本文選題：熱調(diào)諧級聯(lián)雙環(huán)諧振腔 + 熱光效應(yīng)　； 參考：《浙江大學(xué)》2015年碩士論文

【摘要】：隨著光通信技術(shù)的快速發(fā)展,半導(dǎo)體激光器作為光源,在光纖通信系統(tǒng)和光交換系統(tǒng)中有著重要的地位。外腔激光器相比于普通半導(dǎo)體激光器,其線寬更窄,波長調(diào)諧范圍更寬,有較小的啁啾,具有優(yōu)良的光譜特性,所以一直是研究熱點(diǎn)。本課題中提出了基于熱調(diào)諧微環(huán)諧振腔的外腔半導(dǎo)體激光器,主要介紹了熱調(diào)諧微環(huán)諧振腔和外腔準(zhǔn)直光路的設(shè)計(jì)。本文中首先介紹了微環(huán)諧振腔的基本理論和傳輸函數(shù),以及固體傳熱理論,詳細(xì)分析了SO1波導(dǎo)的模場分布。硅材料具有較大的熱光系數(shù),能夠很好地應(yīng)用于熱調(diào)諧,以此設(shè)計(jì)了熱調(diào)諧級聯(lián)雙環(huán)諧振腔。本文分析了熱調(diào)諧級聯(lián)雙環(huán)諧振腔的性能,其利用游標(biāo)效應(yīng)增加了波長漂移范圍,增大了熱調(diào)諧范圍及熱調(diào)諧效率。接著詳細(xì)介紹了熱調(diào)諧級聯(lián)雙環(huán)諧振腔的制作工藝流程,制作主要分為級聯(lián)雙環(huán)諧振腔和微加熱器兩個部分,詳細(xì)介紹了電子束光刻、刻蝕、薄膜沉積、接觸式光刻等工藝；接著介紹了端面耦合的芯片測試平臺搭建和測試流程,測試了單環(huán)和雙環(huán)諧振腔的輸出端透射譜曲線。最后詳細(xì)介紹了自聚焦透鏡的特性。利用兩個自聚焦透鏡建立準(zhǔn)直光路,將熱調(diào)諧級聯(lián)雙環(huán)諧振腔和FP腔組合連接,建立外腔激光器,其可以實(shí)現(xiàn)窄線寬輸出。
[Abstract]:With the rapid development of optical communication technology, semiconductor lasers, as light sources, play an important role in optical fiber communication systems and optical switching systems. Compared with conventional semiconductor lasers, external cavity lasers have narrower linewidth, wider wavelength tuning range, smaller chirp and better spectral characteristics. In this paper, an external cavity semiconductor laser based on thermally tuned microring resonator is proposed, and the design of thermal tuned microring resonator and collimation optical path is introduced. In this paper, the basic theory and transfer function of microring resonator and the theory of solid heat transfer are introduced, and the mode field distribution of SO1 waveguide is analyzed in detail. Silicon has a large thermo-optical coefficient and can be well applied to thermal tuning. Based on this, a thermotuning cascade double-ring resonator is designed. In this paper, the performance of thermal tuning cascade double ring resonators is analyzed. The range of wavelength shift, the thermal tuning range and the thermal tuning efficiency are increased by using the Vernier effect. Then the fabrication process of thermal tuned double ring resonator is introduced in detail, which is mainly divided into two parts: cascade double ring resonator and micro heater. The processes of electron beam lithography, etching, thin film deposition and contact lithography are introduced in detail. Then the end coupling chip test platform and test flow are introduced. The transmission spectrum curves of the output end of single and double ring resonators are tested. Finally, the characteristics of self-focusing lens are introduced in detail. Two self-focusing lenses are used to establish collimating optical path. The thermal tuning cascade double-ring resonator and FP cavity are combined to establish the external cavity laser. The output of narrow linewidth can be realized.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TN248.4

【參考文獻(xiàn)】

相關(guān)期刊論文 前1條

1 刁健;李洪祚;宋濤;;自聚焦透鏡準(zhǔn)直設(shè)計(jì)[J];儀器儀表用戶;2009年03期

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本文編號：1913353