚度等方法有效調(diào)控亞波長光柵的周期。(3)理論研究高階導(dǎo)模干涉刻寫不同周期和層數(shù)的多層亞波長光子結(jié)構(gòu)。442nm波長的激光作為激發(fā)光源激發(fā)非對稱金屬介質(zhì)波導(dǎo)中的高階導(dǎo)模。理論分析導(dǎo)模的色散曲線和數(shù)值模擬的導(dǎo)模干涉場分布,詳細研究多層亞波長光子結(jié)構(gòu)的周期與光刻膠的厚度和折射率,高階導(dǎo)模的模序數(shù)和偏振的關(guān)系。這種制備方法不僅可以制備不同周期和層數(shù)的多層亞波長光子結(jié)構(gòu),而且它的過程簡單,成本低廉。
[Abstract]:Based on the asymmetric metal-coated dielectric waveguide, the guided mode of the structure is excited by prism, and the 2-D multilayer subwavelength photonic structure is described. By analyzing the dispersion curve of the guided mode and the light field distribution of the guided mode interference, the relationship between the periodicity and the related parameters of the 1-B wavelength grating and the two-dimensional multilayer sub-wavelength photonic structure is studied. This method has the advantages of low cost, simple operation and high output, which provides an important theoretical reference for the wide use of these two microstructures, and provides a possible method for the fabrication of multilayer sub-wavelength photonic structures in the future. The specific research contents are as follows: (1) the zero-order guided mode in the asymmetric metal-coated dielectric waveguide structure composed of Al film, photoresist and air is excited by 325nm wavelength laser to write subwavelength gratings with different periods and different aspect ratios. By theoretical analysis of zero-order guided mode dispersion curve and numerical simulation by finite element method, it is found that by changing the thickness and refractive index of photoresist, the polarization of guided mode can be characterized by subwavelength grating with different periods and ratio of depth to width. And the minimum period of the subwavelength grating can be up to 90nm.m-2) based on the asymmetric metal-coated dielectric waveguide, the TE0 guided mode in the structure is excited by prism coupling mode, and the interference is achieved by two TE0 guided mode interference. Thus the subwavelength grating with adjustable writing period can be realized theoretically. In the study, we use the dispersion curve of TE0 guided mode to study the relationship between the period of subwavelength grating and the wavelength of excited light, thickness of photoresist and refractive index, prism. The interference electric field distribution of TE0 guided wave mode in asymmetric metal-clad dielectric waveguide was simulated by finite element method. Finally, by comparing the TE0 guided mode interference lithography with the surface plasma interference lithography, it is found that because the penetration depth of the TE0 guide mode is larger than that of the SPP, it can be realized under the condition of thick photoresist to change the excited light wavelength and the refractive index of the prism. Refractive index of photoresist, Theoretical study on the effective Control of the period of Subwavelength grating by photoresist thickness) theoretical study of higher-order guided mode interferometry with different periods and layers of multi-layer sub-wavelength photonic structure. 442 nm wavelength as excitation source to excite asymmetric light High order guided modes in metallic dielectric waveguides. The dispersion curve of guided mode and the distribution of guided mode interference field in numerical simulation are analyzed theoretically. The relationship between the period of multilayer sub-wavelength photonic structure and the thickness and refractive index of photoresist, the mode number and polarization of high-order guided mode is studied in detail. This method can not only fabricate multilayer sub-wavelength photons with different periods and layers, but also have simple process and low cost.
【學(xué)位授予單位】：蘭州理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN25

【參考文獻】

相關(guān)期刊論文 前9條

1 陳宜臻;王向賢;王茹;楊華;祁云平;;Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference[J];Chinese Physics B;2017年05期

2 王茹;王向賢;楊華;祁云平;;Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph[J];Chinese Physics B;2017年02期

3 王茹;王向賢;楊華;葉松;;TE_0導(dǎo)模干涉刻寫周期可調(diào)亞波長光柵理論研究[J];物理學(xué)報;2016年09期

4 梁慧敏;王景全;王學(xué);王桂梅;;Surface Plasmon Interference Lithography Assisted by a Fabry-Perot Cavity Composed of Subwavelength Metal Grating and Thin Metal Film[J];Chinese Physics Letters;2015年10期

5 郭凱;劉建龍;周可雅;劉樹田;;Enhanced surface plasmon interference lithography from cavity resonance in the grating slits[J];Chinese Physics B;2015年04期

6 田曼曼;米佳佳;石建平;魏楠楠;詹伶俐;黃萬霞;左則文;王長濤;羅先剛;;248 nm imaging photolithography assisted by surface plasmon polariton interference[J];Optoelectronics Letters;2014年01期

7 徐向東;劉穎;邱克強;劉正坤;洪義麟;付紹軍;;HfO_2頂層多層介質(zhì)膜脈寬壓縮光柵的離子束刻蝕[J];物理學(xué)報;2013年23期

8 李志遠;李家方;;金屬納米結(jié)構(gòu)表面等離子體共振的調(diào)控和利用[J];科學(xué)通報;2011年32期

9 孫霞;尤四方;肖沛;丁澤軍;;電子束光刻的鄰近效應(yīng)及其模擬[J];物理學(xué)報;2006年01期

相關(guān)博士學(xué)位論文 前1條

1 王向賢;亞波長分辨光刻介質(zhì)特性與光刻方法研究[D];中國科學(xué)技術(shù)大學(xué);2013年

，

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